Equipment Status

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Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)
LIC : Pankaj Upadhyay
System NameSystem OwnerFaculty in-chargeLocationStatus
9 Temperature Dependent Spectral Response Measurement system - PL set up Pratim Saha
Tarni Aggarwal
Dipankar SahaApplied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)Working
10 Transient Absorption Pump Probe Spectrometer Shonal Chouksey
Vikas Pendem
Dipankar SahaApplied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)Working

Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)
LIC : Mudassar Meer
System NameSystem OwnerFaculty in-chargeLocationStatus
11 RF Cryogenic Device Characterization system Mudassar Meer
Akhil Kumar S
Dipankar SahaApplied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)Working

Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)
LIC : Kulasekaran Muniappan
System NameSystem OwnerFaculty in-chargeLocationStatus
12 FPA (Focal Plane Array) Characterization set up Hemant Ghadi
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working
13 Hall Measurement System Debi Prasad Panda
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working
14 Spectral Response-single pixel characterisation Hemant Ghadi
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working

Bio Sensors Lab (NanoE bldg, 7th floor)
LIC : Madhuri Vinchurkar, Rajul Patkar
System NameSystem OwnerFaculty in-chargeLocationStatus
15 Nano Dispenser Pankajkumar Gound
Soumyo MukherjiBio Sensors Lab (NanoE bldg, 7th floor)Working
16 Contact Angle Instrument (GBX) Pankajkumar Gound
Madhuri Vinchurkar
Saurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Not Working
17 Fluorescence Microscope (Z1) Dilip Agarwal
Madhuri Vinchurkar
Swaroop GangulyBio Sensors Lab (NanoE bldg, 7th floor)Working
18 FTIR Kalyani Patrikar
Pankajkumar Gound
Anil KottantharayilBio Sensors Lab (NanoE bldg, 7th floor)Working
19 Potentiostat Arif Ibrahim
Mukul Singh
Saurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Working
20 UV-Vis-NIR Spectrometer - Lambda 750 Ankitha Bangera
Pankajkumar Gound
Anil KottantharayilBio Sensors Lab (NanoE bldg, 7th floor)Working
21 Laser Engraving System (LES) Pankajkumar Gound
Soumyo MukherjiBio Sensors Lab (NanoE bldg, 7th floor)Working

BioMEMS Lab (Micro - 2)
LIC : Anjum Ahmed
System NameSystem OwnerFaculty in-chargeLocationStatus
22 2 inch general purpose anneal furnace Poonam Jangid
Anil KottantharayilBioMEMS Lab (Micro - 2)Working
23 Oven Anjum Ahmed
BioMEMS Lab (Micro - 2)Not Working


