Equipment Status

2D Materials and Devices Lab
LIC : Deepti Rukade(NH), Himani Jawa, Kartikey Thakar

	System Name	System Owner	Faculty in-charge	Location	Status
1	2-arm Glove Box (Open access)	Pankajkumar Gound Srilagna Sahoo (H)	Saurabh Lodha	2D Materials and Devices Lab	Working
2	2D Materials CVD (Controlled access)	Sera Sen (NH)	Saurabh Lodha	2D Materials and Devices Lab	Not Working
3	LabRAM HR Evolution-RAMAN (Controlled access)	Abin Varghese	Saurabh Lodha	2D Materials and Devices Lab	Working
4	Optical Setup (micro-PL) (Controlled access)	Abin Varghese Srilagna Sahoo (H)	Saurabh Lodha	2D Materials and Devices Lab	Partially Working
5	Phoenix (Open access)	Chandan Samanta (NH)	Saurabh Lodha	2D Materials and Devices Lab	Not Working
6	Wire bonder (TPT HB05)_Gold (Controlled access)	Pankajkumar Gound Srilagna Sahoo (H)	Saurabh Lodha	2D Materials and Devices Lab	Working

7.1 Lab
LIC : Deepti Rukade(NH), Pankajkumar Gound

	System Name	System Owner	Faculty in-charge	Location	Status
7	2 inch general purpose annealing furnace_Fume hood 3 (Open access)	Pankajkumar Gound	Anil Kottantharayil	7.1 Lab	Working
8	4-arm glove box_7.1 lab (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
9	Atmospheric Furnace_7.1 Lab (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
10	Contact Angle System (Data Physics) (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
11	Dip Coater (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
12	Drying Oven_7.1 Lab (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
13	FTIR Spectrometer (Spectrum 65) (Open access)	Pankajkumar Gound	Anil Kottantharayil	7.1 Lab	Not Working
14	Fume Hood 4 (Open access)	Pankajkumar Gound		7.1 Lab	Working
15	Hot plate with stirrer (1)_Fume Hood 1 (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
16	Hot plate with stirrer (2)_Fume Hood 1 (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
17	Hot plate with stirrer (3)_2 arm glove box (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
18	Hot plate with stirrer (4)_4-arm glove box (Open access)	Pankajkumar Gound		7.1 Lab	Working
19	Hydrothermal Reactor_Fume Hood 2 (Controlled access)			7.1 Lab	Working
20	Leica Microscope (Open access)	Anjum Ahmed (NH)		7.1 Lab	Working
21	pH Meter (Open access)	Pankajkumar Gound		7.1 Lab	Working
22	Schlenk Line (1)_Fume Hood 1 (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
23	Schlenk Line (2)_Fume Hood 3 (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
24	SILAR controller (Open access)	Pankajkumar Gound		7.1 Lab	Working
25	Spin Coater_4 arm glove box (Open access)	Pankajkumar Gound		7.1 Lab	Working
26	Thermogravimetric Analyzer (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Not Working
27	Tube Furnace_Fume hood 5 (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
28	Ultrasonicator_Fume Hood 1 (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
29	UV-Ozone Cleaner_7.1 Lab (Open access)	Pankajkumar Gound	Saurabh Lodha	7.1 Lab	Working
30	UV-Vis-Spectrometer - Lambda 25 (7.1 Lab) (Open access)	Pankajkumar Gound	Anil Kottantharayil	7.1 Lab	Working
31	Wafer bonder (Open access)		Dipankar Saha	7.1 Lab	Partially Working

Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)
LIC : Deepti Rukade(NH), Pankaj Upadhyay

	System Name	System Owner	Faculty in-charge	Location	Status
32	Temperature Dependent Spectral Response Measurement system - PL set up (Controlled access)	ankit udai Pratim Saha	Dipankar Saha	Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)	Working
33	Transient Absorption Pump Probe Spectrometer (Controlled access)	Pratim Saha	Dipankar Saha	Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)	Working

Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)
LIC : Bazila (H) Parvez, Deepti Rukade(NH), Jaya Jha, Mahalaxmi Patil

