Equipment Status

10
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
1	Electroplating system - Au/Ni/Cu	Minita Surwade Harindra Kannojia	Dipankar Saha	10	Working
2	PLD target making furnace		Subhananda Chakrabarti	10	Working
3	General Purpose Wet Bench (EC Lab)	Minita Surwade	Anil Kottantharayil	10	Working
4	Cross section TEM sample preparation unit - Dimpler	Minita Surwade	Anil Kottantharayil	10	Working
5	Cross section TEM sample preparation unit - Disc Cutter	Minita Surwade	Anil Kottantharayil	10	Working
6	Cross section TEM sample preparation unit - PIPS	Minita Surwade	Anil Kottantharayil	10	Working
7	Cross section TEM sample preparation unit - Ultrasonic Cutter	Minita Surwade	Anil Kottantharayil	10	Working
8	EC Lab Hot air Oven	Minita Surwade	Ashwin Tulapurkar	10	Working
9	Logitech PM5 Precision Lapping and Polishing Machine	Kulasekaran Muniappan	Subhananda Chakrabarti	10	Working
10	Logitech WSB2 Wafer Substrate Bonding Unit	Kulasekaran Muniappan	Subhananda Chakrabarti	10	Working
11	Spinner 2 Inch (PDMS)	Minita Surwade	Dipankar Saha	10	Working
12	Vapor generator for explosive detection		V Ramgopal Rao	10	Working

13
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
13	Molecular Beam Epitaxy III Nitrides		Apurba Laha	13	Working
14	Molecular Beam Epitaxy III-V	Debi Prasad Panda	Subhananda Chakrabarti	13	Working
15	Molecular Beam Epitaxy Si, Ge, Sn		Suddhasatta Mahapatra	13	Working

14
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
16	6 Target E Beam Evaporator	Goma Kumari KC	Subhananda Chakrabarti	14	Working
17	In Thermal Evaporator	Goma Kumari KC	Subhananda Chakrabarti	14	Working
18	Dicer	Kulasekaran Muniappan	Subhananda Chakrabarti	14	Working
19	Flip Chip Bonder	Kulasekaran Muniappan	Subhananda Chakrabarti	14	Working

15
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
20	MFP-3D-AFM	Navneet Bhardwaj	Dipankar Saha	15	Working

16
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
21	2 inch Annealing Furnace (Gen purpose Forming gas/ Ar annealing furnace)	Pankajkumar Gound	Anil Kottantharayil	16	Working
22	2 inch Boron_Solid source Diffusion Furnace	Pankajkumar Gound	Anil Kottantharayil	16	Working
23	2 inch CMOS specific FGA furnace		Anil Kottantharayil	16	Working
24	2 inch Dry oxidation Furnace	Pankajkumar Gound	Anil Kottantharayil	16	Working
25	2 inch N2 Annealing Furnace	Pankajkumar Gound	Anil Kottantharayil	16	Working
26	2 inch Phosphorous_Solid source Diffusion Furnace		Anil Kottantharayil	16	Partially Working
27	2 inch Wet oxidation Furnace	Pankajkumar Gound	Anil Kottantharayil	16	Working
28	4 target E-beam evaporator	Minita Surwade	Apurba Laha	16	Partially Working
29	Dielectric - sputter System	Minita Surwade	Ashwin Tulapurkar	16	Partially Working
30	Gold Electroplating System	Bhanu B Upadhyay	Dipankar Saha	16	Working
31	Thermal Evaporator - Al	Minita Surwade	Anil Kottantharayil	16	Working
32	Thermal Evaporator-Cr/Au	Anjum Ahmed Minita Surwade	Saurabh Lodha	16	Working
33	HRXRD	Anjum Ahmed Swagata Bhunia	Apurba Laha	16	Working
34	SEM EVO 18		Suddhasatta Mahapatra	16	Not Working
35	Tube Washer	Minita Surwade	Anil Kottantharayil	16	Working

17
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
36	Multi-pocket Electron-beam Evaporator (4 target - GaN)	Yogendra Yadav Sreenadh Surapaneni	Dipankar Saha	17	Working
37	STSRIE	Mayur Pawar	Suddhasatta Mahapatra	17	Working
38	Karl Suss MJB4 Mask Aligner	Hemant Kshirsagar Akshata Bhosle	Apurba Laha	17	Working
39	Laser Writer	Pankaj Upadhyay Akshata Bhosle	Kasturi Saha	17	Partially Working
40	Spinner 2 inch (General Purpose)	Hemant Kshirsagar Akshata Bhosle	Saurabh Lodha	17	Working
41	Spinner 2 inch (SU8, PPR)	Hemant Kshirsagar Akshata Bhosle	Saurabh Lodha	17	Working
42	Barn-stead Lab-line Oven	Mayur Pawar	V Ramgopal Rao	17	Working
43	Probe Sonicator	Mayur Pawar	Saurabh Lodha	17	Working

