Equipment Details



Name of the EquipmentDicer
Categorygold contaminated
OperatorKulasekaran Muniappan
System OwnerKulasekaran Muniappan
kulasekaran.m@iitb.ac.in

Short Name
Make/ Model/
Critical ToolNo
Serial Number
FootPrint
InstallationDate
Equipment TypeMiscellaneous
LocationMBE Clean Room 2 (NanoE bldg, Gr floor)
AMC Required
Local Dealer

Actual Dealer

SOP SOP/114_SOP.pdf
Training & other policy documents
Recipies
Glimpse
Tool Facilities Requirements
AccessControlled
Lab Phone No4488 Ext Flash 109
Substrate allowedGaAs, Si.
Substrate Dimension1cm to 8 inch
Chemical allowed,
Precursors/ Targets allowed
*Based on stock availability
Precursor/ Target loaded inside tool
Target dimension
Gases allowed
Contamination remarks