Equipment Details



Name of the EquipmentAtmospheric Furnace_AMAT CLEAN Lab
Categorytbd
Operator
System OwnerPankajkumar Gound
p15129@iitb.ac.in

Short NameAtomic Furnace
Make/ Model/
Critical ToolNo
Serial Number
FootPrint1.5m X 1.5m
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
Location7.1 Lab
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse GLIMPSE/291_GLIMPSE.pdf
Tool Facilities RequirementsElectric power supply
AccessOpen
Lab Phone No4438
Substrate allowedGlass, Quartz, All kinds of semiconductor wafer
Substrate Dimension
Chemical allowedNA, Inorganic and Organic Materials
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside toolNA
Target dimensionNA
Gases allowedN2, O2
Contamination remarks