Equipment Details



Name of the EquipmentSpinner 2 inch (General Purpose)
Categorylitho/analytical
OperatorHemant Kshirsagar
System OwnerHitesh Kamble
hit.kamble@ee.iitb.ac.in

Short Name
Make/ ModelNA/ WS-4008-6NPP/ LIT
Critical ToolNo
Serial Number07104
FootPrint11
InstallationDate
Equipment TypeLithography tools
LocationMicro1 Yellow Room
AMC Not Required
Local DealerM/s Simco Global Technology & Systems Ltd

M/s Simco Global Technology & Systems Ltd. 304, Thacker Tower, Sector-17, Vashi, Nawi Mumbai � 400 705
Actual DealerM/s Laurell Techonologies Corporation, 441, Indust

sales@laurel.com
SOP SOP/138_SOP.pdf
Training & other policy documents
Recipies
Glimpse
Tool Facilities RequirementsN2 gas
AccessOpen
Lab Phone No4493
Substrate allowedGlass, Si, Quartz, GaN, G aAs
Substrate Dimensionminimum quarter of a 2 inch wafer; maximum a 2 inch wafer
Chemical allowedAcetone for cleaning, PPR, SU8, CBlack, SO D(B and P), HMDS, P3HT, PVD F, PDMS
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarksclean wafers