Equipment Status

Sort By
2D Materials and Devices Lab
LIC : Deepti Rukade, Kartikey Thakar
System NameSystem OwnerFaculty in-chargeLocationStatus
1 2D Materials CVD
(Controlled access)
Atirah Zahoor
Himani Jawa
Saurabh Lodha2D Materials and Devices LabWorking
2 Phoenix
(Controlled access)
Sayantan Ghosh
Srilagna Sahoo
Saurabh Lodha2D Materials and Devices LabWorking
3 micro PL
(Controlled access)
Sayantan Ghosh
Kartikey Thakar
Saurabh Lodha2D Materials and Devices LabPartially Working
4 2-arm Glove Box
(Controlled access)
Pankajkumar Gound
Himani Jawa
Saurabh Lodha2D Materials and Devices LabWorking
5 Wire bonder (TPT HB05)_Gold
(Controlled access)
Himani Jawa
Kartikey Thakar
Saurabh Lodha2D Materials and Devices LabWorking

7.1 Lab
LIC : Deepti Rukade, Pankajkumar Gound
System NameSystem OwnerFaculty in-chargeLocationStatus
6 2 inch general purpose annealing furnace_Fume hood 3
(Open access)
Pankajkumar Gound
Anil Kottantharayil7.1 LabWorking
7 Atmospheric Furnace_AMAT CLEAN Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
8 Dip Coater
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
9 Drying Oven_AMAT CLEAN Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
10 Fume Hood 4
(Open access)
Pankajkumar Gound
7.1 LabWorking
11 Hot plate with stirrer (1)_Fume Hood 1
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
12 Hot plate with stirrer (2)_Fume Hood 1
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
13 Hot plate with stirrer (3)_2 arm glove box
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
14 Hot plate with stirrer (4)_4-arm glove box
(Open access)
Pankajkumar Gound
7.1 LabWorking
15 Hydrothermal Reactor_Fume Hood 2
(Controlled access)
7.1 LabWorking
16 pH Meter
(Open access)
Pankajkumar Gound
7.1 LabWorking
17 Schlenk Line (2)_Fume Hood 3
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
18 SILAR controller
(Open access)
Pankajkumar Gound
7.1 LabWorking
19 Spin Coater_4 arm glove box
(Open access)
Pankajkumar Gound
7.1 LabWorking
20 Thermogravimetric Analyzer
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
21 Tube Furnace_Fume hood 5
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
22 Contact Angle System (Data Physics)
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
23 FTIR Spectrometer (Spectrum 65)
(Open access)
Pankajkumar Gound
Anil Kottantharayil7.1 LabNot Working
24 Leica Microscope
(Open access)
Anjum Ahmed
7.1 LabWorking
25 UV-Vis-Spectrometer - Lambda 25 (CLEAN Lab)
(Open access)
Pankajkumar Gound
Anil Kottantharayil7.1 LabWorking
26 4-arm glove box_AMAT CLEAN Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
27 Chemical Mechanical Planarisation
(Controlled access)
Udayan Ganguly7.1 LabWorking
28 Schlenk Line (1)_Fume Hood 1
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
29 Ultrasonicator_Fume Hood 1
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
30 UV-Ozone Cleaner_AMAT CLEAN Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
31 Wafer bonder
(Open access)
Dipankar Saha7.1 LabPartially Working
32 Wire Bonder_Hybond
(Open access)
Kulasekaran Muniappan
Suddhasatta Mahapatra7.1 LabWorking

Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)
LIC : Deepti Rukade, Pankaj Upadhyay
System NameSystem OwnerFaculty in-chargeLocationStatus
33 Temperature Dependent Spectral Response Measurement system - PL set up
(Controlled access)
Pankaj Upadhyay
Vikas Pendem
Dipankar SahaApplied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)Working
34 Transient Absorption Pump Probe Spectrometer
(Controlled access)
Vikas Pendem
Dipankar SahaApplied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)Working

Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)
LIC : Deepti Rukade, Jaya Jha
System NameSystem OwnerFaculty in-chargeLocationStatus
35 Magnetoresistance Setup
(Open access)
Ambika Shanker Shukla
Ashwin TulapurkarApplied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)Working
36 RF Cryogenic Device Characterization system
(Controlled access)
Jaya Jha
Dipankar SahaApplied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)Working

Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)
LIC : Deepti Rukade, Kulasekaran Muniappan
System NameSystem OwnerFaculty in-chargeLocationStatus
37 FPA (Focal Plane Array) Characterization set up
(Open access)
Kulasekaran Muniappan
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working
38 Hall Measurement System
(Open access)
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Not Working
39 Spectral Response-single pixel characterisation
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working

Bio Sensors Lab (NanoE bldg, 7th floor)
LIC : Deepti Rukade, Madhuri Vinchurkar, Rajul Patkar
System NameSystem OwnerFaculty in-chargeLocationStatus
40 Eppendorf FemtoJet 4x Microinjector
(Open access)
Pankajkumar Gound
Soumyo MukherjiBio Sensors Lab (NanoE bldg, 7th floor)Working
41 Potentiostat
(Open access)
Saurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Working
42 Contact Angle Instrument (GBX)
(Open access)
Pankajkumar Gound
Saurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Not Working
43 Fluorescence Microscope (Z1)
(Controlled access)
Kasturi SahaBio Sensors Lab (NanoE bldg, 7th floor)Working
44 FTIR
(Open access)
Pankajkumar Gound
Anil KottantharayilBio Sensors Lab (NanoE bldg, 7th floor)Not Working
45 UV-Vis-NIR Spectrometer - Lambda 750
(Controlled access)
Pankajkumar Gound
Anil KottantharayilBio Sensors Lab (NanoE bldg, 7th floor)Working
46 Laser Engraving System (LES)
(Open access)
Pankajkumar Gound
Soumyo MukherjiBio Sensors Lab (NanoE bldg, 7th floor)Not Working

Char Lab-2
LIC : Deepti Rukade, Nitin Patil
System NameSystem OwnerFaculty in-chargeLocationStatus
47 PPMS - Integrated cryogen-free system
(Controlled access)
Ambika Shanker Shukla
Ashwin TulapurkarChar Lab-2Working

Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)
LIC : Deepti Rukade, Yaswanth Chebrolu
System NameSystem OwnerFaculty in-chargeLocationStatus
48 Aries(Temperature Dependent IV/CV)
(Open access)
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
49 Cryogenic probe station
(Controlled access)
Himani Jawa
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
50 Cygnus(Organic Device Characterization)
(Open access)
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
51 Polaris (Stress/Long Time Measurements)
(Open access)
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working
52 Proxima (Fast IV Measurement/ B1500)
(Open access)
Yaswanth Chebrolu
Anil KottantharayilDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
53 RIGEL (Keysight B1500)
(Open access)
Paritosh Meihar
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
54 Sirius (NBTI Setup)
(Open access)
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
55 Vega (Room Temperature IV/ CV)
(Open access)
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
56 Owlstone Vapour Generator (OVG-4)
(Open access)
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working

EC Lab
LIC : Deepti Rukade, Minita Surwade
System NameSystem OwnerFaculty in-chargeLocationStatus
57 Electroplating system - Au/Ni/Cu
(Open access)
Minita Surwade
Dipankar SahaEC LabWorking
58 PLD target making furnace
(Open access)
Subhananda ChakrabartiEC LabWorking
59 General Purpose Wet Bench (EC Lab)
(Open access)
Minita Surwade
Anil KottantharayilEC LabWorking
60 Cross section TEM sample preparation unit - Dimpler
(Controlled access)
Minita Surwade
Anil KottantharayilEC LabWorking
61 Cross section TEM sample preparation unit - Disc Cutter
(Controlled access)
Minita Surwade
Anil KottantharayilEC LabWorking
62 Cross section TEM sample preparation unit - PIPS
(Controlled access)
Minita Surwade
Anil KottantharayilEC LabWorking
63 Cross section TEM sample preparation unit - Ultrasonic Cutter
(Controlled access)
Minita Surwade
Anil KottantharayilEC LabWorking
64 EC Lab Hot air Oven
(Open access)
Minita Surwade
Ashwin TulapurkarEC LabWorking
65 Logitech PM5 Precision Lapping and Polishing Machine
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiEC LabWorking
66 Logitech WSB2 Wafer Substrate Bonding Unit
(Open access)
Kulasekaran Muniappan
Subhananda ChakrabartiEC LabWorking
67 Spinner 2 Inch (PDMS)
(Open access)
Minita Surwade
Dipankar SahaEC LabWorking
68 Vapor generator for explosive detection
(Open access)
V Ramgopal RaoEC LabWorking

MBE Clean Room 1 (NanoE bldg, Gr floor)
LIC : Deepti Rukade, Jay Agawane, RITAM SARKAR
System NameSystem OwnerFaculty in-chargeLocationStatus
69 Molecular Beam Epitaxy III Nitrides
(Controlled access)
Apurba LahaMBE Clean Room 1 (NanoE bldg, Gr floor)Working
70 Molecular Beam Epitaxy III-V
(Controlled access)
Debi Prasad Panda
Subhananda ChakrabartiMBE Clean Room 1 (NanoE bldg, Gr floor)Working
71 Molecular Beam Epitaxy Si, Ge, Sn
(Controlled access)
Suddhasatta MahapatraMBE Clean Room 1 (NanoE bldg, Gr floor)Working

MBE Clean Room 2 (NanoE bldg, Gr floor)
LIC : Deepti Rukade, Jay Agawane, RITAM SARKAR
System NameSystem OwnerFaculty in-chargeLocationStatus
72 6 Target E Beam Evaporator
(Controlled access)
Goma Kumari KC
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
73 In Thermal Evaporator
(Controlled access)
Goma Kumari KC
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
74 Dicer
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
75 Flip Chip Bonder
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working

MCL Lab
LIC : Aniruddha Khade
System NameSystem OwnerFaculty in-chargeLocationStatus
76 MFP-3D-AFM
(Open access)
Tarni Aggarwal
Navneet Bhardwaj
Dipankar SahaMCL LabWorking

Micro1 Lab
LIC : Deepti Rukade, Hemlata Tiwari, Minita Surwade
System NameSystem OwnerFaculty in-chargeLocationStatus
77 2 inch Annealing Furnace (Gen purpose Forming gas/ Ar annealing furnace)
(Open access)
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
78 2 inch Boron_Solid source Diffusion Furnace
(Open access)
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
79 2 inch CMOS specific FGA furnace
(Open access)
Anil KottantharayilMicro1 LabWorking
80 2 inch Dry oxidation Furnace
(Open access)
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
81 2 inch N2 Annealing Furnace
(Open access)
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
82 2 inch Phosphorous_Solid source Diffusion Furnace
(Open access)
Anil KottantharayilMicro1 LabPartially Working
83 2 inch Wet oxidation Furnace
(Open access)
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
84 4 target E-beam evaporator
(Open access)
Minita Surwade
Apurba LahaMicro1 LabPartially Working
85 Dielectric - sputter System
(Open access)
Minita Surwade
Ashwin TulapurkarMicro1 LabPartially Working
86 Gold Electroplating System
(Open access)
Bhanu B Upadhyay
Micro1 LabWorking
87 Thermal Evaporator - Al
(Open access)
Minita Surwade
Anil KottantharayilMicro1 LabWorking
88 Thermal Evaporator-Cr/Au
(Open access)
Anjum Ahmed
Minita Surwade
Saurabh LodhaMicro1 LabWorking
89 HRXRD
(Controlled access)
Anjum Ahmed
Swagata Bhunia
Apurba LahaMicro1 LabWorking
90 SEM EVO 18
(Open access)
Suddhasatta MahapatraMicro1 LabNot Working
91 Tube Washer
(Open access)
Minita Surwade
Anil KottantharayilMicro1 LabWorking

