Equipment Details



Name of the EquipmentDielectric - sputter System
Categorygold contaminated
OperatorMinita Surwade
System OwnerMadhuri Mishra
madhuri016@ee.iitb.ac.in

Short NameNA
Make/ ModelAdvanced Process Techonology/
Critical ToolNo
Serial Number
FootPrint120
InstallationDate08/04/2005
Equipment TypeDeposition, Growth and Annealing systems
LocationMicro1 Lab
AMC Available
Local DealerNA

NA
Actual DealerNA

NA
SOP SOP/84_SOP.pdf
Training & other policy documents
Recipies RECEPIES/84_RECEPIES.pdf
Glimpse GLIMPSE/84_Glimpse.pdf
Tool Facilities RequirementsChiller
AccessOpen
Lab Phone No4405
Substrate allowedGlass, Si, Ge, Sapphire, Quartz, GaN
Substrate Dimensionmaximun size 2 inch
Chemical allowedNA, ppr, su8, PMMA, gold, Cu & other metals
Precursors/ Targets allowed
*Based on stock availability
SiO2, HfO2, ZnO, ZnMgO
Precursor/ Target loaded inside tool
Target dimensionSiO2, HfO2, ZnO, ZnMgO
Gases allowedoxygen & Argon And Nitrogen
Contamination remarksMg exception