Equipment Status

7.1 Lab
LIC : Pankajkumar Gound, Pradnya Chabbi, Pranita Sharma

	System Name	System Owner	Faculty in-charge	Location	Status
1	2 inch general purpose annealing furnace_Fume hood 3	Pankajkumar Gound	Anil Kottantharayil	7.1 Lab	Working
2	Atmospheric Furnace_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
3	Dip Coater	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
4	Drying Oven_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
5	Fume Hood 4	Pankajkumar Gound		7.1 Lab	Working
6	Hot plate with stirrer (1)_Fume Hood 1	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
7	Hot plate with stirrer (2)_Fume Hood 1	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
8	Hot plate with stirrer (3)_2 arm glove box	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
9	Hot plate with stirrer (4)_4-arm glove box	Pankajkumar Gound		7.1 Lab	Working
10	Hydrothermal Reactor_Fume Hood 2			7.1 Lab	Working
11	pH Meter	Pankajkumar Gound		7.1 Lab	Working
12	Schlenk Line (2)_Fume Hood 3	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
13	SILAR controller	Pankajkumar Gound		7.1 Lab	Working
14	Spin Coater_4 arm glove box	Pankajkumar Gound		7.1 Lab	Working
15	Thermogravimetric Analyzer	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
16	Tube Furnace_Fume hood 5	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
17	Contact Angle System (Data Physics)	Pankajkumar Gound Ankitha Bangera	Saurabh Lodha	7.1 Lab	Working
18	FTIR Spectrometer (Spectrum 65)	Pankajkumar Gound	Anil Kottantharayil	7.1 Lab	Working
19	Olympus Microscope_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
20	UV-Vis-Spectrometer - Lambda 25 (CLEAN Lab)	Pankajkumar Gound	Anil Kottantharayil	7.1 Lab	Working
21	2-arm glove box_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
22	4-arm glove box_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
23	Chemical Mechanical Planarisation		Udayan Ganguly	7.1 Lab	Working
24	Schlenk Line (1)_Fume Hood 1	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
25	Owlstone Vapour Generator (OVG-4)		Saurabh Lodha	7.1 Lab	Working
26	Ultrasonicator_Fume Hood 1	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
27	UV-Ozone Cleaner_AMAT CLEAN Lab	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
28	Wafer bonder		Dipankar Saha	7.1 Lab	Partially Working
29	Wire Bonder	Kulasekaran Muniappan	Suddhasatta Mahapatra	7.1 Lab	Working

Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)
LIC : Pankaj Upadhyay, Pradnya Chabbi

	System Name	System Owner	Faculty in-charge	Location	Status
30	Temperature Dependent Spectral Response Measurement system - PL set up	Pratim Saha Tarni Aggarwal	Dipankar Saha	Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)	Working
31	Transient Absorption Pump Probe Spectrometer	Shonal Chouksey Vikas Pendem	Dipankar Saha	Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)	Working

Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)
LIC : Jaya Jha, Pradnya Chabbi

	System Name	System Owner	Faculty in-charge	Location	Status
32	RF Cryogenic Device Characterization system	Jaya Jha	Dipankar Saha	Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)	Working

Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)
LIC : Kulasekaran Muniappan, Pradnya Chabbi

	System Name	System Owner	Faculty in-charge	Location	Status
33	FPA (Focal Plane Array) Characterization set up	Kulasekaran Muniappan	Subhananda Chakrabarti	Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)	Working
34	Hall Measurement System	Debi Prasad Panda	Subhananda Chakrabarti	Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)	Working
35	Spectral Response-single pixel characterisation	Kulasekaran Muniappan	Subhananda Chakrabarti	Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)	Working

Bio Sensors Lab (NanoE bldg, 7th floor)
LIC : Madhuri Vinchurkar, Pradnya Chabbi, Rajul Patkar

	System Name	System Owner	Faculty in-charge	Location	Status
36	Eppendorf FemtoJet 4x Microinjector	Pankajkumar Gound	Soumyo Mukherji	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
37	Potentiostat		Saurabh Lodha	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
38	Contact Angle Instrument (GBX)	Pankajkumar Gound Madhuri Vinchurkar	Saurabh Lodha	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
39	Fluorescence Microscope (Z1)	Madhuri Vinchurkar	Kasturi Saha	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
40	FTIR	Kalyani Patrikar Pankajkumar Gound	Anil Kottantharayil	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
41	UV-Vis-NIR Spectrometer - Lambda 750	Ankitha Bangera Pankajkumar Gound	Anil Kottantharayil	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
42	Laser Engraving System (LES)	Pankajkumar Gound	Soumyo Mukherji	Bio Sensors Lab (NanoE bldg, 7th floor)	Working

Char Lab-2
LIC : Nitin Patil, Pradnya Chabbi

	System Name	System Owner	Faculty in-charge	Location	Status
43	microPL	Sayantan Ghosh Kartikey Thakar	Saurabh Lodha	Char Lab-2	Partially Working
44	PPMS - Integrated cryogen-free system	Pratim Saha Ambika Shanker Shukla	Ashwin Tulapurkar	Char Lab-2	Working

Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)
LIC : Charu Saini, Pradnya Chabbi, Yaswanth Chebrolu

	System Name	System Owner	Faculty in-charge	Location	Status
45	Aries(Temperature Dependent IV/CV)	Charu Saini Yaswanth Chebrolu	Saurabh Lodha	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
46	Cryogenic probe station	Himani Jawa	Saurabh Lodha	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
47	Cygnus(Organic Device Characterization)	Yaswanth Chebrolu Charu Saini	Udayan Ganguly	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
48	Phoenix (Temperature Dependent IV/CV)	Yaswanth Chebrolu Charu Saini	Saurabh Lodha	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
49	Polaris (Stress/Long Time Measurements)	Sandip Lashkare Yaswanth Chebrolu	Udayan Ganguly	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
50	Proxima (Fast IV Measurement/ B1500)	Yaswanth Chebrolu Charu Saini	Anil Kottantharayil	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
51	RIGEL (Keysight B1500)	Yaswanth Chebrolu Sandip Lashkare	Udayan Ganguly	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
52	Sirius (NBTI Setup)	Charu Saini Yaswanth Chebrolu	Udayan Ganguly	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
53	Vega (Room Temperature IV/ CV)	Charu Saini Yaswanth Chebrolu	Saurabh Lodha	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working

EC Lab
LIC : Minita Surwade, Pradnya Chabbi, Pranita Sharma

	System Name	System Owner	Faculty in-charge	Location	Status
54	Electroplating system - Au/Ni/Cu	Minita Surwade	Dipankar Saha	EC Lab	Working
55	PLD target making furnace		Subhananda Chakrabarti	EC Lab	Working
56	General Purpose Wet Bench (EC Lab)	Minita Surwade	Anil Kottantharayil	EC Lab	Working
57	Cross section TEM sample preparation unit - Dimpler	Navneet Bhardwaj Minita Surwade	Anil Kottantharayil	EC Lab	Working
58	Cross section TEM sample preparation unit - Disc Cutter	Navneet Bhardwaj Minita Surwade	Anil Kottantharayil	EC Lab	Working
59	Cross section TEM sample preparation unit - PIPS	Navneet Bhardwaj Minita Surwade	Anil Kottantharayil	EC Lab	Working
60	Cross section TEM sample preparation unit - Ultrasonic Cutter	Navneet Bhardwaj Minita Surwade	Anil Kottantharayil	EC Lab	Working
61	EC Lab Hot air Oven	Pradnya Chabbi Minita Surwade	Ashwin Tulapurkar	EC Lab	Working
62	Logitech PM5 Precision Lapping and Polishing Machine	Kulasekaran Muniappan	Subhananda Chakrabarti	EC Lab	Working
63	Logitech WSB2 Wafer Substrate Bonding Unit	Kulasekaran Muniappan	Subhananda Chakrabarti	EC Lab	Working
64	Spinner 2 Inch (PDMS)	Minita Surwade	Dipankar Saha	EC Lab	Working
65	Vapor generator for explosive detection		V Ramgopal Rao	EC Lab	Working

