Equipment Details



Name of the EquipmentGraphene specific Argon annealing system
Categorygold contaminated
Operator
System OwnerRobin Singla
robin@ee.iitb.ac.in

Short NameGraphene annealing s
Make/ ModelIn house built/
Critical ToolNo
Serial Number
FootPrint56 CM X 92 CM X 120 CM
InstallationDate04/28/2015
Equipment TypeDeposition, Growth and Annealing systems
LocationNanoelectronics Processing Lab (NanoE bldg, 1st floor)
AMC Not Required
Local DealerExcel instruments

Excel instruments
Actual DealerExcel instruments

Ph:+91-22-6500 8911 Fax : +91-22-4005 2963
SOP SOP/259_SOP.pdf
Training & other policy documentsPOLICY/259_POLICY.pdf
Recipies
Glimpse
Tool Facilities RequirementsArgon, Nitrogen, Methane, FGA, chiller
AccessControlled
Lab Phone No4488 Ext Flash 107 OR 111
Substrate allowedSi/ SiO2
Substrate DimensionSmall pieces to 4 inch
Chemical allowedNo chemical allowed, Si/ SiO2, Graphene
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedArgon, Nitrogen, Methane, FGA
Contamination remarksGold contaminated