	System Name	System Owner	Faculty in-charge	Location	Status
34	Magnetoresistance Setup (Open access)	Ambika Shanker Shukla	Ashwin Tulapurkar	Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)	Working
35	RF Cryogenic Device Characterization system (Controlled access)	Bazila (H) Parvez	Dipankar Saha	Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)	Working

Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)
LIC : Deepti Rukade(NH), Kanchan Singh Rana, Kulasekaran Muniappan, Navneet Kumar Thakur [H]

	System Name	System Owner	Faculty in-charge	Location	Status
36	FPA (Focal Plane Array) Characterization set up (Open access)	Kulasekaran Muniappan	Subhananda Chakrabarti	Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)	Working
37	Hall Measurement System (Open access)	Kulasekaran Muniappan	Subhananda Chakrabarti	Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)	Working
38	Spectral Response-single pixel characterisation (Controlled access)	Kulasekaran Muniappan	Subhananda Chakrabarti	Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)	Working
39	Wire Bonder_Hybond (Open access)	Kulasekaran Muniappan	Subhananda Chakrabarti	Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)	Working

Bio Sensors Lab (NanoE bldg, 7th floor)
LIC : Deepti Rukade(NH), Madhuri Vinchurkar, Rajul Patkar

	System Name	System Owner	Faculty in-charge	Location	Status
40	Contact Angle Instrument (GBX) (Open access)	Pankajkumar Gound	Saurabh Lodha	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
41	Eppendorf FemtoJet 4x Microinjector (Open access)	Pankajkumar Gound	Soumyo Mukherji	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
42	Fluorescence Microscope (Z1) (Controlled access)	Pankajkumar Gound	Kasturi Saha	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
43	FTIR (Open access)	Pankajkumar Gound	Anil Kottantharayil	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
44	Laser Engraving System (LES) (Open access)	Pankajkumar Gound	Soumyo Mukherji	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
45	Owlstone Vapour Generator (OVG-4) (Open access)	Pankajkumar Gound	Saurabh Lodha	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
46	Potentiostat (Open access)	Pankajkumar Gound	Saurabh Lodha	Bio Sensors Lab (NanoE bldg, 7th floor)	Working
47	UV-Vis-NIR Spectrometer - Lambda 750 (Controlled access)	Pankajkumar Gound	Anil Kottantharayil	Bio Sensors Lab (NanoE bldg, 7th floor)	Working

Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)
LIC : Deepti Rukade(NH), Paritosh Meihar

	System Name	System Owner	Faculty in-charge	Location	Status
48	Aries(Temperature Dependent IV/CV) (Open access)	Paritosh Meihar	Saurabh Lodha	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
49	Cryogenic probe station (Controlled access)	Himani Jawa	Saurabh Lodha	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
50	Polaris (Stress/Long Time Measurements) (Open access)	Paritosh Meihar Jayatika (H) Sakhuja	Udayan Ganguly	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
51	Proxima (Fast IV Measurement/ B1500) (Open access)	Paritosh Meihar	Anil Kottantharayil	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
52	RIGEL (Keysight B1500) (Open access)	Paritosh Meihar Jayatika (H) Sakhuja	Udayan Ganguly	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working
53	Sirius (NBTI Setup) (Open access)	Paritosh Meihar	Udayan Ganguly	Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)	Working

EC Lab
LIC : Deepti Rukade(NH), Madhuri Mishra, Minita Surwade (NH)

	System Name	System Owner	Faculty in-charge	Location	Status
54	Cross section TEM sample preparation unit - Dimpler (Controlled access)	Minita Surwade (NH)	Anil Kottantharayil	EC Lab	Working
55	Cross section TEM sample preparation unit - Disc Cutter (Controlled access)	Minita Surwade (NH)	Anil Kottantharayil	EC Lab	Working
56	Cross section TEM sample preparation unit - PIPS (Controlled access)	Minita Surwade (NH)	Anil Kottantharayil	EC Lab	Working
57	Cross section TEM sample preparation unit - Ultrasonic Cutter (Controlled access)	Minita Surwade (NH)	Anil Kottantharayil	EC Lab	Working
58	EC Lab Hot air Oven (Open access)	Minita Surwade (NH)	Ashwin Tulapurkar	EC Lab	Working
59	Electroplating system - Au/Ni/Cu (Open access)	Minita Surwade (NH)	Dipankar Saha	EC Lab	Working
60	General Purpose Wet Bench (EC Lab) (Open access)	Minita Surwade (NH)	Anil Kottantharayil	EC Lab	Working
61	Logitech PM5 Precision Lapping and Polishing Machine (Controlled access)	Kulasekaran Muniappan	Subhananda Chakrabarti	EC Lab	Working
62	Logitech WSB2 Wafer Substrate Bonding Unit (Open access)	Kulasekaran Muniappan	Subhananda Chakrabarti	EC Lab	Working
63	PLD target making furnace (Open access)	Madhuri Mishra Minita Surwade (NH)	Subhananda Chakrabarti	EC Lab	Working
64	Spinner 2 Inch (PDMS) (Open access)	Minita Surwade (NH)	Dipankar Saha	EC Lab	Working
65	Vapor generator for explosive detection (Open access)		V Ramgopal Rao	EC Lab	Working

MBE Clean Room 1 (NanoE bldg, Gr floor)
LIC : Deepti Rukade(NH), Jay Agawane, RITAM SARKAR

	System Name	System Owner	Faculty in-charge	Location	Status
66	Molecular Beam Epitaxy III Nitrides (Controlled access)	Robin Dahiya (H) Soumyadip Chatterjee (H)	Apurba Laha	MBE Clean Room 1 (NanoE bldg, Gr floor)	Working
67	Molecular Beam Epitaxy III-V (Controlled access)		Subhananda Chakrabarti	MBE Clean Room 1 (NanoE bldg, Gr floor)	Working
68	Molecular Beam Epitaxy Si, Ge, Sn (Controlled access)	Dhammapriy Gayakwad Alisha Nanwani	Suddhasatta Mahapatra	MBE Clean Room 1 (NanoE bldg, Gr floor)	Working

MBE Clean Room 2 (NanoE bldg, Gr floor)
LIC : Deepti Rukade(NH), Jay Agawane, RITAM SARKAR

	System Name	System Owner	Faculty in-charge	Location	Status
69	6 Target E Beam Evaporator (Controlled access)	Goma Kumari KC	Subhananda Chakrabarti	MBE Clean Room 2 (NanoE bldg, Gr floor)	Working
70	Dicer (Controlled access)	Kulasekaran Muniappan	Subhananda Chakrabarti	MBE Clean Room 2 (NanoE bldg, Gr floor)	Working
71	Flip Chip Bonder (Controlled access)	Kulasekaran Muniappan	Subhananda Chakrabarti	MBE Clean Room 2 (NanoE bldg, Gr floor)	Working
72	In Thermal Evaporator (Controlled access)	Goma Kumari KC	Subhananda Chakrabarti	MBE Clean Room 2 (NanoE bldg, Gr floor)	Working

Micro1 Lab
LIC : Deepti Rukade(NH), Hemlata Tiwari (NH), Minita Surwade (NH), Ravindra Singh Pokharia

	System Name	System Owner	Faculty in-charge	Location	Status
73	2 inch Boron_Solid source Diffusion Furnace (Open access)	Pankajkumar Gound	Anil Kottantharayil	Micro1 Lab	Working
74	2 inch CMOS specific FGA furnace (Open access)		Anil Kottantharayil	Micro1 Lab	Working
75	2 inch Dry oxidation Furnace (Open access)	Pankajkumar Gound	Anil Kottantharayil	Micro1 Lab	Working
76	2 inch General purpose Forming gas(FGA)/ Ar /N2 annealing furnace (Open access)	Pankajkumar Gound	Anil Kottantharayil	Micro1 Lab	Working
77	2 inch N2 Annealing Furnace (Open access)	Pankajkumar Gound	Anil Kottantharayil	Micro1 Lab	Working
78	2 inch Phosphorous_Solid source Diffusion Furnace (Open access)		Anil Kottantharayil	Micro1 Lab	Partially Working
79	2 inch Wet oxidation Furnace (Open access)	Pankajkumar Gound	Anil Kottantharayil	Micro1 Lab	Working
80	4 target E-beam evaporator (Open access)	Minita Surwade (NH)	Apurba Laha	Micro1 Lab	Partially Working
81	Dielectric - sputter System (Open access)	Minita Surwade (NH) Madhuri Mishra	Ashwin Tulapurkar	Micro1 Lab	Partially Working
82	Gold Electroplating System (Open access)	Bhanu B Upadhyay [NH]	Dipankar Saha	Micro1 Lab	Working
83	HRXRD (Controlled access)	Anjum Ahmed (NH) Swagata Bhunia	Apurba Laha	Micro1 Lab	Working
84	Thermal Evaporator - Al (Open access)	Shilpa Kharat Minita Surwade (NH)	Anil Kottantharayil	Micro1 Lab	Working
85	Thermal Evaporator-Cr/Au (Open access)	Shilpa Kharat Minita Surwade (NH)	Saurabh Lodha	Micro1 Lab	Not Working
86	Tube Washer (Open access)	Minita Surwade (NH)	Anil Kottantharayil	Micro1 Lab	Working

Micro1 Yellow Room
LIC : Akshata(NH) Bhosle, Deepti Rukade(NH), Mayur Pawar, Ravindra Singh Pokharia

	System Name	System Owner	Faculty in-charge	Location	Status
87	Barn-stead Lab-line Oven (Open access)		V Ramgopal Rao	Micro1 Yellow Room	Working
88	Karl Suss MJB4 Mask Aligner (Open access)	Hemant Kshirsagar Akshata(NH) Bhosle	Avradeep Pal	Micro1 Yellow Room	Not Working
89	Laser Writer (Open access)	Akshata(NH) Bhosle Nikhil (NH) Palkar	Kasturi Saha	Micro1 Yellow Room	Partially Working
90	Multi-pocket Electron-beam Evaporator (4 target - GaN) (Controlled access)	Mahalaxmi Patil Sreenadh (H) Surapaneni	Dipankar Saha	Micro1 Yellow Room	Working
91	Probe Sonicator (Open access)		Saurabh Lodha	Micro1 Yellow Room	Working
92	Spinner 2 inch (General Purpose) (Open access)	Hemant Kshirsagar Akshata(NH) Bhosle	Saurabh Lodha	Micro1 Yellow Room	Working
93	Spinner 2 inch (SU8, PPR) (Open access)	Hemant Kshirsagar Akshata(NH) Bhosle	Saurabh Lodha	Micro1 Yellow Room	Working
94	STSRIE (Open access)	Rowtu Srinu (H)	Suddhasatta Mahapatra	Micro1 Yellow Room	Working

Micro2 Lab
LIC : Anjum Ahmed (NH), Deepti Rukade(NH), Madhuri Mishra

	System Name	System Owner	Faculty in-charge	Location	Status
95	4 probe Measurement (Automatic) (Open access)	Ambika Shanker Shukla Anjum Ahmed (NH)	Saurabh Lodha	Micro2 Lab	Working
96	4 Probe Measurement (Manual) (Open access)	Anjum Ahmed (NH)	Saurabh Lodha	Micro2 Lab	Working
97	DektakXT Profilometer (Controlled access)	Anjum Ahmed (NH) Shilpa Kharat	Saurabh Lodha	Micro2 Lab	Working
98	Filmetrics Reflectometer (Open access)	Anjum Ahmed (NH) Poonam (NH) Katkar	Udayan Ganguly	Micro2 Lab	Working
99	Hot wire CVD(HWCVD) (Open access)	Anjum Ahmed (NH)	Anil Kottantharayil	Micro2 Lab	Working
100	Organic Evaporation System (Open access)	Anjum Ahmed (NH)	Dinesh Kabra	Micro2 Lab	Working
101	Photoluminescence Measurement set up (PL Set up) (Controlled access)	Kulasekaran Muniappan Raveesh Gourishetty	Subhananda Chakrabarti	Micro2 Lab	Partially Working
102	Plasma Immersion Ion Implantation (PIII) (Open access)	Anjum Ahmed (NH)	Saurabh Lodha	Micro2 Lab	Working
103	X-ray Photoelectron Spectroscopy (Controlled access)	Anjum Ahmed (NH) Jayeeta Sen (NH)	Saurabh Lodha	Micro2 Lab	Not Working

