Equipment Details



Name of the EquipmentThermal Evaporator-Cr/Au
Categorygold contaminated
OperatorShilpa Kharat
Minita Surwade
Hemlata Tiwari
System OwnerAnjum Ahmed
anjum04@iitb.ac.in

Minita Surwade
minita@iitb.ac.in

Short Name
Make/ ModelHindHiVac/ 12A40
Critical ToolNo
Serial Number1911
FootPrint200 x 140 x 203 cm
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationMicro1 Lab
AMC Required
Local DealerMr Shailesh

Ph: Branch Office: Mumbai Head Office: Bangalore
Actual DealerHind HiVac

CORPORATE OFFICE, HEAD OFFICE & FACTORY: HINDHIVAC PVT. LTD. SITE NO. 17, PHASE-1, PEENYA INDUSTRIAL AREA, BANGALORE - 560 058. PHONE : 91-80-2839 4615, 17 FAX : 91-80-2839 4874. E-mail : info@hindhivac.com http://www.indiabuildinginfo.com/virtual-icore/hindhivaccontact.htm
SOP SOP/89_SOP.pdf
Training & other policy documentsPOLICY/89_Policy.pdf
Recipies RECEPIES/89_RECEPIES.pdf
Glimpse GLIMPSE/89_Glimpse.pdf
Tool Facilities Requirements1. Chiller & water supply 2. Liquid Nitrogen
AccessOpen
Lab Phone No4405
Substrate allowedFTO Glass,Quartz , Silicon, Polymer, GaAs,
Substrate DimensionApprox 4 inch or lesser size
Chemical allowed, Polymer, Any material that can withstand 100degC,Glass substrate is not allowed
Precursors/ Targets allowed
*Based on stock availability
Any metal other than Cr & Au, taking Chromium (Melting Point :977degC @ 10E-6 mbar) as baseline, follow the link : http://projects.olin.ed u/thinfilms
Precursor/ Target loaded inside tool
Target dimensionAny metal other than Cr & Au, taking Chromium (Melting Point :977degC @ 10E-6 mbar) as baseline, fol
Gases allowed
Contamination remarks