Equipment Details



Name of the EquipmentDouble Side Mask Aligner – Suss Microtech
Categorylitho/analytical
OperatorHemant Kshirsagar
System OwnerPradnya Chabbi
pradnya@ee.iitb.ac.in

Hemant Kshirsagar
hemant@ee.iitb.ac.in

Short Name
Make/ ModelSUSS
Critical Tool
Serial NumberMA6
FootPrint
InstallationDate
Equipment TypeLithography tools
LocationNMPF Lab
AMC Required
Local DealerChintan Patel

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessControlled
Lab Phone No6302
Substrate allowed
Substrate DimensionMaximum 4 inch wafer
Chemical allowed,
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks