Equipment Details



Name of the EquipmentSpin Coater – Laurell
Categorylitho/analytical
OperatorHemant Kshirsagar
System OwnerHemant Kshirsagar
hemant@ee.iitb.ac.in

Anjum Ahmed
anjum04@iitb.ac.in

Short Name
Make/ ModelWS-650-23NPP
Critical ToolYes
Serial Number
FootPrint
InstallationDate
Equipment TypeLithography tools
LocationNMPF Lab
AMC Required
Local Dealer

SIMCO
Actual DealerLaurell

SIMCO, New Delhi
SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities RequirementsBlower, PN2
AccessOpen
Lab Phone No6302
Substrate allowed
Substrate DimensionMin 1/4 of 2 inch wafer. 4 inch max
Chemical allowedPhotoresists, Acetone for cleaning, Photoresists
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside toolNA
Target dimensionNA
Gases allowedNA
Contamination remarks