Equipment Status

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10
LIC :
System NameSystem OwnerFaculty in-chargeLocationStatus
1 Electroplating system - Au/Ni/CuMinita Surwade
Harindra Kannojia
Dipankar Saha10Working
2 PLD target making furnaceSubhananda Chakrabarti10Working
3 General Purpose Wet Bench (EC Lab)Minita Surwade
Anil Kottantharayil10Working
4 Cross section TEM sample preparation unit - DimplerMinita Surwade
Anil Kottantharayil10Working
5 Cross section TEM sample preparation unit - Disc CutterMinita Surwade
Anil Kottantharayil10Working
6 Cross section TEM sample preparation unit - PIPSMinita Surwade
Anil Kottantharayil10Working
7 Cross section TEM sample preparation unit - Ultrasonic CutterMinita Surwade
Anil Kottantharayil10Working
8 EC Lab Hot air OvenMinita Surwade
Ashwin Tulapurkar10Working
9 Logitech PM5 Precision Lapping and Polishing MachineKulasekaran Muniappan
Subhananda Chakrabarti10Working
10 Logitech WSB2 Wafer Substrate Bonding UnitKulasekaran Muniappan
Subhananda Chakrabarti10Working
11 Spinner 2 Inch (PDMS)Minita Surwade
Dipankar Saha10Working
12 Vapor generator for explosive detectionV Ramgopal Rao10Working



15
LIC :
System NameSystem OwnerFaculty in-chargeLocationStatus
20 MFP-3D-AFMNavneet Bhardwaj
Dipankar Saha15Working

16
LIC :
System NameSystem OwnerFaculty in-chargeLocationStatus
21 2 inch Annealing Furnace (Gen purpose Forming gas/ Ar annealing furnace) Pankajkumar Gound
Anil Kottantharayil16Working
22 2 inch Boron_Solid source Diffusion Furnace Pankajkumar Gound
Anil Kottantharayil16Working
23 2 inch CMOS specific FGA furnace Anil Kottantharayil16Working
24 2 inch Dry oxidation FurnacePankajkumar Gound
Anil Kottantharayil16Working
25 2 inch N2 Annealing Furnace Pankajkumar Gound
Anil Kottantharayil16Working
26 2 inch Phosphorous_Solid source Diffusion Furnace Anil Kottantharayil16Partially Working
27 2 inch Wet oxidation FurnacePankajkumar Gound
Anil Kottantharayil16Working
28 4 target E-beam evaporatorMinita Surwade
Apurba Laha16Partially Working
29 Dielectric - sputter SystemMinita Surwade
Ashwin Tulapurkar16Partially Working
30 Gold Electroplating SystemBhanu B Upadhyay
Dipankar Saha16Working
31 Thermal Evaporator - Al Minita Surwade
Anil Kottantharayil16Working
32 Thermal Evaporator-Cr/Au Anjum Ahmed
Minita Surwade
Saurabh Lodha16Working
33 HRXRDAnjum Ahmed
Swagata Bhunia
Apurba Laha16Working
34 SEM EVO 18Suddhasatta Mahapatra16Not Working
35 Tube WasherMinita Surwade
Anil Kottantharayil16Working






21
LIC :
System NameSystem OwnerFaculty in-chargeLocationStatus
73 AJA 6 Target E beam Evaporator Nama Premsai
Anjum Ahmed
Apurba Laha21Not Working
74 Graphene specific Argon annealing systemAnil Kottantharayil21Working
75 Plasma Doping System Rowtu Srinu
Udayan Ganguly21Working
76 PLD I Santosh Kumar Yadav
Ashwin Tulapurkar21Working
77 PLD II Ambika Shanker Shukla
Ashwin Tulapurkar21Working
78 PLD III Santosh Kumar Yadav
Apurba Laha21Working
79 PLD IV Santosh Kumar Yadav
Ashwin Tulapurkar21Working
80 Ambios XP-2 Profilometer Anjum Ahmed
Suddhasatta Mahapatra21Working
81 Ar-ion MillingAmbika Shanker Shukla
Ashwin Tulapurkar21Working
82 ICPRIE (New) Bhanu B Upadhyay
Yogendra Yadav
Dipankar Saha21Partially Working
83 ICPRIE (old) Bhanu B Upadhyay
Dipankar Saha21Working
84 Plasma asher Anuj Kumar Singh
Minita Surwade
Suddhasatta Mahapatra21Working
85 1.2 Lab wet benchDipankar Saha21Working

29
LIC :
System NameSystem OwnerFaculty in-chargeLocationStatus
86 LPCVD Furnace_PolySi, Doped PolySi Anjum Ahmed
Hemant Kshirsagar
Anil Kottantharayil29Working
87 LPCVD Furnace_SixNy Anjum Ahmed
Hemant Kshirsagar
Anil Kottantharayil29Working
88 LPCVD Furnace_Thermal oxidation Anjum Ahmed
Hemant Kshirsagar
Anil Kottantharayil29Working
89 Multi target sputter – AJA International Hemant Kshirsagar
Anjum Ahmed
Ashwin Tulapurkar29Working
90 Parylene CVD – SCS Anjum Ahmed
Hemant Kshirsagar
Saurabh Lodha29Working
91 Rapid Thermal Annealing – Annealsys Hemant Kshirsagar
Anjum Ahmed
Saurabh Lodha29Working
92 Deep Reactive Ion Etching – Samco Hemant Kshirsagar
Anjum Ahmed
Suddhasatta Mahapatra29Working
93 RIE-1C Plasma Etcher– Samco Hemant Kshirsagar
Anjum Ahmed
Suddhasatta Mahapatra29Working
94 Double Side Mask Aligner – Suss Microtech Anjum Ahmed
Hemant Kshirsagar
Dipankar Saha29Working
95 Spin Coater – Laurell Hemant Kshirsagar
Akshata Bhosle
Dipankar Saha29Working
96 Wet bench_2” RCA , Piranha Hemant Kshirsagar
Anjum Ahmed
Saurabh Lodha29Working
97 Wet bench_Metal etching Anjum Ahmed
Hemant Kshirsagar
Saurabh Lodha29Working
98 Wet bench_Solvents Anjum Ahmed
Hemant Kshirsagar
Saurabh Lodha29Working
99 Wafer Dicer – ADT Hemant Kshirsagar
Anjum Ahmed
Ashwin Tulapurkar29Working
100 Wire Bonder (TPT HB16)_Aluminium Anjum Ahmed
Pankajkumar Gound
Saurabh Lodha29Working

3
LIC :
System NameSystem OwnerFaculty in-chargeLocationStatus
101 Magnetoresistance SetupAmbika Shanker Shukla
Ashwin Tulapurkar3Working
102 RF Cryogenic Device Characterization systemJaya Jha
Dipankar Saha3Working






7
LIC :
System NameSystem OwnerFaculty in-chargeLocationStatus
126 PPMS - Integrated cryogen-free systemAmbika Shanker Shukla
Ashwin Tulapurkar7Working

8
LIC :
System NameSystem OwnerFaculty in-chargeLocationStatus
127 2 inch general purpose annealing furnace_Fume hood 3Pankajkumar Gound
Anil Kottantharayil8Working
128 Atmospheric Furnace_AMAT CLEAN LabPankajkumar Gound
Saurabh Lodha8Working
129 Dip CoaterPankajkumar Gound
Saurabh Lodha8Working
130 Drying Oven_AMAT CLEAN LabPankajkumar Gound
Saurabh Lodha8Working
131 Fume Hood 4Pankajkumar Gound
8Working
132 Hot plate with stirrer (1)_Fume Hood 1Pankajkumar Gound
Saurabh Lodha8Working
133 Hot plate with stirrer (2)_Fume Hood 1Pankajkumar Gound
Saurabh Lodha8Working
134 Hot plate with stirrer (3)_2 arm glove boxPankajkumar Gound
Saurabh Lodha8Working
135 Hot plate with stirrer (4)_4-arm glove boxPankajkumar Gound
8Working
136 Hydrothermal Reactor_Fume Hood 28Working
137 pH MeterPankajkumar Gound
8Working
138 Schlenk Line (2)_Fume Hood 3Pankajkumar Gound
Saurabh Lodha8Working
139 SILAR controllerPankajkumar Gound
8Working
140 Spin Coater_4 arm glove boxPankajkumar Gound
8Working
141 Thermogravimetric AnalyzerPankajkumar Gound
Saurabh Lodha8Working
142 Tube Furnace_Fume hood 5Pankajkumar Gound
Saurabh Lodha8Working
143 Contact Angle System (Data Physics)Pankajkumar Gound
Saurabh Lodha8Working
144 FTIR Spectrometer (Spectrum 65)Pankajkumar Gound
Anil Kottantharayil8Not Working
145 Leica MicroscopeAnjum Ahmed
8Working
146 UV-Vis-Spectrometer - Lambda 25 (CLEAN Lab)Pankajkumar Gound
Anil Kottantharayil8Working
147 4-arm glove box_AMAT CLEAN LabPankajkumar Gound
Saurabh Lodha8Working
148 Chemical Mechanical PlanarisationUdayan Ganguly8Working
149 Schlenk Line (1)_Fume Hood 1Pankajkumar Gound
Saurabh Lodha8Working
150 Ultrasonicator_Fume Hood 1Pankajkumar Gound
Saurabh Lodha8Working
151 UV-Ozone Cleaner_AMAT CLEAN LabPankajkumar Gound
Saurabh Lodha8Working
152 Wafer bonderDipankar Saha8Partially Working
153 Wire Bonder_HybondKulasekaran Muniappan
Suddhasatta Mahapatra8Working


FESEM Facility is now available for users. Click here for more details.

Status SymbolMeaning of Status Symbol
Not WorkingEquipment may not be used
Partially WorkingEquipment working with some minor problem****
Fully WorkingFully operational
Critical Tool


****
  • Equipment fully working but process not optimized
  • Some parts of equipment not working
          Ex:-Heater in Metal sputter not working
  • Some process working, other not
  • Equipment working in manual mode.
          Ex:-RAITH sample loading is manual sometimes

Definition of 'Controlled access' for Equipment in labs at IITBNF:
  • not open for training.
  • will be available for usage only through operators.
  • will be available for a fixed time period in a week as per the decision taken by the Faculty in charge of the tool.

This is to ensure that these critical equipment are used on a priority basis for processing jobs which are part of Project deliverables and then made available to other users.