Equipment Details



Name of the EquipmentDektakXT Profilometer
Categorylitho/analytical
OperatorPoonam Katkar
Hemlata Tiwari
System OwnerAnjum Ahmed
anjum04@iitb.ac.in

Short NameProfilo
Make/ ModelBruker/ Dektak XT
Critical ToolNo
Serial Number
FootPrint455 mm W x 550 mm D x 370 mm H (17.9 inch W x 22.6
InstallationDate08/12/2013
Equipment TypeMaterial and structural characterization tools
LocationMicro2 Lab
AMC Required
Local DealerIcon Analytical Equipment Pvt. Ltd

Tushar Ph No.9320329883
Actual Dealer

Bruker
SOP SOP/188_SOP.pdf
Training & other policy documentsPOLICY/188_POLICY.pdf
Recipies
Glimpse GLIMPSE/188_GLIMPSE.pdf
Tool Facilities RequirementsVacuum pump, clean air
AccessControlled
Lab Phone No4464
Substrate allowedSi, Ge, Glass, Sapphire
Substrate DimensionMin - 1cmx1cm, Max- 8 inch wafer
Chemical allowedNA, No sticky and soft sample allowed. Density should be greater than 1.001g/cm3
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarksLitho/ Analytical