Equipment Details



Name of the Equipment2 inch N2 Annealing Furnace
Categoryclean
OperatorPradnya Chabbi
System OwnerPankajkumar Gound
p15129@iitb.ac.in

Short NameNA
Make/ ModelInhouse/ NA
Critical ToolNo
Serial NumberNA
FootPrint3.75 ft * 13ft
InstallationDate05/11/2005
Equipment TypeDeposition, Growth and Annealing systems
LocationMicro1 Lab
AMC Required
Local DealerNA

Inhouse
Actual DealerNA

NA
SOP SOP/80_SOP.pdf
Training & other policy documents
Recipies
Glimpse GLIMPSE/80_Glimpse.pdf
Tool Facilities RequirementsN2 gas, Chiller, Exhaust
AccessOpen
Lab Phone No4405
Substrate allowedSilicon/ Glass
Substrate DimensionQuarter of 2inch, 2inch
Chemical allowedNA, Si/ SiO2/ Si3N4
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedN2
Contamination remarks