Equipment Details



Name of the EquipmentSpin Coater – Laurell
Categorylitho/analytical
OperatorHemant Kshirsagar
System OwnerHemant Kshirsagar
hemant@ee.iitb.ac.in

Pradnya Chabbi
pradnya@ee.iitb.ac.in

Short Name
Make/ Model
Critical Tool
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
LocationNMPF Lab
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No6302
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks