Equipment Details



Name of the EquipmentRIE-1C Plasma Asher – Samco
Categorygold contaminated
OperatorHemant Kshirsagar
Poonam Katkar
System OwnerHemant Kshirsagar
hemant@ee.iitb.ac.in

Pradnya Chabbi
pradnya@ee.iitb.ac.in

Short Name
Make/ ModelSAMCO - RIE - 1C
Critical ToolNo
Serial Number
FootPrint
InstallationDate
Equipment TypeDry Etch tools
LocationNMPF Lab
AMC Required
Local DealerSIMCO

SIMCO
Actual DealerSAMCO

Mr. Amamori, SAMCO
SOP SOP/337_SOP.pdf
Training & other policy documents
Recipies RECEPIES/337_RECEPIES.pdf
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No6252
Substrate allowed
Substrate Dimension
Chemical allowedIPA for cleaning,
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside toolNA
Target dimensionNA
Gases allowedCF4, O2, PN2
Contamination remarksNa, K not allowed