Equipment Details



Name of the Equipment6 Target E Beam Evaporator
Categorygold contaminated
OperatorJay Agawane
System OwnerGoma Kumari KC
gomakc@iitb.ac.in

Short Name6T ebeam evaporator
Make/ ModelSemicore/ NA
Critical ToolNo
Serial NumberNA
FootPrint2 x3 m
InstallationDate2013
Equipment TypeDeposition, Growth and Annealing systems
LocationMBE Clean Room 2 (NanoE bldg, Gr floor)
AMC Required
Local DealerOM Scientific

OM Scientific
Actual DealerOM Scientific

OM Scientific
SOP SOP/99_SOP.pdf
Training & other policy documentsPOLICY/99_POLICY.pdf
Recipies
Glimpse GLIMPSE/99_GLIMPSE.pdf
Tool Facilities RequirementsN2, Chilled water
AccessControlled
Lab Phone No4488 Ext Flash 109
Substrate allowedSi, Ge, GaAs GaN, Glass, Quartz
Substrate DimensionPieces to 4 inch wafer
Chemical allowedNA, Gold, Germanium, Nick el, Gold-Germanium alloy, Titanium
Precursors/ Targets allowed
*Based on stock availability
Au, Ni, Ti, Ge and Au-Ge alloy
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNitrogen
Contamination remarksAl coated, HfO2, Carbon, copper etc samples are not allowed