Equipment Status

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7.1 Lab
LIC : Pankajkumar Gound, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
1 2 inch general purpose annealing furnace_Fume hood 3
(Open access)
Pankajkumar Gound
Anil Kottantharayil7.1 LabWorking
2 Atmospheric Furnace_AMAT CLEAN Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
3 Dip Coater
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
4 Drying Oven_AMAT CLEAN Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
5 Fume Hood 4
(Open access)
Pankajkumar Gound
7.1 LabWorking
6 Hot plate with stirrer (1)_Fume Hood 1
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
7 Hot plate with stirrer (2)_Fume Hood 1
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
8 Hot plate with stirrer (3)_2 arm glove box
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
9 Hot plate with stirrer (4)_4-arm glove box
(Open access)
Pankajkumar Gound
7.1 LabWorking
10 Hydrothermal Reactor_Fume Hood 2
(Controlled access)
7.1 LabWorking
11 pH Meter
(Open access)
Pankajkumar Gound
7.1 LabWorking
12 Schlenk Line (2)_Fume Hood 3
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
13 SILAR controller
(Open access)
Pankajkumar Gound
7.1 LabWorking
14 Spin Coater_4 arm glove box
(Open access)
Pankajkumar Gound
7.1 LabWorking
15 Thermogravimetric Analyzer
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
16 Tube Furnace_Fume hood 5
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
17 Contact Angle System (Data Physics)
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
18 FTIR Spectrometer (Spectrum 65)
(Open access)
Pankajkumar Gound
Anil Kottantharayil7.1 LabNot Working
19 Olympus Microscope_AMAT CLEAN Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
20 UV-Vis-Spectrometer - Lambda 25 (CLEAN Lab)
(Open access)
Pankajkumar Gound
Anil Kottantharayil7.1 LabWorking
21 2-arm glove box_AMAT CLEAN Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
22 4-arm glove box_AMAT CLEAN Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
23 Chemical Mechanical Planarisation
(Controlled access)
Udayan Ganguly7.1 LabWorking
24 Schlenk Line (1)_Fume Hood 1
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
25 Owlstone Vapour Generator (OVG-4)
(Open access)
Saurabh Lodha7.1 LabWorking
26 Ultrasonicator_Fume Hood 1
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
27 UV-Ozone Cleaner_AMAT CLEAN Lab
(Open access)
Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
28 Wafer bonder
(Open access)
Dipankar Saha7.1 LabPartially Working
29 Wire Bonder
(Open access)
Kulasekaran Muniappan
Suddhasatta Mahapatra7.1 LabWorking

Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)
LIC : Pankaj Upadhyay, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
30 Temperature Dependent Spectral Response Measurement system - PL set up
(Controlled access)
Pankaj Upadhyay
Vikas Pendem
Dipankar SahaApplied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)Working
31 Transient Absorption Pump Probe Spectrometer
(Controlled access)
Vikas Pendem
Dipankar SahaApplied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)Working

Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)
LIC : Jaya Jha, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
32 RF Cryogenic Device Characterization system
(Controlled access)
Dipankar SahaApplied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)Working

Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)
LIC : Kulasekaran Muniappan, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
33 FPA (Focal Plane Array) Characterization set up
(Open access)
Kulasekaran Muniappan
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working
34 Hall Measurement System
(Open access)
Debi Prasad Panda
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Not Working
35 Spectral Response-single pixel characterisation
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working

Bio Sensors Lab (NanoE bldg, 7th floor)
LIC : Madhuri Vinchurkar, Pradnya Chabbi, Rajul Patkar
System NameSystem OwnerFaculty in-chargeLocationStatus
36 Eppendorf FemtoJet 4x Microinjector
(Open access)
Pankajkumar Gound
Soumyo MukherjiBio Sensors Lab (NanoE bldg, 7th floor)Working
37 Potentiostat
(Open access)
Saurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Working
38 Contact Angle Instrument (GBX)
(Open access)
Pankajkumar Gound
Saurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Not Working
39 Fluorescence Microscope (Z1)
(Controlled access)
Kasturi SahaBio Sensors Lab (NanoE bldg, 7th floor)Working
40 FTIR
(Open access)
Pankajkumar Gound
Anil KottantharayilBio Sensors Lab (NanoE bldg, 7th floor)Not Working
41 UV-Vis-NIR Spectrometer - Lambda 750
(Controlled access)
Pankajkumar Gound
Anil KottantharayilBio Sensors Lab (NanoE bldg, 7th floor)Working
42 Laser Engraving System (LES)
(Open access)
Pankajkumar Gound
Soumyo MukherjiBio Sensors Lab (NanoE bldg, 7th floor)Working