MBE Clean Room 1 (NanoE bldg, Gr floor)
LIC : Jay Agawane, Pradnya Chabbi, RITAM SARKAR

	System Name	System Owner	Faculty in-charge	Location	Status
66	Molecular Beam Epitaxy III Nitrides	RITAM SARKAR	Apurba Laha	MBE Clean Room 1 (NanoE bldg, Gr floor)	Working
67	Molecular Beam Epitaxy III-V	Debi Prasad Panda	Subhananda Chakrabarti	MBE Clean Room 1 (NanoE bldg, Gr floor)	Working
68	Molecular Beam Epitaxy Si, Ge, Sn		Suddhasatta Mahapatra	MBE Clean Room 1 (NanoE bldg, Gr floor)	Working

MBE Clean Room 2 (NanoE bldg, Gr floor)
LIC : Jay Agawane, Pradnya Chabbi, RITAM SARKAR

	System Name	System Owner	Faculty in-charge	Location	Status
69	6 Target E Beam Evaporator	Goma Kumari KC	Subhananda Chakrabarti	MBE Clean Room 2 (NanoE bldg, Gr floor)	Working
70	In Thermal Evaporator	Goma Kumari KC	Subhananda Chakrabarti	MBE Clean Room 2 (NanoE bldg, Gr floor)	Working
71	Dicer	Kulasekaran Muniappan	Subhananda Chakrabarti	MBE Clean Room 2 (NanoE bldg, Gr floor)	Working
72	Flip Chip Bonder	Kulasekaran Muniappan	Subhananda Chakrabarti	MBE Clean Room 2 (NanoE bldg, Gr floor)	Working

MCL Lab
LIC : Aniruddha Khade

	System Name	System Owner	Faculty in-charge	Location	Status
73	MFP-3D-AFM	Tarni Aggarwal Navneet Bhardwaj	Dipankar Saha	MCL Lab	Working

Micro1 Lab
LIC : Hemlata Tiwari, Minita Surwade, Pradnya Chabbi

	System Name	System Owner	Faculty in-charge	Location	Status
74	2 inch Annealing Furnace (Gen purpose Forming gas/ Ar annealing furnace)	Pankajkumar Gound Amita Rawat	Anil Kottantharayil	Micro1 Lab	Working
75	2 inch Boron_Solid source Diffusion Furnace	Pankajkumar Gound	Anil Kottantharayil	Micro1 Lab	Working
76	2 inch CMOS specific FGA furnace	Kalaivani Srinivasan	Anil Kottantharayil	Micro1 Lab	Working
77	2 inch Dry oxidation Furnace	Amita Rawat Pankajkumar Gound	Anil Kottantharayil	Micro1 Lab	Working
78	2 inch N2 Annealing Furnace	Pankajkumar Gound	Anil Kottantharayil	Micro1 Lab	Working
79	2 inch Phosphorous_Solid source Diffusion Furnace	suren patwardhan	Anil Kottantharayil	Micro1 Lab	Partially Working
80	2 inch Wet oxidation Furnace	Amita Rawat Pankajkumar Gound	Anil Kottantharayil	Micro1 Lab	Working
81	4 target E-beam evaporator	Nama Premsai	Apurba Laha	Micro1 Lab	Partially Working
82	Dielectric - sputter System	Madhuri Mishra	Ashwin Tulapurkar	Micro1 Lab	Partially Working
83	Gold Electroplating System	Bhanu B Upadhyay		Micro1 Lab	Working
84	Thermal Evaporator - Al	Swasti Bhatia Minita Surwade	Anil Kottantharayil	Micro1 Lab	Working
85	Thermal Evaporator-Cr/Au	Anjum Ahmed Minita Surwade	Saurabh Lodha	Micro1 Lab	Working
86	HRXRD	Swagata Bhunia	Apurba Laha	Micro1 Lab	Working
87	SEM EVO 18	Madhuri Mishra Sumit Saha	Suddhasatta Mahapatra	Micro1 Lab	Not Working
88	Tube Washer	Minita Surwade	Anil Kottantharayil	Micro1 Lab	Working

Micro1 Yellow Room
LIC : Akshata Bhosle, Mayur Pawar, Pradnya Chabbi

	System Name	System Owner	Faculty in-charge	Location	Status
89	Multi-pocket Electron-beam Evaporator (4 target - GaN)	Yogendra Yadav Sreenadh Surapaneni	Dipankar Saha	Micro1 Yellow Room	Working
90	STSRIE	Kishor Kumar Mandal Rowtu Srinu	Suddhasatta Mahapatra	Micro1 Yellow Room	Working
91	Karl Suss MJB4 Mask Aligner	Hitesh Kamble Hemant Kshirsagar	Apurba Laha	Micro1 Yellow Room	Working
92	Laser Writer	Hitesh Kamble Pankaj Upadhyay	Kasturi Saha	Micro1 Yellow Room	Working
93	Spinner 2 inch (General Purpose)	Hitesh Kamble	Saurabh Lodha	Micro1 Yellow Room	Working
94	Spinner 2 inch (SU8, PPR)	Hitesh Kamble Hemant Kshirsagar	Saurabh Lodha	Micro1 Yellow Room	Working
95	Barn-stead Lab-line Oven	Hitesh Kamble	V Ramgopal Rao	Micro1 Yellow Room	Working
96	Probe Sonicator	Hitesh Kamble	Saurabh Lodha	Micro1 Yellow Room	Working

Micro2 Lab
LIC : Anjum Ahmed, Poonam Katkar, Pradnya Chabbi

	System Name	System Owner	Faculty in-charge	Location	Status
97	Hot wire CVD(HWCVD)	Anjum Ahmed	Anil Kottantharayil	Micro2 Lab	Working
98	Organic Evaporation System	Kalyani Patrikar Anjum Ahmed	Dinesh Kabra	Micro2 Lab	Working
99	4 probe Measurement (Automatic)	Ambika Shanker Shukla Anjum Ahmed	Saurabh Lodha	Micro2 Lab	Working
100	4 Probe Measurement (Manual)	Anjum Ahmed	Saurabh Lodha	Micro2 Lab	Working
101	DektakXT Profilometer	Anjum Ahmed	Saurabh Lodha	Micro2 Lab	Working
102	Filmetrics Reflectometer	Anjum Ahmed	Udayan Ganguly	Micro2 Lab	Working
103	Leica Microscope	Anjum Ahmed		Micro2 Lab	Working
104	Photoluminescence Measurement set up (PL Set up)	Kulasekaran Muniappan	Subhananda Chakrabarti	Micro2 Lab	Partially Working
105	X-ray Photoelectron Spectroscopy	Anjum Ahmed Jayeeta Biswas (Sen)	Saurabh Lodha	Micro2 Lab	Working
106	Plasma Immersion Ion Implantation (PIII)	Jayeeta Biswas (Sen) Anjum Ahmed	Saurabh Lodha	Micro2 Lab	Working

Nano Lab
LIC : Hemant Kshirsagar, Hitesh Kamble, Pradnya Chabbi

	System Name	System Owner	Faculty in-charge	Location	Status
107	ALD	Jayeeta Biswas (Sen)	Saurabh Lodha	Nano Lab	Working
108	ALD LL	Jayeeta Biswas (Sen)	Saurabh Lodha	Nano Lab	Working
109	Inductively coupled plasma CVD (ICPCVD)	Hitesh Kamble	Dipankar Saha	Nano Lab	Working
110	Rapid Thermal Processing(RTP)	Pankaj Upadhyay Hitesh Kamble	Dipankar Saha	Nano Lab	Working
111	Sputter (ATC 2200)	Pijush Chakraborty Amita Rawat	Udayan Ganguly	Nano Lab	Working
112	Sputter (Orion)	Ambika Shanker Shukla Pijush Chakraborty	Ashwin Tulapurkar	Nano Lab	Working
113	Ultech Furnace Anneal		Anil Kottantharayil	Nano Lab	Working
114	Olympus Microscope		Dipankar Saha	Nano Lab	Working
115	Sentech Ellipsometer	Nama Premsai	Anil Kottantharayil	Nano Lab	Working
116	Nano Wet Bench	Pijush Chakraborty Hitesh Kamble	Saurabh Lodha	Nano Lab	Working

Nano Litho Lab
LIC : Hemant Kshirsagar, Hitesh Kamble, Pradnya Chabbi

	System Name	System Owner	Faculty in-charge	Location	Status
117	Double Sided Aligner (DSA)	Yogendra Yadav Hitesh Kamble	Dipankar Saha	Nano Litho Lab	Working
118	RaithEBL_Long	Navneet Bhardwaj Kartikey Thakar	Suddhasatta Mahapatra	Nano Litho Lab	Working
119	RaithEBL_Short	Kartikey Thakar Navneet Bhardwaj	Suddhasatta Mahapatra	Nano Litho Lab	Working
120	Spinner 4 inch (PMMA)	Hitesh Kamble	Dipankar Saha	Nano Litho Lab	Working
121	Spinner 8 inch (General Purpose)	Hitesh Kamble	Dipankar Saha	Nano Litho Lab	Working
122	Spinner 8 inch (PPR)	Hitesh Kamble	Dipankar Saha	Nano Litho Lab	Working
123	Torrey Pines Scientific Hi-temp Hotplate	Hitesh Kamble		Nano Litho Lab	Working
124	Torrey Pines Scientific Low-temp Hotplate	Hitesh Kamble		Nano Litho Lab	Working

Nanoelectronics Processing Lab (NanoE bldg, 1st floor)
LIC : Mayur Pawar, Pijush Chakraborty, Pradnya Chabbi

	System Name	System Owner	Faculty in-charge	Location	Status
125	AJA 6 Target E beam Evaporator	Nama Premsai	Apurba Laha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
126	Graphene specific Argon annealing system	Robin Singla	Anil Kottantharayil	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
127	Plasma Doping System	Rowtu Srinu	Udayan Ganguly	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
128	PLD I	SENTHILKUMAR R	Ashwin Tulapurkar	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
129	PLD II	Ambika Shanker Shukla	Ashwin Tulapurkar	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
130	PLD III	SENTHILKUMAR R	Apurba Laha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
131	PLD IV	Pijush Chakraborty	Ashwin Tulapurkar	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
132	Ambios XP-2 Profilometer	Anjum Ahmed Pijush Chakraborty	Suddhasatta Mahapatra	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
133	Ar-ion Milling	Ambika Shanker Shukla	Ashwin Tulapurkar	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
134	ICPRIE (New)	Bhanu B Upadhyay Yogendra Yadav	Dipankar Saha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Partially Working
135	ICPRIE (old)	Bhanu B Upadhyay Yogendra Yadav	Dipankar Saha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
136	Plasma asher	Anuj Kumar Singh Minita Surwade	Suddhasatta Mahapatra	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
137	1.2 Lab wet bench		Dipankar Saha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working

