Equipment Details
| Name of the Equipment | Graphene specific Argon annealing system |
| Category | gold contaminated |
| Operator | |
| System Owner | |
| Short Name | Graphene annealing s |
| Make/ Model | In house built/ |
| Critical Tool | No |
| Serial Number | |
| FootPrint | 56 CM X 92 CM X 120 CM |
| InstallationDate | 04/28/2015 |
| Equipment Type | Deposition, Growth and Annealing systems |
| Location | Nanoelectronics Processing Lab (NanoE bldg, 1st floor) |
| AMC | Not Required |
| Local Dealer | Excel instruments Excel instruments |
| Actual Dealer | Excel instruments Ph:+91-22-6500 8911 Fax : +91-22-4005 2963 |
| SOP | SOP/259_SOP.pdf |
| Training & other policy documents | POLICY/259_POLICY.pdf |
| Recipies | |
| Glimpse | |
| Tool Facilities Requirements | Argon, Nitrogen, Methane, FGA, chiller |
| Access | Controlled |
| Lab Phone No | 4488 Ext Flash 107 OR 111 |
| Substrate allowed | Si/ SiO2 |
| Substrate Dimension | Small pieces to 4 inch |
| Chemical allowed | No chemical allowed, Si/ SiO2, Graphene |
| Precursors/ Targets allowed *Based on stock availability | NA |
| Precursor/ Target loaded inside tool | |
| Target dimension | NA |
| Gases allowed | Argon, Nitrogen, Methane, FGA |
| Contamination remarks | Gold contaminated |