Clean lab -AMAT(NanoE bldg, 7th floor)
LIC : Minita Surwade, Pankajkumar Gound
System NameSystem OwnerFaculty in-chargeLocationStatus
28 Atmospheric Furnace_AMAT CLEAN Lab Pankajkumar Gound
Saurabh LodhaClean lab -AMAT(NanoE bldg, 7th floor)Working
29 Dip Coater_Fume Hood 1 Pankajkumar Gound
Saurabh LodhaClean lab -AMAT(NanoE bldg, 7th floor)Working
30 Drying Oven_AMAT CLEAN Lab Pankajkumar Gound
Saurabh LodhaClean lab -AMAT(NanoE bldg, 7th floor)Working
31 Fume Hood 4 Pankajkumar Gound
Clean lab -AMAT(NanoE bldg, 7th floor)Working
32 Hot plate with stirrer (1)_Fume Hood 1 Pankajkumar Gound
Saurabh LodhaClean lab -AMAT(NanoE bldg, 7th floor)Working
33 Hot plate with stirrer (2)_Fume Hood 1 Pankajkumar Gound
Saurabh LodhaClean lab -AMAT(NanoE bldg, 7th floor)Working
34 Hot plate with stirrer (3)_Fume Hood 3 Pankajkumar Gound
Saurabh LodhaClean lab -AMAT(NanoE bldg, 7th floor)Working
35 Hot plate with stirrer (4)_Fume Hood 3 Pankajkumar Gound
Clean lab -AMAT(NanoE bldg, 7th floor)Working
36 Hydrothermal Reactor_Fume Hood 2 Clean lab -AMAT(NanoE bldg, 7th floor)Working
37 pH Meter Pankajkumar Gound
Clean lab -AMAT(NanoE bldg, 7th floor)Working
38 Schlenk Line (2)_Fume Hood 3 Pankajkumar Gound
Saurabh LodhaClean lab -AMAT(NanoE bldg, 7th floor)Working
39 SILAR controller_Fume Hood 1 Pankajkumar Gound
Clean lab -AMAT(NanoE bldg, 7th floor)Working
40 Spin Coater_4 arm glove box Pankajkumar Gound
Clean lab -AMAT(NanoE bldg, 7th floor)Working
41 Tube Furnace_Fume hood 5 Pankajkumar Gound
Saurabh LodhaClean lab -AMAT(NanoE bldg, 7th floor)Working
42 Ultrasonicator_Fume Hood 1 Pankajkumar Gound
Saurabh LodhaClean lab -AMAT(NanoE bldg, 7th floor)Working
43 UV-Ozone Cleaner_AMAT CLEAN Lab Pankajkumar Gound
Saurabh LodhaClean lab -AMAT(NanoE bldg, 7th floor)Working
44 Contact Angle System (Data Physics) Pankajkumar Gound
Ankitha Bangera
Saurabh LodhaClean lab -AMAT(NanoE bldg, 7th floor)Working
45 FTIR Spectrometer (Spectrum 65) Pankajkumar Gound
Anil KottantharayilClean lab -AMAT(NanoE bldg, 7th floor)Working
46 Olympus Microscope_AMAT CLEAN Lab Pankajkumar Gound
Saurabh LodhaClean lab -AMAT(NanoE bldg, 7th floor)Working
47 UV-Vis-Spectrometer - Lambda 25 (CLEAN Lab) RangaRao Arnepalli
Pankajkumar Gound
Anil KottantharayilClean lab -AMAT(NanoE bldg, 7th floor)Working
48 2-arm glove box (1)_AMAT CLEAN Lab Pankajkumar Gound
Saurabh LodhaClean lab -AMAT(NanoE bldg, 7th floor)Working
49 2-arm glove box_AMAT CLEAN Lab Pankajkumar Gound
Saurabh LodhaClean lab -AMAT(NanoE bldg, 7th floor)Working
50 4-arm glove box_AMAT CLEAN Lab Pankajkumar Gound
Saurabh LodhaClean lab -AMAT(NanoE bldg, 7th floor)Working
51 Schlenk Line (1)_Fume Hood 1 Pankajkumar Gound
Saurabh LodhaClean lab -AMAT(NanoE bldg, 7th floor)Working

Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)
LIC : Sadaf Parwaiz, THIRUNAVUKKARASU A
System NameSystem OwnerFaculty in-chargeLocationStatus
52 Aries(Temperature Dependent IV/CV) Jyothi K Naga Bhavya
THIRUNAVUKKARASU A
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
53 Cryogenic probe station Himani Jawa
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
54 Cygnus(Organic Device Characterization) Charu Saini
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working
55 Phoenix (Temperature Dependent IV/CV) Charu Saini
THIRUNAVUKKARASU A
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working
56 Polaris (Stress/Long Time Measurements) Sandip Lashkare
THIRUNAVUKKARASU A
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
57 Proxima (Fast IV Measurement/ B1500) THIRUNAVUKKARASU A
Jyothi K Naga Bhavya
Anil KottantharayilDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
58 RIGEL (Keysight B1500) Sadaf Parwaiz
Sandip Lashkare
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
59 Sirius (NBTI Setup) Charu Saini
THIRUNAVUKKARASU A
Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working
60 Vega (Room Temperature IV/ CV) Charu Saini
THIRUNAVUKKARASU A
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working

