Equipment Details



Name of the EquipmentHRXRD
Categoryin line ac
OperatorMadhuri Mishra
Hemlata Tiwari
System OwnerSwagata Bhunia
154120016@iitb.ac.in

Short Name
Make/ ModelRigaku/ Smartlab 3KW
Critical ToolNo
Serial NumberID3822N
FootPrintWidth =~1200 mm Depth =~900 mm Height =~1820
InstallationDate10/08/2013
Equipment TypeMaterial and structural characterization tools
LocationMicro1 Lab
AMC Required
Local DealerI R Technology Services Pvt Ltd

M/s. I.R. Technology Services Pvt. Ltd. EL-91, TTC Industrial Area, MIDC, Mahape, Navi Mumbai - 400 710 Tel: 022-6789 6600/18/06 Fax:022-2768 1253 Email: sales_newbom@irtech.in
Actual DealerRigaku

M/s. Rigaku Corporation, International Marketing Division, 3-9-12 Matsubara-Cho, Akishima-Shi, Tokyo - 196-8666 Japan
SOP SOP/198_SOP.pdf
Training & other policy documentsPOLICY/198_POLICY.pdf
Recipies
Glimpse GLIMPSE/198_GLIMPSE.pdf
Tool Facilities RequirementsChiller
AccessControlled
Lab Phone No4405
Substrate allowedSi, Ge, Glass, Sapphire, GaAs, GaN, STO
Substrate DimensionMin - 1cmx1cm, Max- 4 inch wafer
Chemical allowedIPA To clean chuck, Only thin films
Precursors/ Targets allowed
*Based on stock availability
N.A
Precursor/ Target loaded inside tool
Target dimensionN.A
Gases allowedN.A
Contamination remarksSUBSTRATE SHOULD NOT BE REACTING WITH AL CHUCK