Equipment Details



Name of the EquipmentSentech Ellipsometer
Categoryin line ac
OperatorPijush Chakraborty
Hitesh Kamble
System OwnerNama Premsai
premsainama@ee.iitb.ac.in

Short NameEllipso
Make/ ModelSENTECH Instruments/ SE 800
Critical ToolNo
Serial Number11/046
FootPrintLength 1.39 mtr, Breadth 1.44 mtr, Height 1.52
InstallationDate2005
Equipment TypeMaterial and structural characterization tools
LocationNano Lab
AMC Available
Local DealerNitesh Karande

NBP Division Labindia Instrument Pvt. Ltd. 201, Nand Chambers, Near Vandana Cinema, LBS Marg, Thane- 400 602 Mob: 09769940005 Tel: +91-22-2598 6071 Fax: +91-22-2539 8634 http://www.labindia.com/browse-by/Nanobioprocess.php
Actual Dealer

Sentech
SOP SOP/25_SOP.pdf
Training & other policy documentsPOLICY/25_POLICY.pdf
Recipies RECEPIES/25_RECEPIES.pdf
Glimpse GLIMPSE/25_Glimpse.pdf
Tool Facilities RequirementsNA
AccessOpen
Lab Phone No4411
Substrate allowedSi
Substrate Dimensionmin- 1cm , max- 6 inch
Chemical allowedNA, Dielectrics and Polymers
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarksIPA should not be used for cleaning of wafer holder