18
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
44	Hot wire CVD(HWCVD)	Anjum Ahmed	Anil Kottantharayil	18	Working
45	Organic Evaporation System	Anjum Ahmed	Dinesh Kabra	18	Working
46	4 probe Measurement (Automatic)	Ambika Shanker Shukla Anjum Ahmed	Saurabh Lodha	18	Working
47	4 Probe Measurement (Manual)	Anjum Ahmed	Saurabh Lodha	18	Working
48	DektakXT Profilometer	Anjum Ahmed	Saurabh Lodha	18	Working
49	Filmetrics Reflectometer	Anjum Ahmed	Udayan Ganguly	18	Working
50	Photoluminescence Measurement set up (PL Set up)	Kulasekaran Muniappan	Subhananda Chakrabarti	18	Partially Working
51	X-ray Photoelectron Spectroscopy	Anjum Ahmed Jayeeta Biswas (Sen)	Saurabh Lodha	18	Working
52	Plasma Immersion Ion Implantation (PIII)	Jayeeta Biswas (Sen) Anjum Ahmed	Saurabh Lodha	18	Working

19
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
53	ALD	Jayeeta Biswas (Sen)	Saurabh Lodha	19	Working
54	ALD LL	Jayeeta Biswas (Sen)	Saurabh Lodha	19	Working
55	Inductively coupled plasma CVD (ICPCVD)	Pradeep Nyaupane Hemant Kshirsagar	Dipankar Saha	19	Partially Working
56	Rapid Thermal Processing(RTP)	Pankaj Upadhyay Mayur Pawar	Dipankar Saha	19	Working
57	Sputter (ATC 2200)	Paritosh Meihar	Udayan Ganguly	19	Partially Working
58	Sputter (Orion)	Ambika Shanker Shukla	Ashwin Tulapurkar	19	Working
59	Ultech Furnace Anneal		Anil Kottantharayil	19	Not Working
60	Olympus Microscope_1		Dipankar Saha	19	Working
61	Sentech Ellipsometer	Mayur Pawar Deepti Rukade	Anil Kottantharayil	19	Working
62	Nano Wet Bench	Deepti Rukade	Saurabh Lodha	19	Working

2
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
63	Temperature Dependent Spectral Response Measurement system - PL set up	Pankaj Upadhyay Vikas Pendem	Dipankar Saha	2	Working
64	Transient Absorption Pump Probe Spectrometer	Vikas Pendem	Dipankar Saha	2	Working

20
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
65	Double Sided Aligner (DSA)	Akshata Bhosle	Dipankar Saha	20	Working
66	RaithEBL_Long	Kartikey Thakar Navneet Bhardwaj	Suddhasatta Mahapatra	20	Working
67	RaithEBL_Short	Kartikey Thakar Navneet Bhardwaj	Suddhasatta Mahapatra	20	Working
68	Spinner 4 inch (PMMA)	Akshata Bhosle Hemant Kshirsagar	Dipankar Saha	20	Partially Working
69	Spinner 8 inch (General Purpose)	Hemant Kshirsagar Akshata Bhosle	Dipankar Saha	20	Working
70	Spinner 8 inch (PPR)	Hemant Kshirsagar Akshata Bhosle	Dipankar Saha	20	Working
71	Torrey Pines Scientific Hi-temp Hotplate	Akshata Bhosle		20	Working
72	Torrey Pines Scientific Low-temp Hotplate	Akshata Bhosle		20	Working

21
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
73	AJA 6 Target E beam Evaporator	Nama Premsai Anjum Ahmed	Apurba Laha	21	Not Working
74	Graphene specific Argon annealing system		Anil Kottantharayil	21	Working
75	Plasma Doping System	Rowtu Srinu	Udayan Ganguly	21	Working
76	PLD I	Santosh Kumar Yadav	Ashwin Tulapurkar	21	Working
77	PLD II	Ambika Shanker Shukla	Ashwin Tulapurkar	21	Working
78	PLD III	Santosh Kumar Yadav	Apurba Laha	21	Working
79	PLD IV	Santosh Kumar Yadav	Ashwin Tulapurkar	21	Working
80	Ambios XP-2 Profilometer	Anjum Ahmed	Suddhasatta Mahapatra	21	Working
81	Ar-ion Milling	Ambika Shanker Shukla	Ashwin Tulapurkar	21	Working
82	ICPRIE (New)	Bhanu B Upadhyay Yogendra Yadav	Dipankar Saha	21	Partially Working
83	ICPRIE (old)	Bhanu B Upadhyay	Dipankar Saha	21	Working
84	Plasma asher	Anuj Kumar Singh Minita Surwade	Suddhasatta Mahapatra	21	Working
85	1.2 Lab wet bench		Dipankar Saha	21	Working

29
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
86	LPCVD Furnace_PolySi, Doped PolySi	Anjum Ahmed Hemant Kshirsagar	Anil Kottantharayil	29	Working
87	LPCVD Furnace_SixNy	Anjum Ahmed Hemant Kshirsagar	Anil Kottantharayil	29	Working
88	LPCVD Furnace_Thermal oxidation	Anjum Ahmed Hemant Kshirsagar	Anil Kottantharayil	29	Working
89	Multi target sputter – AJA International	Hemant Kshirsagar Anjum Ahmed	Ashwin Tulapurkar	29	Working
90	Parylene CVD – SCS	Anjum Ahmed Hemant Kshirsagar	Saurabh Lodha	29	Working
91	Rapid Thermal Annealing – Annealsys	Hemant Kshirsagar Anjum Ahmed	Saurabh Lodha	29	Working
92	Deep Reactive Ion Etching – Samco	Hemant Kshirsagar Anjum Ahmed	Suddhasatta Mahapatra	29	Working
93	RIE-1C Plasma Etcher– Samco	Hemant Kshirsagar Anjum Ahmed	Suddhasatta Mahapatra	29	Working
94	Double Side Mask Aligner – Suss Microtech	Anjum Ahmed Hemant Kshirsagar	Dipankar Saha	29	Working
95	Spin Coater – Laurell	Hemant Kshirsagar Akshata Bhosle	Dipankar Saha	29	Working
96	Wet bench_2” RCA , Piranha	Hemant Kshirsagar Anjum Ahmed	Saurabh Lodha	29	Working
97	Wet bench_Metal etching	Anjum Ahmed Hemant Kshirsagar	Saurabh Lodha	29	Working
98	Wet bench_Solvents	Anjum Ahmed Hemant Kshirsagar	Saurabh Lodha	29	Working
99	Wafer Dicer – ADT	Hemant Kshirsagar Anjum Ahmed	Ashwin Tulapurkar	29	Working
100	Wire Bonder (TPT HB16)_Aluminium	Anjum Ahmed Pankajkumar Gound	Saurabh Lodha	29	Working

3
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
101	Magnetoresistance Setup	Ambika Shanker Shukla	Ashwin Tulapurkar	3	Working
102	RF Cryogenic Device Characterization system	Jaya Jha	Dipankar Saha	3	Working

30
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
103	Magneto Optic Kerr Effect (MOKE)	Rachit Pandey Akanksha Chouhan	Ashwin Tulapurkar	30	Working
104	Magnetoresistance Setup with Vector Network Anlyser (VNA) and Rotating stage	Ambika Shanker Shukla	Ashwin Tulapurkar	30	Working

31
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
105	2D Materials CVD	Atirah Zahoor Himani Jawa	Saurabh Lodha	31	Working
106	Phoenix	Sayantan Ghosh Srilagna Sahoo	Saurabh Lodha	31	Working
107	micro PL	Sayantan Ghosh Kartikey Thakar	Saurabh Lodha	31	Partially Working
108	2-arm Glove Box	Pankajkumar Gound Himani Jawa	Saurabh Lodha	31	Working
109	Wire bonder (TPT HB05)_Gold	Himani Jawa Kartikey Thakar	Saurabh Lodha	31	Working

4
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
110	FPA (Focal Plane Array) Characterization set up	Kulasekaran Muniappan	Subhananda Chakrabarti	4	Working
111	Hall Measurement System		Subhananda Chakrabarti	4	Not Working
112	Spectral Response-single pixel characterisation	Kulasekaran Muniappan	Subhananda Chakrabarti	4	Working

5
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
113	Eppendorf FemtoJet 4x Microinjector	Pankajkumar Gound	Soumyo Mukherji	5	Working
114	Potentiostat		Saurabh Lodha	5	Working
115	Contact Angle Instrument (GBX)	Pankajkumar Gound	Saurabh Lodha	5	Not Working
116	Fluorescence Microscope (Z1)		Kasturi Saha	5	Working
117	FTIR	Pankajkumar Gound	Anil Kottantharayil	5	Working
118	UV-Vis-NIR Spectrometer - Lambda 750	Pankajkumar Gound	Anil Kottantharayil	5	Working
119	Laser Engraving System (LES)	Pankajkumar Gound	Soumyo Mukherji	5	Not Working

