Equipment Details



Name of the EquipmentAr-ion Milling
Categorygold contaminated
Operator
System OwnerAmbika Shanker Shukla
ambikashukla@iitb.ac.in

Short NameAr-ion Milling
Make/ ModelExcel Instruments+ Kaufman & Robinson, Inc./
Critical ToolNo
Serial Number
FootPrintLength 2 mtr, Breadth 1 mtr, Height1.6
InstallationDate02/14/2014
Equipment TypeDry Etch tools
LocationNanoelectronics Processing Lab (NanoE bldg, 1st floor)
AMC Required
Local Dealer

Unit Number 29, Sarvodaya Industrial Estate, Mahakali Caves Road, Andheri (E), Andheri East, Mumbai, Maharashtra 400093
Actual DealerExcel Instruments+ Kaufman & Robinson, Inc.

Unit Number 29, Sarvodaya Industrial Estate, Mahakali Caves Road, Andheri (E), Andheri East, Mumbai, Maharashtra 400093 For KRI-SOURCE: Kaufman & Robinson, Inc. 1330 Blue Spruce Drive Fort Collins, CO 80524 Phone: (970) 495-0185
SOP SOP/209_SOP.pdf
Training & other policy documentsPOLICY/209_POLICY.pdf
Recipies
Glimpse GLIMPSE/209_GLIMPSE.pdf
Tool Facilities RequirementsAr gas, Chiller
AccessOpen
Lab Phone No4488 Ext Flash 107 OR 111
Substrate allowedAny substrate
Substrate DimensionMin - 5mm x 5mm, Min - 25mm x 25mm
Chemical allowedAcetone/ IPA/ Methonal, All
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedAr
Contamination remarksNA