A semiconductor device typically consists of multiple material layers/ films, each serving a definite purpose in the end device. These layers are processed at different stages of device fabrication and are required to have certain properties to serve their purpose. In this regard, physical and chemical characterization tools are necessary to evaluate material properties, and are therefore used extensively during device fabrication.

Physical characterization tools are used to ascertain physical properties of the film/ material such as crystalline structure, topography, refractive index, etc. On the other hand, chemical characterization tools are used to ascertain chemical properties such as atomic &/ or molecular structure, identification of chemical species, chemical reactivity, etc. When integrating new materials into devices or when attempting new device designs, these material characterization tools form a critical part of the research and device development.

IITBNF has an array of physical and chemical characterization tools that enable in-line (during fabrication) and post-fabrication investigation into material structure and related properties. They are listed as follows:


InstrumentLocationContamination category
1 Olympus Microscope_1 Nano Labin line ac
2 Sentech Ellipsometer Nano Labin line ac
3 Ambios XP-2 Profilometer Nanoelectronics Processing Lab (NanoE bldg, 1st floor)litho/analytical
4 Contact Angle Instrument (GBX) Bio Sensors Lab (NanoE bldg, 7th floor)gold contaminated
5 FTIR Bio Sensors Lab (NanoE bldg, 7th floor)litho/analytical
6 Fluorescence Microscope (Z1) Bio Sensors Lab (NanoE bldg, 7th floor)litho/analytical
7 UV-Vis-NIR Spectrometer - Lambda 750 Bio Sensors Lab (NanoE bldg, 7th floor)litho/analytical
8 Photoluminescence Measurement set up (PL Set up) Micro2 Lablitho/analytical
9 SEM EVO 18 Micro1 Lablitho/analytical
10 Filmetrics Reflectometer Micro2 Labtbd
11 DektakXT Profilometer Micro2 Lablitho/analytical
12 X-ray Photoelectron Spectroscopy Micro2 Lablitho/analytical
13 Olympus Microscope_2 Wet Chemistry lablitho/analytical
14 UV-Vis-Spectrometer - Lambda 25 (CLEAN Lab) 7.1 Lablitho/analytical
15 HRXRD Micro1 Labin line ac
16 Temperature Dependent Spectral Response Measurement system - PL set up Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)clean
17 Transient Absorption Pump Probe Spectrometer Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)clean
18 PPMS - Integrated cryogen-free system Char Lab-2clean
19 Leica Microscope 7.1 Labclean
20 Contact Angle System (Data Physics) 7.1 Laboff line a
21 FTIR Spectrometer (Spectrum 65) 7.1 Laboff line a
22 micro PL 2D Materials and Devices Labgold contaminated
23 MFP-3D-AFM MCL Labin line ac
  • To understand what the contamination categories mean, click here

  • To check if your process plan complies with contamination rules, click here

  • To view current working status of all the instruments, click here