Equipment Details



Name of the Equipment4 target E-beam evaporator
Categorygold contaminated
OperatorBhimraj Sable
System OwnerNama Premsai
premsainama@ee.iitb.ac.in

Short Name4 TEBE
Make/ ModelHind Hi Vacuum Systems/ HHV 15K
Critical ToolNo
Serial NumberHHV 15K
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationMicro1 Lab
AMC Required
Local DealerShailesh Jhanwar & Sunil Chingle

Shailesh Jhanwar: sajawharkar@gmail.com 09224571350
Actual DealerHind Hi Vacuum Systems

Hind High Vacuum Company Private Limited Site No. 17, Phase 1, Peenya Industrial Area Bangalore- 560 058 India. Tel: 91 80 41931000 Fax: 91 80 2839 4874. E-mail: info@hhv.in
SOP SOP/82_SOP.pdf
Training & other policy documents
Recipies
Glimpse GLIMPSE/82_Glimpse.pdf
Tool Facilities RequirementsPN2, Chiller
AccessOpen
Lab Phone No4405
Substrate allowedQuartz, Silicon, Polymer, GaN
Substrate DimensionApprox 4 inch or lesser size
Chemical allowedFor cleaning of the system Methanol is used., Zn slug, Cr slug, Ag slug, Ta slug, Fe slug, Au slug, Pt slug(not working), AuGe slug, Co slug, Cu slug, Ti slug, Al slug, Mg slug, Pd slug, Ge slug, Gd slug, Mo slug, Mn slug, Mgo slug, W slug(not working), Tb slug, Yb slug, Ni slug, NiFe slug,si,a-si
Precursors/ Targets allowed
*Based on stock availability
Palladium Slug, Gold Germanium slug, Manganese, Titanium Slug, Gd Slug, Terbium pieces, Gold, Zinc Slug , Germanium
Precursor/ Target loaded inside tool
Target dimensionslugs of size 1.125
Gases allowedPN2
Contamination remarksGold Contaminated