Equipment Details



Name of the EquipmentIn Thermal Evaporator
Categorygold contaminated
OperatorGoma Kumari KC
System OwnerGoma Kumari KC
gomakc@iitb.ac.in

Short NameIn evaporator
Make/ ModelHHV/ 15F6T
Critical ToolNo
Serial NumberNA
FootPrint2x3 m
InstallationDate06/01/2011
Equipment TypeDeposition, Growth and Annealing systems
LocationMBE Clean Room 2 (NanoE bldg, Gr floor)
AMC Not Required
Local DealerHHV

Sunil Chingle -
Actual DealerHHV

Sunil Chingle -
SOP SOP/135_SOP.pdf
Training & other policy documentsPOLICY/135_POLICY.pdf
Recipies
Glimpse GLIMPSE/135_Glimpse.pdf
Tool Facilities RequirementsN2, Chilled water
AccessControlled
Lab Phone No4488 Ext Flash 109
Substrate allowedSi, Ge, GaAs GaN, Glass, Quartz
Substrate DimensionPieces to 2 inch wafer
Chemical allowedNA, Indium only
Precursors/ Targets allowed
*Based on stock availability
Indium slugs
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNitrogen
Contamination remarksGold contaminated