Equipment Details



Name of the EquipmentSILAR controller
Categoryclean
OperatorGeetika Bajaj
System OwnerPankajkumar Gound
p15129@iitb.ac.in

Short Name
Make/ Model/ HO-TH-03
Critical ToolNo
Serial Number
FootPrint
InstallationDate
Equipment TypeDeposition, Growth and Annealing systems
Location7.1 Lab
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone No4438
Substrate allowed
Substrate Dimension
Chemical allowedNA,
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside toolNA
Target dimensionNA
Gases allowedNA
Contamination remarks