Equipment Details



Name of the EquipmentICPRIE (New)
Categoryclean
OperatorSandeep S
System OwnerBhanu B Upadhyay
bhanu.upadhyay@iitb.ac.in

Yogendra Yadav
yogendra.yadav@iitb.ac.in

Short NameICPRIE
Make/ ModelSentech/ SI 500
Critical ToolNo
Serial Number
FootPrint( Length 1.70 mtr, Breadth 1.75 mtr, Height1.67mt
InstallationDate11/01/2011
Equipment TypeDry Etch tools
LocationNanoelectronics Processing Lab (NanoE bldg, 1st floor)
AMC Required
Local DealerOm Scientific Pvt, Pune

Om Scientific, A-2, Runwal Paradise, Bhusari Colony KOTHRUD, PUNE, MAHARASTRA INDIaN Ph: +919175631100 email: shaileshlatey@gmail.com Contact Person: Shailesh Latey Sr. Technical support Engineer Omscientific pvt LTD
Actual DealerSentech, Germany

Roland K�gel, Schwarzschildstra�e 2 12489 Berlin, Germany
SOP SOP/98_SOP.pdf
Training & other policy documents
Recipies
Glimpse
Tool Facilities RequirementsBCl3, Cl2, PN2, SF6, O2 , Ar and water supply
AccessControlled
Lab Phone No4488 Ext Flash 107 OR 111
Substrate allowedGaAs/ GaN
Substrate DimensionPieces to 4 inch wafer
Chemical allowedNA, GaAs/ GaN
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedBCl3, Cl2, Ar, O2, SF6
Contamination remarksNo metal allowed