Equipment Details



Name of the EquipmentVapor generator for explosive detection
Categorygold contaminated
Operator
System Owner
Short NameVapour Generator
Make/ Model/
Critical ToolNo
Serial Number
FootPrint
InstallationDate
Equipment TypeMiscellaneous
LocationEC Lab
AMC Required
Local DealerNA

NA
Actual DealerNA

NA
SOP
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessOpen
Lab Phone NoNo Number
Substrate allowedSi, SU-8 cantilevers, SiO2 cantilevers
Substrate Dimensioncantilever die
Chemical allowedNA, All material
Precursors/ Targets allowed
*Based on stock availability
NA
Precursor/ Target loaded inside tool
Target dimensionNA
Gases allowedN2
Contamination remarksNA