Equipment Details



Name of the EquipmentX-ray Photoelectron Spectroscopy
Categorylitho/analytical
OperatorAnjum Ahmed
Hemlata Tiwari
System OwnerAnjum Ahmed
anjum04@iitb.ac.in

Jayeeta Biswas (Sen)
p13046@iitb.ac.in

Short NameXPS
Make/ ModelULVAC-PHI/ PHI5000VersaProbeII
Critical ToolNo
Serial NumberNA
FootPrint
InstallationDate12/02/2013
Equipment TypeMaterial and structural characterization tools
LocationMicro2 Lab
AMC Required
Local DealerIcon Analytical

Icon Analytical Mr. Ratul Paul Mobile: 07439066477 E-Mail: ratul@iconanalytical.com
Actual DealerUlvac-PHI

Physical Electronics Mr.Shankar Raman Email: SRaman@phi.com
SOP SOP/192_SOP.pdf
Training & other policy documentsPOLICY/192_POLICY.pdf
Recipies
Glimpse GLIMPSE/192_GLIMPSE.pdf
Tool Facilities RequirementsCDA, He, N2, Ar
AccessOpen
Lab Phone No4464
Substrate allowedThin film and powdered samples
Substrate Dimension0.5cm x 0.5cm to 2 inch
Chemical allowedNA,
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarksSample cannot go back to other critical process equipments other than Off-line A equipments