Char Lab-2
LIC : Nitin Patil, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
43 microPL
(Controlled access)
Sayantan Ghosh
Kartikey Thakar
Saurabh LodhaChar Lab-2Partially Working
44 PPMS - Integrated cryogen-free system
(Controlled access)
Ambika Shanker Shukla
Ashwin TulapurkarChar Lab-2Working

Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)
LIC : Charu Saini, Pradnya Chabbi, Yaswanth Chebrolu
System NameSystem OwnerFaculty in-chargeLocationStatus
45 Aries(Temperature Dependent IV/CV)
(Open access)
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
46 Cryogenic probe station
(Controlled access)
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
47 Cygnus(Organic Device Characterization)
(Open access)
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
48 Phoenix (Temperature Dependent IV/CV)
(Open access)
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
49 Polaris (Stress/Long Time Measurements)
(Open access)
Sandip Lashkare
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
50 Proxima (Fast IV Measurement/ B1500)
(Open access)
Anil KottantharayilDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
51 RIGEL (Keysight B1500)
(Open access)
Sandip Lashkare
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
52 Sirius (NBTI Setup)
(Open access)
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
53 Vega (Room Temperature IV/ CV)
(Open access)
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working

EC Lab
LIC : Minita Surwade, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
54 Electroplating system - Au/Ni/Cu
(Open access)
Minita Surwade
Dipankar SahaEC LabWorking
55 PLD target making furnace
(Open access)
Subhananda ChakrabartiEC LabWorking
56 General Purpose Wet Bench (EC Lab)
(Open access)
Minita Surwade
Anil KottantharayilEC LabWorking
57 Cross section TEM sample preparation unit - Dimpler
(Controlled access)
Minita Surwade
Anil KottantharayilEC LabWorking
58 Cross section TEM sample preparation unit - Disc Cutter
(Controlled access)
Minita Surwade
Anil KottantharayilEC LabWorking
59 Cross section TEM sample preparation unit - PIPS
(Controlled access)
Minita Surwade
Anil KottantharayilEC LabWorking
60 Cross section TEM sample preparation unit - Ultrasonic Cutter
(Controlled access)
Minita Surwade
Anil KottantharayilEC LabWorking
61 EC Lab Hot air Oven
(Open access)
Pradnya Chabbi
Minita Surwade
Ashwin TulapurkarEC LabWorking
62 Logitech PM5 Precision Lapping and Polishing Machine
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiEC LabWorking
63 Logitech WSB2 Wafer Substrate Bonding Unit
(Open access)
Kulasekaran Muniappan
Subhananda ChakrabartiEC LabWorking
64 Spinner 2 Inch (PDMS)
(Open access)
Minita Surwade
Dipankar SahaEC LabWorking
65 Vapor generator for explosive detection
(Open access)
V Ramgopal RaoEC LabWorking

MBE Clean Room 1 (NanoE bldg, Gr floor)
LIC : Jay Agawane, Pradnya Chabbi, RITAM SARKAR
System NameSystem OwnerFaculty in-chargeLocationStatus
66 Molecular Beam Epitaxy III Nitrides
(Controlled access)
Apurba LahaMBE Clean Room 1 (NanoE bldg, Gr floor)Working
67 Molecular Beam Epitaxy III-V
(Controlled access)
Debi Prasad Panda
Subhananda ChakrabartiMBE Clean Room 1 (NanoE bldg, Gr floor)Working
68 Molecular Beam Epitaxy Si, Ge, Sn
(Controlled access)
Suddhasatta MahapatraMBE Clean Room 1 (NanoE bldg, Gr floor)Working

MBE Clean Room 2 (NanoE bldg, Gr floor)
LIC : Jay Agawane, Pradnya Chabbi, RITAM SARKAR
System NameSystem OwnerFaculty in-chargeLocationStatus
69 6 Target E Beam Evaporator
(Controlled access)
Goma Kumari KC
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
70 In Thermal Evaporator
(Controlled access)
Goma Kumari KC
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
71 Dicer
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
72 Flip Chip Bonder
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working

MCL Lab
LIC : Aniruddha Khade
System NameSystem OwnerFaculty in-chargeLocationStatus
73 MFP-3D-AFM
(Open access)
Navneet Bhardwaj
Dipankar SahaMCL LabWorking

Micro1 Lab
LIC : Hemlata Tiwari, Minita Surwade, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
74 2 inch Annealing Furnace (Gen purpose Forming gas/ Ar annealing furnace)
(Open access)
Pankajkumar Gound
Amita Rawat
Anil KottantharayilMicro1 LabWorking
75 2 inch Boron_Solid source Diffusion Furnace
(Open access)
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
76 2 inch CMOS specific FGA furnace
(Open access)
Anil KottantharayilMicro1 LabWorking
77 2 inch Dry oxidation Furnace
(Open access)
Amita Rawat
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
78 2 inch N2 Annealing Furnace
(Open access)
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
79 2 inch Phosphorous_Solid source Diffusion Furnace
(Open access)
Anil KottantharayilMicro1 LabPartially Working
80 2 inch Wet oxidation Furnace
(Open access)
Amita Rawat
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
81 4 target E-beam evaporator
(Open access)
Minita Surwade
Apurba LahaMicro1 LabPartially Working
82 Dielectric - sputter System
(Open access)
Ashwin TulapurkarMicro1 LabPartially Working
83 Gold Electroplating System
(Open access)
Bhanu B Upadhyay
Micro1 LabWorking
84 Thermal Evaporator - Al
(Open access)
Minita Surwade
Anil KottantharayilMicro1 LabWorking
85 Thermal Evaporator-Cr/Au
(Open access)
Anjum Ahmed
Minita Surwade
Saurabh LodhaMicro1 LabWorking
86 HRXRD
(Controlled access)
Apurba LahaMicro1 LabWorking
87 SEM EVO 18
(Open access)
Suddhasatta MahapatraMicro1 LabNot Working
88 Tube Washer
(Open access)
Minita Surwade
Anil KottantharayilMicro1 LabWorking

Micro1 Yellow Room
LIC : Akshata Bhosle, Mayur Pawar, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
89 Multi-pocket Electron-beam Evaporator (4 target - GaN)
(Controlled access)
Yogendra Yadav
Dipankar SahaMicro1 Yellow RoomNot Working
90 STSRIE
(Open access)
Mayur Pawar
Suddhasatta MahapatraMicro1 Yellow RoomWorking
91 Karl Suss MJB4 Mask Aligner
(Open access)
Hemant Kshirsagar
Akshata Bhosle
Apurba LahaMicro1 Yellow RoomWorking
92 Laser Writer
(Open access)
Pankaj Upadhyay
Akshata Bhosle
Kasturi SahaMicro1 Yellow RoomNot Working
93 Spinner 2 inch (General Purpose)
(Open access)
Hemant Kshirsagar
Saurabh LodhaMicro1 Yellow RoomWorking
94 Spinner 2 inch (SU8, PPR)
(Open access)
Hemant Kshirsagar
Saurabh LodhaMicro1 Yellow RoomWorking
95 Barn-stead Lab-line Oven
(Open access)
Mayur Pawar
V Ramgopal RaoMicro1 Yellow RoomWorking
96 Probe Sonicator
(Open access)
Mayur Pawar
Saurabh LodhaMicro1 Yellow RoomWorking

Micro2 Lab
LIC : Anjum Ahmed, Poonam Katkar, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
97 Hot wire CVD(HWCVD)
(Open access)
Anjum Ahmed
Anil KottantharayilMicro2 LabNot Working
98 Organic Evaporation System
(Open access)
Anjum Ahmed
Dinesh KabraMicro2 LabWorking
99 4 probe Measurement (Automatic)
(Open access)
Ambika Shanker Shukla
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking
100 4 Probe Measurement (Manual)
(Open access)
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking
101 DektakXT Profilometer
(Controlled access)
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking
102 Filmetrics Reflectometer
(Open access)
Anjum Ahmed
Udayan GangulyMicro2 LabWorking
103 Leica Microscope
(Open access)
Anjum Ahmed
Micro2 LabWorking
104 Photoluminescence Measurement set up (PL Set up)
(Controlled access)
Kulasekaran Muniappan
Subhananda ChakrabartiMicro2 LabPartially Working
105 X-ray Photoelectron Spectroscopy
(Open access)
Anjum Ahmed
Jayeeta Biswas (Sen)
Saurabh LodhaMicro2 LabNot Working
106 Plasma Immersion Ion Implantation (PIII)
(Open access)
Jayeeta Biswas (Sen)
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking

Nano Lab
LIC : Hemant Kshirsagar, Pijush Chakraborty, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
107 ALD
(Open access)
Jayeeta Biswas (Sen)
Saurabh LodhaNano LabWorking
108 ALD LL
(Controlled access)
Jayeeta Biswas (Sen)
Saurabh LodhaNano LabWorking
109 Inductively coupled plasma CVD (ICPCVD)
(Open access)
Hemant Kshirsagar
Dipankar SahaNano LabNot Working
110 Rapid Thermal Processing(RTP)
(Open access)
Pankaj Upadhyay
Pijush Chakraborty
Dipankar SahaNano LabWorking
111 Sputter (ATC 2200)
(Controlled access)
Pijush Chakraborty
Paritosh Meihar
Udayan GangulyNano LabPartially Working
112 Sputter (Orion)
(Controlled access)
Ambika Shanker Shukla
Pijush Chakraborty
Ashwin TulapurkarNano LabWorking
113 Ultech Furnace Anneal
(Open access)
Anil KottantharayilNano LabWorking
114 Olympus Microscope
(Open access)
Dipankar SahaNano LabNot Working
115 Sentech Ellipsometer
(Open access)
Anil KottantharayilNano LabWorking
116 Nano Wet Bench
(Open access)
Pijush Chakraborty
Saurabh LodhaNano LabWorking

Nano Litho Lab
LIC : Hemant Kshirsagar, Hitesh Kamble, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
117 Double Sided Aligner (DSA)
(Open access)
Yogendra Yadav
Akshata Bhosle
Dipankar SahaNano Litho LabWorking
118 RaithEBL_Long
(Open access)
Shalini Shrivastava
Kartikey Thakar
Suddhasatta MahapatraNano Litho LabWorking
119 RaithEBL_Short
(Open access)
Kartikey Thakar
Shalini Shrivastava
Suddhasatta MahapatraNano Litho LabWorking
120 Spinner 4 inch (PMMA)
(Open access)
Dipankar SahaNano Litho LabWorking
121 Spinner 8 inch (General Purpose)
(Open access)
Akshata Bhosle
Dipankar SahaNano Litho LabWorking
122 Spinner 8 inch (PPR)
(Open access)
Akshata Bhosle
Dipankar SahaNano Litho LabWorking
123 Torrey Pines Scientific Hi-temp Hotplate
(Open access)
Akshata Bhosle
Nano Litho LabNot Working
124 Torrey Pines Scientific Low-temp Hotplate
(Open access)
Akshata Bhosle
Nano Litho LabNot Working

Nanoelectronics Processing Lab (NanoE bldg, 1st floor)
LIC : Mayur Pawar, Pijush Chakraborty, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
125 AJA 6 Target E beam Evaporator
(Controlled access)
Pijush Chakraborty
Apurba LahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
126 Graphene specific Argon annealing system
(Controlled access)
Anil KottantharayilNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
127 Plasma Doping System
(Open access)
Udayan GangulyNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
128 PLD I
(Controlled access)
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
129 PLD II
(Open access)
Ambika Shanker Shukla
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
130 PLD III
(Controlled access)
Apurba LahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
131 PLD IV
(Open access)
Pijush Chakraborty
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
132 Ambios XP-2 Profilometer
(Open access)
Anjum Ahmed
Pijush Chakraborty
Suddhasatta MahapatraNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
133 Ar-ion Milling
(Open access)
Ambika Shanker Shukla
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
134 ICPRIE (New)
(Controlled access)
Bhanu B Upadhyay
Yogendra Yadav
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
135 ICPRIE (old)
(Open access)
Bhanu B Upadhyay
Yogendra Yadav
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
136 Plasma asher
(Open access)
Minita Surwade
Suddhasatta MahapatraNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
137 1.2 Lab wet bench
(Open access)
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working

