Equipment Details

Name of the EquipmentUV-Ozone Cleaner_AMAT CLEAN Lab
Categorygold contaminated
OperatorPankajkumar Gound
System OwnerPankajkumar Gound

Short NameUV Cleaner
Make/ ModelJelight/ 144AX-220
Critical Tool
Serial Number14C004
FootPrint20 cm X 1 m
Equipment TypeMiscellaneous
Location7.1 Lab
AMC Not Required
Local DealerNA

Actual DealerJelight Co, Inc

2 Mason Irvine, CA 92618 U.S.A. Tel: (949)380-8774 FAX: (949)768-9457 E-mail:
SOP SOP/294_SOP.pdf
Training & other policy documents
Glimpse GLIMPSE/294_GLIMPSE.pdf
Tool Facilities RequirementsElectric power supply
Lab Phone No119
Substrate allowedAny
Substrate DimensionMax 20 cm X 20 cm
Chemical allowedAny, subject to review, Any
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside toolNA
Target dimensionNA
Gases allowedO2, N2
Contamination remarks