Equipment Details



Name of the Equipment2 inch Annealing Furnace (Gen purpose Forming gas/ Ar annealing furnace)
Categorygold contaminated
Operator
System OwnerPankajkumar Gound
p15129@iitb.ac.in

Amita Rawat
154076020@iitb.ac.in

Short Name2 inch furnace
Make/ ModelAssembled/ NA
Critical ToolNo
Serial NumberNA
FootPrint3.75ft x 13 ft
InstallationDate11/17/2004
Equipment TypeDeposition, Growth and Annealing systems
LocationMicro1 Lab
AMC Required
Local DealerNA

Maintenance in house
Actual DealerNA

NA
SOP SOP/75_SOP.pdf
Training & other policy documentsPOLICY/75_POLICY.rar
Recipies
Glimpse GLIMPSE/75_Glimpse.pdf
Tool Facilities RequirementsN2, O2, FGA, Ar
AccessOpen
Lab Phone No4405
Substrate allowedSilicon/ Glass
Substrate DimensionQuarter of 2inch, 2inch
Chemical allowedNA, all inorganic
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedAr/ N2/ O2/ forming gas
Contamination remarksPhoto resist samples not allowed