Micro1 Yellow Room
LIC : Akshata Bhosle, Deepti Rukade, Mayur Pawar
System NameSystem OwnerFaculty in-chargeLocationStatus
92 Multi-pocket Electron-beam Evaporator (4 target - GaN)
(Controlled access)
Dipankar SahaMicro1 Yellow RoomWorking
93 STSRIE
(Open access)
Mayur Pawar
Suddhasatta MahapatraMicro1 Yellow RoomWorking
94 Karl Suss MJB4 Mask Aligner
(Open access)
Hemant Kshirsagar
Akshata Bhosle
Apurba LahaMicro1 Yellow RoomWorking
95 Laser Writer
(Open access)
Pankaj Upadhyay
Akshata Bhosle
Kasturi SahaMicro1 Yellow RoomPartially Working
96 Spinner 2 inch (General Purpose)
(Open access)
Hemant Kshirsagar
Akshata Bhosle
Saurabh LodhaMicro1 Yellow RoomWorking
97 Spinner 2 inch (SU8, PPR)
(Open access)
Hemant Kshirsagar
Akshata Bhosle
Saurabh LodhaMicro1 Yellow RoomWorking
98 Barn-stead Lab-line Oven
(Open access)
Mayur Pawar
V Ramgopal RaoMicro1 Yellow RoomWorking
99 Probe Sonicator
(Open access)
Mayur Pawar
Saurabh LodhaMicro1 Yellow RoomWorking

Micro2 Lab
LIC : Anjum Ahmed, Deepti Rukade, Poonam Katkar
System NameSystem OwnerFaculty in-chargeLocationStatus
100 Hot wire CVD(HWCVD)
(Open access)
Anjum Ahmed
Anil KottantharayilMicro2 LabWorking
101 Organic Evaporation System
(Open access)
Anjum Ahmed
Dinesh KabraMicro2 LabWorking
102 4 probe Measurement (Automatic)
(Open access)
Ambika Shanker Shukla
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking
103 4 Probe Measurement (Manual)
(Open access)
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking
104 DektakXT Profilometer
(Controlled access)
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking
105 Filmetrics Reflectometer
(Open access)
Anjum Ahmed
Udayan GangulyMicro2 LabWorking
106 Photoluminescence Measurement set up (PL Set up)
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiMicro2 LabPartially Working
107 X-ray Photoelectron Spectroscopy
(Open access)
Anjum Ahmed
Jayeeta Biswas (Sen)
Saurabh LodhaMicro2 LabNot Working
108 Plasma Immersion Ion Implantation (PIII)
(Open access)
Jayeeta Biswas (Sen)
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking

Nano Lab
LIC : Deepti Rukade, Hemant Kshirsagar, Pijush Chakraborty
System NameSystem OwnerFaculty in-chargeLocationStatus
109 ALD
(Open access)
Jayeeta Biswas (Sen)
Saurabh LodhaNano LabWorking
110 ALD LL
(Controlled access)
Jayeeta Biswas (Sen)
Saurabh LodhaNano LabWorking
111 Inductively coupled plasma CVD (ICPCVD)
(Open access)
Pradeep Nyaupane
Hemant Kshirsagar
Dipankar SahaNano LabNot Working
112 Rapid Thermal Processing(RTP)
(Open access)
Pankaj Upadhyay
Pijush Chakraborty
Dipankar SahaNano LabWorking
113 Sputter (ATC 2200)
(Controlled access)
Pijush Chakraborty
Paritosh Meihar
Udayan GangulyNano LabPartially Working
114 Sputter (Orion)
(Controlled access)
Ambika Shanker Shukla
Pijush Chakraborty
Ashwin TulapurkarNano LabWorking
115 Ultech Furnace Anneal
(Open access)
Anil KottantharayilNano LabNot Working
116 Olympus Microscope_1
(Open access)
Dipankar SahaNano LabWorking
117 Sentech Ellipsometer
(Open access)
Pijush Chakraborty
Anil KottantharayilNano LabWorking
118 Nano Wet Bench
(Open access)
Pijush Chakraborty
Saurabh LodhaNano LabWorking

