Equipment Details

Name of the EquipmentICPRIE (New)
System OwnerBhanu B Upadhyay

Yogendra Yadav

Short NameICPRIE
Make/ ModelSentech/ SI 500
Critical ToolYes
Serial Number
FootPrint( Length 1.70 mtr, Breadth 1.75 mtr, Height1.67mt
Equipment TypeDry Etch tools
LocationNanoelectronics Processing Lab (NanoE bldg, 1st floor)
AMC Required
Local DealerOm Scientific Pvt, Pune

Om Scientific, A-2, Runwal Paradise, Bhusari Colony KOTHRUD, PUNE, MAHARASTRA INDIaN Ph: +919175631100 email: Contact Person: Shailesh Latey Sr. Technical support Engineer Omscientific pvt LTD
Actual DealerSentech, Germany

Roland K�gel, Schwarzschildstra�e 2 12489 Berlin, Germany
SOP SOP/98_SOP.pdf
Training & other policy documents
Tool Facilities RequirementsBCl3, Cl2, PN2, SF6, O2 , Ar and water supply
Lab Phone No4488 Ext Flash 107 OR 111
Substrate allowedGaAs/ GaN
Substrate DimensionPieces to 4 inch wafer
Chemical allowedNA, GaAs/ GaN
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedBCl3, Cl2, Ar, O2, SF6
Contamination remarksNo metal allowed