NMPF Lab
LIC : Hemant Kshirsagar, Pradnya Chabbi

	System Name	System Owner	Faculty in-charge	Location	Status
138	LPCVD Furnace_PolySi, Doped PolySi	Pradnya Chabbi Hemant Kshirsagar	Anil Kottantharayil	NMPF Lab	Working
139	LPCVD Furnace_SixNy	Pradnya Chabbi Hemant Kshirsagar	Anil Kottantharayil	NMPF Lab	Working
140	LPCVD Furnace_Thermal oxidation	Pradnya Chabbi Hemant Kshirsagar	Anil Kottantharayil	NMPF Lab	Working
141	Multi target sputter – AJA International	Hemant Kshirsagar Pradnya Chabbi	Ashwin Tulapurkar	NMPF Lab	Working
142	Parylene CVD – SCS	Pradnya Chabbi Hemant Kshirsagar	Saurabh Lodha	NMPF Lab	Working
143	Rapid Thermal Annealing – Annealsys	Hemant Kshirsagar Pradnya Chabbi	Saurabh Lodha	NMPF Lab	Working
144	Wet bench_Solvents	Pradnya Chabbi Hemant Kshirsagar	Saurabh Lodha	NMPF Lab	Working
145	Deep Reactive Ion Etching – Samco	Pradnya Chabbi Hemant Kshirsagar	Saurabh Lodha	NMPF Lab	Working
146	RIE-1C Plasma Asher – Samco	Hemant Kshirsagar Pradnya Chabbi	Suddhasatta Mahapatra	NMPF Lab	Working
147	Double Side Mask Aligner – Suss Microtech	Pradnya Chabbi Hemant Kshirsagar	Dipankar Saha	NMPF Lab	Working
148	Spin Coater – Laurell	Hemant Kshirsagar Pradnya Chabbi	Dipankar Saha	NMPF Lab	Working
149	Wet bench_2” RCA , Piranha	Hemant Kshirsagar Pradnya Chabbi	Saurabh Lodha	NMPF Lab	Working
150	Wet bench_Metal etching	Pradnya Chabbi Hemant Kshirsagar	Saurabh Lodha	NMPF Lab	Working
151	Wafer Dicer – ADT	Hemant Kshirsagar Pradnya Chabbi	Ashwin Tulapurkar	NMPF Lab	Working
152	Wire Bonder – TPT	Pradnya Chabbi Hemant Kshirsagar	Saurabh Lodha	NMPF Lab	Working

Wet Chemistry lab
LIC : Minita Surwade, Pradnya Chabbi, Shilpa Kharat

	System Name	System Owner	Faculty in-charge	Location	Status
153	2 inch RCA Clean Station	Minita Surwade Pankajkumar Gound	Anil Kottantharayil	Wet Chemistry lab	Working
154	4 inch RCA Clean Station	Minita Surwade Pankajkumar Gound	Saurabh Lodha	Wet Chemistry lab	Working
155	General Purpose Wet Bench (Wet Chemistry Lab)	Minita Surwade	Saurabh Lodha	Wet Chemistry lab	Working
156	TMAH wet etch station	Jawaid Alam Minita Surwade	Saurabh Lodha	Wet Chemistry lab	Working
157	Scientific India Microscope	Anjum Ahmed		Wet Chemistry lab	Not Working

FESEM Facility is now available for users. Click here for more details.

Status Symbol	Meaning of Status Symbol
Not Working	Equipment may not be used
Partially Working	Equipment working with some minor problem^****
Fully Working	Fully operational
	Critical Tool

^****

Equipment fully working but process not optimized
Some parts of equipment not working
Ex:-Heater in Metal sputter not working
Some process working, other not
Equipment working in manual mode.
Ex:-RAITH sample loading is manual sometimes

Definition of 'Controlled access' for Equipment in labs at IITBNF:

not open for training.
will be available for usage only through operators.
will be available for a fixed time period in a week as per the decision taken by the Faculty in charge of the tool.

This is to ensure that these critical equipment are used on a priority basis for processing jobs which are part of Project deliverables and then made available to other users.

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Equipment Status