Equipment Details



Name of the EquipmentTMAH wet etch station
Categorygold contaminated
OperatorMinita Surwade
Minita Surwade
System OwnerJawaid Alam
jawaid@ee.iitb.ac.in

Minita Surwade
minita@iitb.ac.in

Short Name
Make/ Model/
Critical ToolNo
Serial Number
FootPrint
InstallationDate
Equipment TypeWet chemistry tools
LocationWet Chemistry lab
AMC Required
Local Dealer

Actual Dealer

SOP SOP/136_SOP.pdf
Training & other policy documentsPOLICY/136_POLICY.pdf
Recipies
Glimpse GLIMPSE/136_GLIMPSE.pdf
Tool Facilities Requirements
AccessOpen
Lab Phone No4464
Substrate allowedAll
Substrate Dimension
Chemical allowed, All materials, gold lift off
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks