Equipment Details



Name of the EquipmentDouble Side Mask Aligner – Suss Microtech
Categorylitho/analytical
OperatorHemant Kshirsagar
System OwnerAnjum Ahmed
anjum04@iitb.ac.in

Hemant Kshirsagar
hemant@ee.iitb.ac.in

Short Name
Make/ ModelSUSS
Critical ToolYes
Serial NumberMA6
FootPrint
InstallationDate
Equipment TypeLithography tools
LocationNMPF Lab
AMC Required
Local DealerChintan Patel

Actual DealerKarl SUSS

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SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessControlled
Lab Phone No6302
Substrate allowed
Substrate DimensionMaximum 4 inch wafer
Chemical allowedIPA for cleaning,
Precursors/ Targets allowed
*Based on stock availability
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Precursor/ Target loaded inside tool--
Target dimension--
Gases allowedPN2, GN2
Contamination remarks