Equipment Details



Name of the EquipmentParylene CVD – SCS
Categorygold contaminated
OperatorHemant Kshirsagar
System OwnerPradnya Chabbi
pradnya@ee.iitb.ac.in

Hemant Kshirsagar
hemant@ee.iitb.ac.in

Short Name
Make/ ModelSVCS - Labcoter 2 (PDS2010)
Critical ToolNo
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNMPF Lab
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No6252
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks