Equipment Details



Name of the EquipmentWafer Dicer – ADT
Categorygold contaminated
OperatorHemant Kshirsagar
System OwnerHemant Kshirsagar
hemant@ee.iitb.ac.in

Anjum Ahmed
anjum04@iitb.ac.in

Short Name
Make/ ModelADT7122
Critical ToolYes
Serial Number
FootPrint
InstallationDate
Equipment TypeMiscellaneous
LocationNMPF Lab
AMC Required
Local DealerMr. Rajalingam

rajalingam@sms-in.com Ph - 9849307555
Actual DealerAdvanced Dicing Technologies

SOP SOP/342_SOP.pdf
Training & other policy documents
Recipies
Glimpse GLIMPSE/342_GLIMPSE.pdf
Tool Facilities RequirementsN2 plant, chilled water, tap water
AccessControlled
Lab Phone No6252
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimensionNo restriction on minimum size. Maximum 8 inch wafer
Gases allowed
Contamination remarks