Equipment Details



Name of the EquipmentICPRIE (old)
Categoryclean
OperatorYogendra Yadav
System OwnerBhanu B Upadhyay
bhanu.upadhyay@iitb.ac.in

Yogendra Yadav
yogendra.yadav@iitb.ac.in

Short NameICPRIE
Make/ ModelSentech/ SI 500
Critical ToolYes
Serial NumberNA
FootPrint( Length 1.70 mtr, Breadth 1.75 mtr, Height1.67mt
InstallationDate2008
Equipment TypeDry Etch tools
LocationNanoelectronics Processing Lab (NanoE bldg, 1st floor)
AMC Required
Local DealerOm Scientific Pvt, Pune

Om Scientific, A-2, Runwal Paradise, Bhusari Colony KOTHRUD, PUNE, MAHARASTRA INDIaN Ph: +919175631100 email: shaileshlatey@gmail.com Contact Person: Shailesh Latey Sr. Technical support Engineer Omscientific pvt LTD
Actual DealerSentech, Germany

Roland K�gel, Schwarzschildstra�e 2 12489 Berlin, Germany
SOP SOP/21_SOP.pdf
Training & other policy documentsPOLICY/21_POLICY.pdf
Recipies
Glimpse GLIMPSE/21_Glimpse.pdf
Tool Facilities RequirementsBCl3, Cl2, PN2, SF6, O2 , Ar and water supply
AccessOpen
Lab Phone No4488 Ext Flash 107 OR 111
Substrate allowedGaAs/ GaN
Substrate DimensionPieces to 4 inch wafer
Chemical allowedNA, GaAs/ GaN
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedBCl3, Cl2 , Ar, O2
Contamination remarksmetals not allowed