Equipment Details



Name of the EquipmentAJA 6 Target E beam Evaporator
Categorygold contaminated
OperatorAnjum Ahmed
Mayur Pawar
Pijush Chakraborty
System OwnerPijush Chakraborty
P14297@iitb.ac.in

Short NameUHV- 6TEBE
Make/ ModelAJA International/ ATC-ORION-8E
Critical ToolYes
Serial NumberORION-8E-9000-12070
FootPrint(l) 2372.1 mm x (b) 762 mm x (h) 1752.7mm
InstallationDate04/13/2016
Equipment TypeDeposition, Growth and Annealing systems
LocationNanoelectronics Processing Lab (NanoE bldg, 1st floor)
AMC Required
Local DealerMr. Asheesh Ravi, Sales Executive Engineer

Anarghya Innovations and Technology Pvt Ltd, Bengaluru. Ph: +91 80 23376488 M : +91-9166563432 www.anarghyainnotech.com
Actual DealerMr. Joe Cronin, Customer Service Engineer

International, INC 809 Country Way Scituate, MA 02066 781-545-7365 E-mail: topgun@ajaint.com Web: www.ajaint.com
SOP SOP/300_SOP.pdf
Training & other policy documentsPOLICY/300_POLICY.pdf
Recipies
Glimpse GLIMPSE/300_GLIMPSE.pdf
Tool Facilities RequirementsChiller, N2, CDA
AccessControlled
Lab Phone No4488
Substrate allowedSi, Ge, GaN, Quartz
Substrate DimensionFrom 1cmX1cm pieces upto 4'' wafers
Chemical allowedIPA, Photoresists
Precursors/ Targets allowed
*Based on stock availability
Ti, Pt(<50nm), W, SiO2, Au(<50nm), Ni, Al2O3, Cr
Precursor/ Target loaded inside toolTi, Pt(<50nm), Au(<50nm), Ni, Al2O3, Cr
Target dimension1-6mm pellets/slugs in 15cc crucible liners
Gases allowedN2, CDA
Contamination remarksGold contaminated