Equipment Details

Name of the EquipmentSTSRIE
Categorysemi clean a
OperatorMayur Pawar
Akshata Bhosle
System OwnerMayur Pawar

Short Name
Make/ ModelSTS/ 320 PC
Critical ToolYes
Serial Number
Equipment TypeDry Etch tools
LocationMicro1 Yellow Room
AMC Required
Local Dealer

Actual DealerM/s. CTP Company Services.

M/s. CTP Company Services., 3 Commercial Road, Cwmfelinfach, Near Newport, Gwent, NP11-7HW, U.K. Mob: 7754002875 Email:
SOP SOP/93_SOP.pdf
Training & other policy documentsPOLICY/93_POLICY.pdf
Glimpse GLIMPSE/93_GLIMPSE.pdf
Tool Facilities Requirementschiller, Nitrogen gas(GN2, PN2) and process gases CF4, SF6, CHF3, O2
Lab Phone No4493
Substrate allowedSi, Ge, GeSn, Diamond
Substrate DimensionPieces to 6 inch wafer
Chemical allowedNA, SiO2, Si, Ge, Photoresists, HfO2, Al2O3, TiO2, NbN, Pt
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedSF6, CF4, CHF3, O2, N2
Contamination remarksOnly Pt is allowed for inside the chamber as hard mask. Metal etching is not allowed.