EC Lab
LIC : Vandana Vijayakumar
System NameSystem OwnerFaculty in-chargeLocationStatus
61 Electro Plating system (Cu) Dipankar SahaEC LabWorking
62 Electroplating system - Au/Ni/Cu Minita Surwade
Sharanya Sasidharan
Dipankar SahaEC LabWorking
63 PLD target making furnace Punam Murkute
Subhananda ChakrabartiEC LabWorking
64 General Purpose Wet Bench (EC Lab) Punam Murkute
Sharanya Sasidharan
Anil KottantharayilEC LabWorking
65 TMAH wet etch station Jawaid Alam
Sharanya Sasidharan
Saurabh LodhaEC LabWorking
66 Cross section TEM sample preparation unit - Dimpler Navneet Bhardwaj
Anil KottantharayilEC LabWorking
67 Cross section TEM sample preparation unit - Disc Cutter Navneet Bhardwaj
Sharanya Sasidharan
Anil KottantharayilEC LabWorking
68 Cross section TEM sample preparation unit - PIPS Navneet Bhardwaj
Punam Murkute
Anil KottantharayilEC LabWorking
69 Cross section TEM sample preparation unit - Ultrasonic Cutter Navneet Bhardwaj
Sharanya Sasidharan
Anil KottantharayilEC LabWorking
70 EC Lab Hot air Oven Punam Murkute
Sharanya Sasidharan
EC LabWorking
71 Logitech PM5 Precision Lapping and Polishing Machine Sourabh Upadhyay
Subhananda ChakrabartiEC LabWorking
72 Logitech WSB2 Wafer Substrate Bonding Unit Sourabh Upadhyay
Subhananda ChakrabartiEC LabWorking
73 Spinner 2 Inch (PDMS) Sharanya Sasidharan
Minita Surwade
Dipankar SahaEC LabWorking
74 Vapor generator for explosive detection Nikhilendu Tiwary
V Ramgopal RaoEC LabWorking

MBE Clean Room 1 (NanoE bldg, Gr floor)
LIC : Debi Prasad Panda, Kankat Ghosh
System NameSystem OwnerFaculty in-chargeLocationStatus
75 Molecular Beam Epitaxy III Nitrides Kankat Ghosh
Apurba LahaMBE Clean Room 1 (NanoE bldg, Gr floor)Working
76 Molecular Beam Epitaxy III-V Debi Prasad Panda
Subhananda ChakrabartiMBE Clean Room 1 (NanoE bldg, Gr floor)Working
77 Molecular Beam Epitaxy Si, Ge, Sn Suddhasatta MahapatraMBE Clean Room 1 (NanoE bldg, Gr floor)Working

MBE Clean Room 2 (NanoE bldg, Gr floor)
LIC : Kulasekaran Muniappan
System NameSystem OwnerFaculty in-chargeLocationStatus
78 6 Target E Beam Evaporator Goma Kumari KC
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
79 In Thermal Evaporator Goma Kumari KC
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
80 Dicer Kulasekaran Muniappan
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
81 Flip Chip Bonder Kulasekaran Muniappan
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working

Micro1 Lab
LIC : Anjum Ahmed, Minita Surwade
System NameSystem OwnerFaculty in-chargeLocationStatus
82 2 inch Annealing Furnace (Gen purpose Forming gas/ Ar annealing furnace) Pankajkumar Gound
Amita Rawat
Anil KottantharayilMicro1 LabWorking
83 2 inch Boron_Solid source Diffusion Furnace Anil KottantharayilMicro1 LabWorking
84 2 inch CMOS specific FGA furnace Kalaivani Srinivasan
Anil KottantharayilMicro1 LabWorking
85 2 inch Dry oxidation Furnace Amita Rawat
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
86 2 inch N2 Annealing Furnace Anil KottantharayilMicro1 LabWorking
87 2 inch Phosphorous_Solid source Diffusion Furnace suren patwardhan
Anil KottantharayilMicro1 LabPartially Working
88 2 inch Wet oxidation Furnace Amita Rawat
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
89 4 target E-beam evaporator Nama Premsai
Apurba LahaMicro1 LabPartially Working
90 Dielectric - sputter System Nikhilendu Tiwary
Amita Rawat
Ashwin TulapurkarMicro1 LabWorking
91 Metal - sputter System Swasti Bhatia
Ashwin TulapurkarMicro1 LabWorking
92 Thermal Evaporator - Al Swasti Bhatia
Sharanya Sasidharan
Anil KottantharayilMicro1 LabWorking
93 Thermal Evaporator-Cr/Au Anjum Ahmed
Sharanya Sasidharan
Saurabh LodhaMicro1 LabWorking
94 HRXRD Swagata Bhunia
Kankat Ghosh
Apurba LahaMicro1 LabNot Working
95 SEM EVO 18 Deepti Rukade
Vandana Vijayakumar
Suddhasatta MahapatraMicro1 LabWorking
96 2 inch RCA Clean Station Minita Surwade
Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
97 4 inch RCA Clean Station Minita Surwade
Pankajkumar Gound
Saurabh LodhaMicro1 LabWorking
98 Chemical Mechanical Planarisation Bhaskar Das
Udayan GangulyMicro1 LabWorking
99 General Purpose Wet Bench (Micro 1) Minita Surwade
Saurabh LodhaMicro1 LabWorking
100 Tube Washer Minita Surwade
Anil KottantharayilMicro1 LabWorking

Micro1 Yellow Room
LIC : Hitesh Kamble
System NameSystem OwnerFaculty in-chargeLocationStatus
101 Multi-pocket Electron-beam Evaporator (4 target - GaN) Yogendra Yadav
Mudassar Meer
Dipankar SahaMicro1 Yellow RoomWorking
102 STSRIE Sreejith K P
Suddhasatta MahapatraMicro1 Yellow RoomWorking
103 Karl Suss MJB3 Mask Aligner Saurabh LodhaMicro1 Yellow RoomWorking
104 Karl Suss MJB4 Mask Aligner Hitesh Kamble
Hemant Kshirsagar
Apurba LahaMicro1 Yellow RoomWorking
105 Laser Writer Hitesh Kamble
Kasturi SahaMicro1 Yellow RoomWorking
106 Spinner 2 inch (General Purpose) Hitesh Kamble
Saurabh LodhaMicro1 Yellow RoomWorking
107 Spinner 2 inch (SU8, PPR) Hitesh Kamble
Hemant Kshirsagar
Saurabh LodhaMicro1 Yellow RoomWorking
108 Barn-stead Lab-line Oven Hitesh Kamble
V Ramgopal RaoMicro1 Yellow RoomWorking
109 Probe Sonicator Hitesh Kamble
Saurabh LodhaMicro1 Yellow RoomWorking

Micro2 Lab
LIC : Anjum Ahmed
System NameSystem OwnerFaculty in-chargeLocationStatus
110 Hot wire CVD(HWCVD) Anjum Ahmed
Anil KottantharayilMicro2 LabWorking
111 Organic Evaporation System Kalyani Patrikar
Anjum Ahmed
Dinesh KabraMicro2 LabWorking
112 4 probe Measurement (Automatic) Ambika Shanker Shukla
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking
113 4 Probe Measurement (Manual) Anjum Ahmed
Swaroop GangulyMicro2 LabWorking
114 DektakXT Profilometer Sharanya Sasidharan
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking
115 Filmetrics Reflectometer Bhaskar Das
Anjum Ahmed
Udayan GangulyMicro2 LabWorking
116 Leica Microscope Anjum Ahmed
Micro2 LabWorking
117 Photoluminescence Measurement set up (PL Set up) Debabrata Das
Punam Murkute
Subhananda ChakrabartiMicro2 LabPartially Working
118 X-ray Photoelectron Spectroscopy Anjum Ahmed
Jayeeta Biswas (Sen)
Saurabh LodhaMicro2 LabWorking
119 Plasma Immersion Ion Implantation (PIII) Jayeeta Biswas (Sen)
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking

Nano Lab
LIC : Gayatri Vaidya, Pijush Chakraborty
System NameSystem OwnerFaculty in-chargeLocationStatus
120 ALD Dipankar Biswas
Jayeeta Biswas (Sen)
Saurabh LodhaNano LabWorking
121 ALD LL Jayeeta Biswas (Sen)
Dipankar Biswas
Saurabh LodhaNano LabWorking
122 Inductively coupled plasma CVD (ICPCVD) Hitesh Kamble
Dipankar SahaNano LabWorking
123 Rapid Thermal Processing(RTP) Akhil Kumar S
Hitesh Kamble
Dipankar SahaNano LabWorking
124 Sputter (ATC 2200) Pijush Chakraborty
Amita Rawat
Udayan GangulyNano LabWorking
125 Sputter (Orion) Ambika Shanker Shukla
Pijush Chakraborty
Ashwin TulapurkarNano LabWorking
126 Ultech Furnace Anneal Anil KottantharayilNano LabWorking
127 Ultech Furnace Drive In Udayan GangulyNano LabWorking
128 Ultech Furnace Dry Oxide Udayan GangulyNano LabWorking
129 Ultech Furnace i-poly Udayan GangulyNano LabWorking
130 Ultech Furnace Low Temperature Oxide (LTO) CHANDAN JOISHI
Saurabh LodhaNano LabPartially Working
131 Ultech Furnace n-doped poly Anil KottantharayilNano LabPartially Working
132 Ultech Furnace Pyrogenic Oxide Udayan GangulyNano LabPartially Working
133 Ultech Furnace Silicon Nitride (SiN) Anil KottantharayilNano LabWorking
134 Ultech Furnace Silicon Oxynitride (SiON) Anil KottantharayilNano LabWorking
135 Olympus Microscope Dipankar SahaNano LabWorking
136 Sentech Ellipsometer Nama Premsai
Anil KottantharayilNano LabWorking
137 Nano Wet Bench Hitesh Kamble
Saurabh LodhaNano LabWorking