NMPF Lab
LIC : Hemant Kshirsagar, Pradnya Chabbi
System NameSystem OwnerFaculty in-chargeLocationStatus
138 LPCVD Furnace_PolySi, Doped PolySi
(Open access)
Pradnya Chabbi
Hemant Kshirsagar
Anil KottantharayilNMPF LabNot Working
139 LPCVD Furnace_SixNy
(Open access)
Pradnya Chabbi
Hemant Kshirsagar
Anil KottantharayilNMPF LabNot Working
140 LPCVD Furnace_Thermal oxidation
(Controlled access)
Pradnya Chabbi
Hemant Kshirsagar
Anil KottantharayilNMPF LabNot Working
141 Multi target sputter – AJA International
(Controlled access)
Hemant Kshirsagar
Pradnya Chabbi
Ashwin TulapurkarNMPF LabWorking
142 Parylene CVD – SCS
(Open access)
Pradnya Chabbi
Hemant Kshirsagar
Saurabh LodhaNMPF LabNot Working
143 Rapid Thermal Annealing – Annealsys
(Open access)
Hemant Kshirsagar
Pradnya Chabbi
Saurabh LodhaNMPF LabWorking
144 Deep Reactive Ion Etching – Samco
(Controlled access)
Hemant Kshirsagar
Pradnya Chabbi
Saurabh LodhaNMPF LabWorking
145 RIE-1C Plasma Asher – Samco
(Open access)
Hemant Kshirsagar
Pradnya Chabbi
Suddhasatta MahapatraNMPF LabWorking
146 Double Side Mask Aligner – Suss Microtech
(Controlled access)
Pradnya Chabbi
Hemant Kshirsagar
Dipankar SahaNMPF LabNot Working
147 Spin Coater – Laurell
(Open access)
Hemant Kshirsagar
Pradnya Chabbi
Dipankar SahaNMPF LabWorking
148 Wet bench_2” RCA , Piranha
(Open access)
Hemant Kshirsagar
Pradnya Chabbi
Saurabh LodhaNMPF LabWorking
149 Wet bench_Metal etching
(Open access)
Pradnya Chabbi
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking
150 Wet bench_Solvents
(Open access)
Pradnya Chabbi
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking
151 Wafer Dicer – ADT
(Open access)
Hemant Kshirsagar
Pradnya Chabbi
Ashwin TulapurkarNMPF LabNot Working
152 Wire Bonder – TPT
(Open access)
Pradnya Chabbi
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking

Wet Chemistry lab
LIC : Minita Surwade, Pradnya Chabbi, Shilpa Kharat
System NameSystem OwnerFaculty in-chargeLocationStatus
153 2 inch RCA Clean Station
(Open access)
Minita Surwade
Pankajkumar Gound
Anil KottantharayilWet Chemistry labNot Working
154 4 inch RCA Clean Station
(Open access)
Minita Surwade
Pankajkumar Gound
Saurabh LodhaWet Chemistry labNot Working
155 General Purpose Wet Bench (Wet Chemistry Lab)
(Open access)
Minita Surwade
Saurabh LodhaWet Chemistry labWorking
156 TMAH wet etch station
(Open access)
Minita Surwade
Saurabh LodhaWet Chemistry labWorking
157 Scientific India Microscope
(Open access)
Anjum Ahmed
Wet Chemistry labNot Working



MarkerMeaning of marker
Not WorkingEquipment may not be used
Partially Working -- Equipment fully working but process not optimized
-- Some parts of equipment not working. Eg. Heater in Metal sputter not working
-- Not all processes that are possible in the tool are working
-- Equipment working in manual mode temporarily. Eg. RAITH sample loading is manual sometimes
Fully WorkingFully operational
Critical ToolCritical tools are widely used and their upkeep is of utmost priority. FICs should take the lead for driving the issues to make the tools UP on a high priority basis taking help from all teams (purchase, EMT, facility, process).


Definition of 'Controlled access' for Equipment in labs at IITBNF:


'Controlled access' is marked for certain tools to ensure that equipment is used on a priority basis for processing jobs which are part of Project deliverables and only after that they are made available for other users.

  • not open for training.
  • will be available for usage only through operators.
  • will be available for a fixed time period in a week as per the decision taken by the Faculty in charge of the tool.