6
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
120	Olympus Microscope_2	Pankajkumar Gound	Saurabh Lodha	6	Working
121	2 inch RCA Clean Station	Minita Surwade Pankajkumar Gound	Anil Kottantharayil	6	Working
122	4 inch RCA Clean Station	Minita Surwade Pankajkumar Gound	Saurabh Lodha	6	Working
123	General Purpose Wet Bench (Wet Chemistry Lab)	Minita Surwade	Saurabh Lodha	6	Working
124	TMAH wet etch station	Minita Surwade	Saurabh Lodha	6	Working
125	Scientific India Microscope	Anjum Ahmed		6	Not Working

7
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
126	PPMS - Integrated cryogen-free system	Ambika Shanker Shukla	Ashwin Tulapurkar	7	Working

8
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
127	2 inch general purpose annealing furnace_Fume hood 3	Pankajkumar Gound	Anil Kottantharayil	8	Working
128	Atmospheric Furnace_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	8	Working
129	Dip Coater	Pankajkumar Gound	Saurabh Lodha	8	Working
130	Drying Oven_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	8	Working
131	Fume Hood 4	Pankajkumar Gound		8	Working
132	Hot plate with stirrer (1)_Fume Hood 1	Pankajkumar Gound	Saurabh Lodha	8	Working
133	Hot plate with stirrer (2)_Fume Hood 1	Pankajkumar Gound	Saurabh Lodha	8	Working
134	Hot plate with stirrer (3)_2 arm glove box	Pankajkumar Gound	Saurabh Lodha	8	Working
135	Hot plate with stirrer (4)_4-arm glove box	Pankajkumar Gound		8	Working
136	Hydrothermal Reactor_Fume Hood 2			8	Working
137	pH Meter	Pankajkumar Gound		8	Working
138	Schlenk Line (2)_Fume Hood 3	Pankajkumar Gound	Saurabh Lodha	8	Working
139	SILAR controller	Pankajkumar Gound		8	Working
140	Spin Coater_4 arm glove box	Pankajkumar Gound		8	Working
141	Thermogravimetric Analyzer	Pankajkumar Gound	Saurabh Lodha	8	Working
142	Tube Furnace_Fume hood 5	Pankajkumar Gound	Saurabh Lodha	8	Working
143	Contact Angle System (Data Physics)	Pankajkumar Gound	Saurabh Lodha	8	Working
144	FTIR Spectrometer (Spectrum 65)	Pankajkumar Gound	Anil Kottantharayil	8	Not Working
145	Leica Microscope	Anjum Ahmed		8	Working
146	UV-Vis-Spectrometer - Lambda 25 (CLEAN Lab)	Pankajkumar Gound	Anil Kottantharayil	8	Working
147	4-arm glove box_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	8	Working
148	Chemical Mechanical Planarisation		Udayan Ganguly	8	Working
149	Schlenk Line (1)_Fume Hood 1	Pankajkumar Gound	Saurabh Lodha	8	Working
150	Ultrasonicator_Fume Hood 1	Pankajkumar Gound	Saurabh Lodha	8	Working
151	UV-Ozone Cleaner_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	8	Working
152	Wafer bonder		Dipankar Saha	8	Partially Working
153	Wire Bonder_Hybond	Kulasekaran Muniappan	Suddhasatta Mahapatra	8	Working

9
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
154	Aries(Temperature Dependent IV/CV)		Saurabh Lodha	9	Working
155	Cryogenic probe station	Himani Jawa	Saurabh Lodha	9	Working
156	Cygnus(Organic Device Characterization)	Yaswanth Chebrolu	Udayan Ganguly	9	Not Working
157	Polaris (Stress/Long Time Measurements)	Paritosh Meihar	Udayan Ganguly	9	Working
158	Proxima (Fast IV Measurement/ B1500)	Yaswanth Chebrolu	Anil Kottantharayil	9	Working
159	RIGEL (Keysight B1500)	Paritosh Meihar Jayatika Sakhuja	Udayan Ganguly	9	Working
160	Sirius (NBTI Setup)	Paritosh Meihar	Udayan Ganguly	9	Working
161	Vega (Room Temperature IV/ CV)	Yaswanth Chebrolu	Saurabh Lodha	9	Not Working
162	Owlstone Vapour Generator (OVG-4)		Saurabh Lodha	9	Working

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Status Symbol	Meaning of Status Symbol
Not Working	Equipment may not be used
Partially Working	Equipment working with some minor problem^****
Fully Working	Fully operational
	Critical Tool

^****

Equipment fully working but process not optimized
Some parts of equipment not working
Ex:-Heater in Metal sputter not working
Some process working, other not
Equipment working in manual mode.
Ex:-RAITH sample loading is manual sometimes

Definition of 'Controlled access' for Equipment in labs at IITBNF:

not open for training.
will be available for usage only through operators.
will be available for a fixed time period in a week as per the decision taken by the Faculty in charge of the tool.

This is to ensure that these critical equipment are used on a priority basis for processing jobs which are part of Project deliverables and then made available to other users.

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Equipment Status