Nano Lab
LIC : Anjum Ahmed (NH), Deepti Rukade(NH), Hemant Kshirsagar, Rowtu Srinu (H)

	System Name	System Owner	Faculty in-charge	Location	Status
104	ALD (Open access)	Anjum Ahmed (NH)	Saurabh Lodha	Nano Lab	Working
105	ALD LL (Controlled access)	Anjum Ahmed (NH)	Saurabh Lodha	Nano Lab	Working
106	Inductively coupled plasma CVD (ICPCVD) (Open access)	Pradeep Nyaupane Hemant Kshirsagar	Dipankar Saha	Nano Lab	Not Working
107	Nano Wet Bench (Open access)	Deepti Rukade(NH)	Saurabh Lodha	Nano Lab	Working
108	Olympus Microscope_Nano Lab (Open access)	Anjum Ahmed (NH) Deepti Rukade(NH)	Dipankar Saha	Nano Lab	Working
109	Rapid Thermal Processing(RTP) (Open access)	Bhanu B Upadhyay [NH] Arpit Sahu	Dipankar Saha	Nano Lab	Working
110	Sentech Ellipsometer (Open access)	Nikhil (NH) Palkar Deepti Rukade(NH)	Anil Kottantharayil	Nano Lab	Working
111	Sputter (ATC 2200) (Open access)	Paritosh Meihar	Udayan Ganguly	Nano Lab	Partially Working
112	Sputter (Orion) (Controlled access)	Ambika Shanker Shukla Akanksha Chouhan	Ashwin Tulapurkar	Nano Lab	Working
113	Ultech Furnace Anneal (Open access)		Anil Kottantharayil	Nano Lab	Working

Nano Litho Lab
LIC : Akshata(NH) Bhosle, Deepti Rukade(NH), Hemant Kshirsagar, Himani Jawa, Rowtu Srinu (H)

	System Name	System Owner	Faculty in-charge	Location	Status
114	Double Sided Aligner (DSA) (Open access)	Hemant Kshirsagar Akshata(NH) Bhosle	Dipankar Saha	Nano Litho Lab	Partially Working
115	RaithEBL_Long (Open access)	Anuj Bathla (H) Abhay Anand V S	Suddhasatta Mahapatra	Nano Litho Lab	Working
116	RaithEBL_Short (Open access)	Abhay Anand V S Anuj Bathla (H)	Suddhasatta Mahapatra	Nano Litho Lab	Working
117	Spinner 2 inch (PPR) (Open access)	Hemant Kshirsagar Akshata(NH) Bhosle	Dipankar Saha	Nano Litho Lab	Working
118	Spinner 4 inch (PMMA) (Open access)	Akshata(NH) Bhosle Hemant Kshirsagar	Dipankar Saha	Nano Litho Lab	Partially Working
119	Spinner 8 inch (General Purpose) (Open access)	Hemant Kshirsagar Akshata(NH) Bhosle	Dipankar Saha	Nano Litho Lab	Working
120	Torrey Pines Scientific Hi-temp Hotplate (Open access)	Akshata(NH) Bhosle		Nano Litho Lab	Not Working
121	Torrey Pines Scientific Low-temp Hotplate (Open access)	Akshata(NH) Bhosle		Nano Litho Lab	Not Working

Nanoelectronics Processing Lab (NanoE bldg, 1st floor)
LIC : Anjum Ahmed (NH), Deepti Rukade(NH), Mayur Pawar, Nama Premsai

	System Name	System Owner	Faculty in-charge	Location	Status
122	1.2 Lab wet bench (Open access)		Dipankar Saha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
123	AJA 6 Target E beam Evaporator (Controlled access)	Nama Premsai Anjum Ahmed (NH)	Apurba Laha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
124	Ambios XP-2 Profilometer (Open access)	Anjum Ahmed (NH)	Suddhasatta Mahapatra	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
125	Ar-ion Milling (Open access)	Ambika Shanker Shukla Rachit Pandey (H)	Ashwin Tulapurkar	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
126	ICPRIE (New) (Controlled access)	Bhanu B Upadhyay [NH] Yogendra Yadav (NH)	Dipankar Saha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Partially Working
127	ICPRIE (old) (Open access)	Bhanu B Upadhyay [NH] NETAJI SUVACHINTAK	Dipankar Saha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
128	Plasma asher (Open access)	Anuj Kumar Singh Shilpa Kharat	Suddhasatta Mahapatra	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
129	Plasma Doping System (Open access)	Rowtu Srinu (H)	Udayan Ganguly	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
130	PLD I (Controlled access)	Santosh Kumar Yadav Sana Ayyuby	Ashwin Tulapurkar	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
131	PLD II (Open access)	Ambika Shanker Shukla Pralay Paul	Ashwin Tulapurkar	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
132	PLD III (Controlled access)	Santosh Kumar Yadav	Apurba Laha	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working
133	PLD IV (Open access)	Santosh Kumar Yadav Bhabani Prasad Sahu	Ashwin Tulapurkar	Nanoelectronics Processing Lab (NanoE bldg, 1st floor)	Working

NMPF Lab
LIC : Anjum Ahmed (NH), Deepti Rukade(NH), Hemant Kshirsagar

	System Name	System Owner	Faculty in-charge	Location	Status
134	Deep Reactive Ion Etching – Samco (Controlled access)	Hemant Kshirsagar Anjum Ahmed (NH)	Suddhasatta Mahapatra	NMPF Lab	Working
135	Double Side Mask Aligner – Suss Microtech (Open access)	Anjum Ahmed (NH) Hemant Kshirsagar	Dipankar Saha	NMPF Lab	Working
136	LPCVD Furnace_PolySi, Doped PolySi (Controlled access)	Anjum Ahmed (NH) Hemant Kshirsagar	Anil Kottantharayil	NMPF Lab	Not Working
137	LPCVD Furnace_SixNy (Controlled access)	Anjum Ahmed (NH) Hemant Kshirsagar	Anil Kottantharayil	NMPF Lab	Not Working
138	LPCVD Furnace_Thermal oxidation (Controlled access)	Anjum Ahmed (NH) Hemant Kshirsagar	Anil Kottantharayil	NMPF Lab	Working
139	Multi target sputter – AJA International (Controlled access)	Hemant Kshirsagar Anjum Ahmed (NH)	Ashwin Tulapurkar	NMPF Lab	Working
140	Parylene CVD – SCS (Controlled access)	Anjum Ahmed (NH) Hemant Kshirsagar	Saurabh Lodha	NMPF Lab	Working
141	Rapid Thermal Annealing – Annealsys (Controlled access)	Hemant Kshirsagar Anjum Ahmed (NH)	Saurabh Lodha	NMPF Lab	Working
142	RIE-1C Plasma Etcher– Samco (Controlled access)	Hemant Kshirsagar Anjum Ahmed (NH)	Suddhasatta Mahapatra	NMPF Lab	Working
143	Spin Coater – Laurell (Open access)	Hemant Kshirsagar Akshata(NH) Bhosle	Dipankar Saha	NMPF Lab	Working
144	Wafer Dicer – ADT (Controlled access)	Hemant Kshirsagar Anjum Ahmed (NH)	Ashwin Tulapurkar	NMPF Lab	Working
145	Wet bench_2” RCA , Piranha (Open access)	Hemant Kshirsagar Anjum Ahmed (NH)	Saurabh Lodha	NMPF Lab	Working
146	Wet bench_Metal etching (Open access)	Anjum Ahmed (NH) Hemant Kshirsagar	Saurabh Lodha	NMPF Lab	Working
147	Wet bench_Solvents (Open access)	Anjum Ahmed (NH) Hemant Kshirsagar	Saurabh Lodha	NMPF Lab	Working
148	Wire Bonder (TPT HB16)_Aluminium (Controlled access)	Anjum Ahmed (NH) Pankajkumar Gound	Saurabh Lodha	NMPF Lab	Working

PPMS Lab
LIC : Ambika Shanker Shukla, Deepti Rukade(NH)

	System Name	System Owner	Faculty in-charge	Location	Status
149	PPMS - Integrated cryogen-free system (Controlled access)	Ambika Shanker Shukla Deepak Kumar	Ashwin Tulapurkar	PPMS Lab	Working

Spectroscopy Lab
LIC :

	System Name	System Owner	Faculty in-charge	Location	Status
150	MFP-3D-AFM (Controlled access)	Navneet (NH) Bhardwaj NETAJI SUVACHINTAK	Dipankar Saha	Spectroscopy Lab	Partially Working

Spintronics Lab
LIC : Ambika Shanker Shukla, Deepti Rukade(NH)

	System Name	System Owner	Faculty in-charge	Location	Status
151	Magneto Optic Kerr Effect (MOKE) (Controlled access)	Rachit Pandey (H) Akanksha Chouhan	Ashwin Tulapurkar	Spintronics Lab	Working
152	Magnetoresistance Setup with Vector Network Anlyser (VNA) and Rotating stage (Controlled access)	Ambika Shanker Shukla	Ashwin Tulapurkar	Spintronics Lab	Working

Wet Chemistry lab
LIC : Deepti Rukade(NH), Madhuri Mishra, Minita Surwade (NH), Shilpa Kharat

	System Name	System Owner	Faculty in-charge	Location	Status
153	2 inch RCA Clean Station (Open access)	Minita Surwade (NH) Pankajkumar Gound	Anil Kottantharayil	Wet Chemistry lab	Working
154	4 inch RCA Clean Station (Open access)	Minita Surwade (NH) Pankajkumar Gound	Saurabh Lodha	Wet Chemistry lab	Working
155	General Purpose Wet Bench (Wet Chemistry Lab) (Open access)	Minita Surwade (NH)	Saurabh Lodha	Wet Chemistry lab	Working
156	Olympus Microscope_2_Wet Chemistry Lab (Open access)	Pankajkumar Gound	Saurabh Lodha	Wet Chemistry lab	Working
157	Piranha Cleaning (Open access)	Minita Surwade (NH) Shilpa Kharat	Anil Kottantharayil	Wet Chemistry lab	Working
158	Scientific India Microscope (Open access)	Anjum Ahmed (NH)		Wet Chemistry lab	Not Working
159	TMAH wet etch station (Open access)	Minita Surwade (NH)	Saurabh Lodha	Wet Chemistry lab	Working

Marker	Meaning of marker
Not Working	Equipment may not be used
Partially Working	-- Equipment fully working but process not optimized -- Some parts of equipment not working. Eg. Heater in Metal sputter not working -- Not all processes that are possible in the tool are working -- Equipment working in manual mode temporarily. Eg. RAITH sample loading is manual sometimes
Fully Working	Fully operational
Critical Tool	Critical tools are widely used and their upkeep is of utmost priority. FICs should take the lead for driving the issues to make the tools UP on a high priority basis taking help from all teams (purchase, EMT, facility, process).

Definition of 'Controlled access' for Equipment in labs at IITBNF:

'Controlled access' is marked for certain tools to ensure that equipment is used on a priority basis for processing jobs which are part of Project deliverables and only after that they are made available for other users.

not open for training.
will be available for usage only through operators.
will be available for a fixed time period in a week as per the decision taken by the Faculty in charge of the tool.

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Equipment Status