Equipment Details

Name of the Equipment2 inch RCA Clean Station
Categoryclean (for si)
OperatorMinita Surwade
Pankajkumar Gound
Shilpa Kharat
System OwnerMinita Surwade

Pankajkumar Gound

Short NameRCA
Make/ ModelM/S Laxmi Instruments/ NA
Critical ToolYes
Serial Number200801132 (P O numbe
FootPrint465cm X 287cm
Equipment TypeWet chemistry tools
LocationWet Chemistry lab
AMC Not Required
Local DealerRupesh Khule

07208246450(for DI water system)
Actual DealerNA

SOP SOP/132_SOP.pdf
Training & other policy documentsPOLICY/132_Policy.pdf
Recipies RECEPIES/132_RECEPIES.pdf
Glimpse GLIMPSE/132_Glimpse.pdf
Tool Facilities RequirementsDI Water, Chemicals, Heater
Lab Phone No4464
Substrate allowedSilicon wafers only
Substrate Dimension1/4 of 2 inch minimum. 2 inch maximum
Chemical allowedAmmonium Hydroxide, H2O2, HCl, HF, DI water, Only Si wafers, and Quartz glass
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside toolNA
Target dimensionNA
Gases allowedNA
Contamination remarksNo other chemicals allowed. No glasswares allowed. Only teflon and quartz is allowed. Sodium and potassium contamination strictly prohibited.