Equipment Details



Name of the EquipmentPolaris (Stress/Long Time Measurements)
Categorylitho/analytical
Operator
System OwnerSandip Lashkare
154076031@iitb.ac.in

Yaswanth Chebrolu
183079020@iitb.ac.in

Short NamePOLARIS
Make/ ModelKarl Suss/ PM8
Critical ToolNo
Serial Number40500
FootPrintNA
InstallationDate2009
Equipment TypeElectrical characterization tools
LocationDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)
AMC Required
Local DealerNA

NA
Actual DealerSuss Microtec

info@suss.com
SOP SOP/122_SOP.pdf
Training & other policy documentsPOLICY/122_POLICY.pdf
Recipies
Glimpse
Tool Facilities RequirementsNA
AccessOpen
Lab Phone No4488 Ext Flash 114
Substrate allowedSi/ Ge/ Metal and Materials that don't vaporize at Room Temp.
Substrate DimensionWafer : 1cm x 1cm - 5cm x 5cm & Pad-Size: Min- 50 micron x 50 micron
Chemical allowedN.A., Si/ Ge/ Metal and Materials that don't vaporize at Room Temp.
Precursors/ Targets allowed
*Based on stock availability
N.A.
Precursor/ Target loaded inside tool
Target dimensionN.A.
Gases allowedN.A.
Contamination remarksMaterials that don't vaporize at Room Temp.