Nano Litho Lab
LIC : Gayatri Vaidya, Hitesh Kamble
System NameSystem OwnerFaculty in-chargeLocationStatus
138 Double Sided Aligner (DSA) Yogendra Yadav
Hitesh Kamble
Dipankar SahaNano Litho LabWorking
139 RaithEBL_Long Gayatri Vaidya
Mudassar Meer
Suddhasatta MahapatraNano Litho LabWorking
140 RaithEBL_Short Gayatri Vaidya
Mudassar Meer
Suddhasatta MahapatraNano Litho LabWorking
141 RaithSEM Mudassar Meer
Gayatri Vaidya
Suddhasatta MahapatraNano Litho LabWorking
142 Spinner 4 inch (PMMA) Hitesh Kamble
Gayatri Vaidya
Dipankar SahaNano Litho LabWorking
143 Spinner 8 inch (General Purpose) Hitesh Kamble
Gayatri Vaidya
Dipankar SahaNano Litho LabWorking
144 Spinner 8 inch (PPR) Hitesh Kamble
Gayatri Vaidya
Dipankar SahaNano Litho LabWorking
145 Torrey Pines Scientific Hi-temp Hotplate Hitesh Kamble
Gayatri Vaidya
Nano Litho LabWorking
146 Torrey Pines Scientific Low-temp Hotplate Hitesh Kamble
Gayatri Vaidya
Nano Litho LabWorking
147 Wafer bonder Gayatri Vaidya
Ayyaz Siddique
Dipankar SahaNano Litho LabPartially Working

Nanoelectronics Processing Lab (NanoE bldg, 1st floor)
LIC : Pijush Chakraborty, Sharanya Sasidharan
System NameSystem OwnerFaculty in-chargeLocationStatus
148 AJA 6 Target E beam Evaporator Nama Premsai
Apurba LahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
149 Graphene specific Argon annealing system Poonam Jangid
Robin Singla
Anil KottantharayilNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
150 PLD I SENTHILKUMAR R
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
151 PLD II Varun Kumar Kushwaha
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
152 PLD III SENTHILKUMAR R
Apurba LahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
153 PLD IV Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
154 Ambios XP-2 Profilometer Anjum Ahmed
Sharanya Sasidharan
Suddhasatta MahapatraNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
155 Ar-ion Milling Ambika Shanker Shukla
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
156 ICPRIE (New) Mudassar Meer
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
157 ICPRIE (old) Mudassar Meer
Yogendra Yadav
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
158 Plasma asher Sharanya Sasidharan
JASWANT RATHORE
Suddhasatta MahapatraNanoelectronics Processing Lab (NanoE bldg, 1st floor)Partially Working
159 1.2 Lab wet bench Sudipta Das
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working

Opto electronics material and devices lab
LIC : Sumit Sharma
System NameSystem OwnerFaculty in-chargeLocationStatus
160 Nova simulator Vipinraj Sugathan
Sumit Sharma
Aswani YellaOpto electronics material and devices labWorking

FESEM Facility is now available for users. Click here for more details.

Status SymbolMeaning of Status Symbol
Not WorkingEquipment may not be used
Partially WorkingEquipment working with some minor problem****
Fully WorkingFully operational


****
  • Equipment fully working but process not optimized
  • Some parts of equipment not working
          Ex:-Heater in Metal sputter not working
  • Some process working, other not
  • Equipment working in manual mode.
          Ex:-RAITH sample loading is manual sometimes

Definition of 'Controlled access' for Equipment in labs at IITBNF:
  • not open for training.
  • will be available for usage only through operators.
  • will be available for a fixed time period in a week as per the decision taken by the Faculty in charge of the tool.

This is to ensure that these critical equipment are used on a priority basis for processing jobs which are part of Project deliverables and then made available to other users.