Equipment Details



Name of the EquipmentPhoenix (Temperature Dependent IV/CV)
Categorylitho/analytical
OperatorYaswanth Chebrolu
System OwnerYaswanth Chebrolu
183079020@iitb.ac.in

Charu Saini
173079013@iitb.ac.in

Short NamePheonix
Make/ ModelKarl Suss/ PM8
Critical ToolNo
Serial Number40180
FootPrint12ft x 3ft
InstallationDate11/11/2013
Equipment TypeElectrical characterization tools
LocationDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)
AMC Required
Local DealerN.A

N.A.
Actual DealerSuss Microtec

info@suss.com
SOP SOP/123_SOP.pdf
Training & other policy documentsPOLICY/123_POLICY.pdf
Recipies
Glimpse GLIMPSE/123_GLIMPSE.pdf
Tool Facilities RequirementsVacuum pump, Temperature Controller
AccessOpen
Lab Phone No4488 Ext Flash 114
Substrate allowedSi/ Ge/ Metal and Materials that don't vaporize at Room Temp.
Substrate DimensionWafer : 1cm x 1cm - 5cm x 5cm & Pad-Size: Min- 50 micron x 50 micron
Chemical allowedN.A., Si/ Ge/ Metal and Materials that don't vaporize at Room Temp.
Precursors/ Targets allowed
*Based on stock availability
N.A.
Precursor/ Target loaded inside tool
Target dimensionN.A.
Gases allowedN.A.
Contamination remarksN.A.