Equipment Details



Name of the Equipment2 inch RCA Clean Station
Categoryclean (for si)
OperatorMinita Surwade
Pankajkumar Gound
Shilpa Kharat
System OwnerMinita Surwade
minita@iitb.ac.in

Pankajkumar Gound
p15129@iitb.ac.in

Short NameRCA
Make/ ModelM/S Laxmi Instruments/ NA
Critical ToolNo
Serial Number200801132 (P O numbe
FootPrint465cm X 287cm
InstallationDate03/25/2009
Equipment TypeWet chemistry tools
LocationWet Chemistry lab
AMC Not Required
Local DealerRupesh Khule

07208246450(for DI water system)
Actual DealerNil

Nil
SOP SOP/132_SOP.pdf
Training & other policy documentsPOLICY/132_Policy.pdf
Recipies RECEPIES/132_RECEPIES.pdf
Glimpse GLIMPSE/132_Glimpse.pdf
Tool Facilities RequirementsDI Water, Chemicals, Heater
AccessOpen
Lab Phone No4464
Substrate allowed2
Substrate Dimension1/4 of 2
Chemical allowedAmmonium Hydroxide, H2O2, HCl, HF, Only Si wafers, and Quartz glass
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarks