Equipment Details



Name of the EquipmentProxima (Fast IV Measurement/ B1500)
Categoryin line act
OperatorCharu Saini
Nishant Saurabh
Yaswanth Chebrolu
System OwnerYaswanth Chebrolu
183079020@iitb.ac.in

Charu Saini
173079013@iitb.ac.in

Short NamePROXIMA
Make/ ModelGermany/ PM8
Critical ToolNo
Serial Number40498
FootPrint2.5m x 0.5m
InstallationDate2009
Equipment TypeElectrical characterization tools
LocationDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)
AMC Required
Local DealerCascade Microtech

Suss Microtec (Probe station): harkesh@iheindia.com Agilent B1500A: ashutosh_dwivedi@keysight.com
Actual DealerSuss Microtec

info@suss.com
SOP SOP/124_SOP.pdf
Training & other policy documentsPOLICY/124_POLICY.pdf
Recipies
Glimpse GLIMPSE/124_GLIMPSE.pdf
Tool Facilities Requirements
AccessOpen
Lab Phone No4488 Ext Flash 114
Substrate allowedSi/ Ge/ Metal and Materials that don't vaporize at Room Temp.
Substrate DimensionWafer : 1cm x 1cm - 5cm x 5cm & Pad-Size: Min- 50 micron x 50 micron
Chemical allowedNA, Si/ Ge/ Metal and Materials that don't vaporize at Room Temp.
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedNA
Contamination remarksMaterials that don't vaporize at Room Temp.