Nano Litho Lab
LIC : Akshata Bhosle, Deepti Rukade, Hemant Kshirsagar
System NameSystem OwnerFaculty in-chargeLocationStatus
119 Double Sided Aligner (DSA)
(Open access)
Akshata Bhosle
Dipankar SahaNano Litho LabNot Working
120 RaithEBL_Long
(Open access)
Navneet Bhardwaj
Suddhasatta MahapatraNano Litho LabWorking
121 RaithEBL_Short
(Open access)
Kartikey Thakar
Suddhasatta MahapatraNano Litho LabNot Working
122 Spinner 4 inch (PMMA)
(Open access)
Akshata Bhosle
Hemant Kshirsagar
Dipankar SahaNano Litho LabPartially Working
123 Spinner 8 inch (General Purpose)
(Open access)
Hemant Kshirsagar
Akshata Bhosle
Dipankar SahaNano Litho LabWorking
124 Spinner 8 inch (PPR)
(Open access)
Hemant Kshirsagar
Akshata Bhosle
Dipankar SahaNano Litho LabWorking
125 Torrey Pines Scientific Hi-temp Hotplate
(Open access)
Akshata Bhosle
Nano Litho LabWorking
126 Torrey Pines Scientific Low-temp Hotplate
(Open access)
Akshata Bhosle
Nano Litho LabWorking

Nanoelectronics Processing Lab (NanoE bldg, 1st floor)
LIC : Deepti Rukade, Mayur Pawar, Pijush Chakraborty
System NameSystem OwnerFaculty in-chargeLocationStatus
127 AJA 6 Target E beam Evaporator
(Controlled access)
Pijush Chakraborty
Apurba LahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
128 Graphene specific Argon annealing system
(Controlled access)
Anil KottantharayilNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
129 Plasma Doping System
(Open access)
Udayan GangulyNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
130 PLD I
(Controlled access)
Santosh Kumar Yadav
Pijush Chakraborty
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
131 PLD II
(Open access)
Pijush Chakraborty
Ambika Shanker Shukla
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
132 PLD III
(Controlled access)
Pijush Chakraborty
Apurba LahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
133 PLD IV
(Open access)
Pijush Chakraborty
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
134 Ambios XP-2 Profilometer
(Open access)
Anjum Ahmed
Pijush Chakraborty
Suddhasatta MahapatraNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
135 Ar-ion Milling
(Open access)
Ambika Shanker Shukla
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
136 ICPRIE (New)
(Controlled access)
Bhanu B Upadhyay
Yogendra Yadav
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Partially Working
137 ICPRIE (old)
(Open access)
Bhanu B Upadhyay
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
138 Plasma asher
(Open access)
Anuj Kumar Singh
Minita Surwade
Suddhasatta MahapatraNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
139 1.2 Lab wet bench
(Open access)
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working

NMPF Lab
LIC : Deepti Rukade, Hemant Kshirsagar
System NameSystem OwnerFaculty in-chargeLocationStatus
140 LPCVD Furnace_PolySi, Doped PolySi
(Open access)
Anjum Ahmed
Hemant Kshirsagar
Anil KottantharayilNMPF LabNot Working
141 LPCVD Furnace_SixNy
(Open access)
Anjum Ahmed
Hemant Kshirsagar
Anil KottantharayilNMPF LabNot Working
142 LPCVD Furnace_Thermal oxidation
(Controlled access)
Anjum Ahmed
Hemant Kshirsagar
Anil KottantharayilNMPF LabNot Working
143 Multi target sputter – AJA International
(Controlled access)
Hemant Kshirsagar
Anjum Ahmed
Ashwin TulapurkarNMPF LabWorking
144 Parylene CVD – SCS
(Open access)
Anjum Ahmed
Hemant Kshirsagar
Saurabh LodhaNMPF LabNot Working
145 Rapid Thermal Annealing – Annealsys
(Open access)
Hemant Kshirsagar
Anjum Ahmed
Saurabh LodhaNMPF LabWorking
146 Deep Reactive Ion Etching – Samco
(Controlled access)
Hemant Kshirsagar
Anjum Ahmed
Saurabh LodhaNMPF LabNot Working
147 RIE-1C Plasma Etcher– Samco
(Open access)
Hemant Kshirsagar
Anjum Ahmed
Suddhasatta MahapatraNMPF LabWorking
148 Double Side Mask Aligner – Suss Microtech
(Controlled access)
Anjum Ahmed
Hemant Kshirsagar
Dipankar SahaNMPF LabWorking
149 Spin Coater – Laurell
(Open access)
Hemant Kshirsagar
Akshata Bhosle
Dipankar SahaNMPF LabWorking
150 Wet bench_2” RCA , Piranha
(Open access)
Hemant Kshirsagar
Anjum Ahmed
Saurabh LodhaNMPF LabWorking
151 Wet bench_Metal etching
(Open access)
Anjum Ahmed
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking
152 Wet bench_Solvents
(Open access)
Anjum Ahmed
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking
153 Wafer Dicer – ADT
(Controlled access)
Hemant Kshirsagar
Anjum Ahmed
Ashwin TulapurkarNMPF LabNot Working
154 Wire Bonder (TPT HB16)_Aluminium
(Open access)
Anjum Ahmed
Pankajkumar Gound
Saurabh LodhaNMPF LabWorking

Spintronics Lab
LIC : Ambika Shanker Shukla, Deepti Rukade
System NameSystem OwnerFaculty in-chargeLocationStatus
155 Magneto Optic Kerr Effect (MOKE)
(Controlled access)
Rachit Pandey
Akanksha Chouhan
Ashwin TulapurkarSpintronics LabWorking
156 Magnetoresistance Setup with Vector Network Anlyser (VNA) and Rotating stage
(Controlled access)
Ambika Shanker Shukla
Ashwin TulapurkarSpintronics LabWorking

Wet Chemistry lab
LIC : Deepti Rukade, Minita Surwade, Shilpa Kharat
System NameSystem OwnerFaculty in-chargeLocationStatus
157 Olympus Microscope_2
(Open access)
Pankajkumar Gound
Saurabh LodhaWet Chemistry labWorking
158 2 inch RCA Clean Station
(Open access)
Minita Surwade
Pankajkumar Gound
Anil KottantharayilWet Chemistry labWorking
159 4 inch RCA Clean Station
(Open access)
Minita Surwade
Pankajkumar Gound
Saurabh LodhaWet Chemistry labWorking
160 General Purpose Wet Bench (Wet Chemistry Lab)
(Open access)
Minita Surwade
Saurabh LodhaWet Chemistry labWorking
161 TMAH wet etch station
(Open access)
Minita Surwade
Saurabh LodhaWet Chemistry labWorking
162 Scientific India Microscope
(Open access)
Anjum Ahmed
Wet Chemistry labNot Working



MarkerMeaning of marker
Not WorkingEquipment may not be used
Partially Working -- Equipment fully working but process not optimized
-- Some parts of equipment not working. Eg. Heater in Metal sputter not working
-- Not all processes that are possible in the tool are working
-- Equipment working in manual mode temporarily. Eg. RAITH sample loading is manual sometimes
Fully WorkingFully operational
Critical ToolCritical tools are widely used and their upkeep is of utmost priority. FICs should take the lead for driving the issues to make the tools UP on a high priority basis taking help from all teams (purchase, EMT, facility, process).


Definition of 'Controlled access' for Equipment in labs at IITBNF:


'Controlled access' is marked for certain tools to ensure that equipment is used on a priority basis for processing jobs which are part of Project deliverables and only after that they are made available for other users.

  • not open for training.
  • will be available for usage only through operators.
  • will be available for a fixed time period in a week as per the decision taken by the Faculty in charge of the tool.