Equipment Details



Name of the EquipmentMolecular Beam Epitaxy III Nitrides
Categorysemi clean a
OperatorRITAM SARKAR
Swagata Bhunia
System OwnerRITAM SARKAR
144076001@iitb.ac.in

Short Name
Make/ Model/
Critical ToolNo
Serial Number
FootPrint
InstallationDate06/21/2013
Equipment TypeDeposition, Growth and Annealing systems
LocationMBE Clean Room 1 (NanoE bldg, Gr floor)
AMC Required
Local Dealer

Actual Dealer

SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessControlled
Lab Phone No4488 Ext Flash 105
Substrate allowed
Substrate Dimension
Chemical allowed,
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks