Equipment Status

Sort By
7.1 Lab
LIC : Deepti Rukade, Pankajkumar Gound
System NameSystem OwnerFaculty in-chargeLocationStatus
1 2 inch general purpose annealing furnace_Fume hood 3Pankajkumar Gound
Anil Kottantharayil7.1 LabWorking
2 Atmospheric Furnace_AMAT CLEAN LabPankajkumar Gound
Saurabh Lodha7.1 LabWorking
3 Dip CoaterPankajkumar Gound
Saurabh Lodha7.1 LabWorking
4 Drying Oven_AMAT CLEAN LabPankajkumar Gound
Saurabh Lodha7.1 LabWorking
5 Fume Hood 4Pankajkumar Gound
7.1 LabWorking
6 Hot plate with stirrer (1)_Fume Hood 1Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
7 Hot plate with stirrer (2)_Fume Hood 1Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
8 Hot plate with stirrer (3)_2 arm glove boxPankajkumar Gound
Saurabh Lodha7.1 LabWorking
9 Hot plate with stirrer (4)_4-arm glove boxPankajkumar Gound
7.1 LabWorking
10 Hydrothermal Reactor_Fume Hood 27.1 LabWorking
11 pH MeterPankajkumar Gound
7.1 LabWorking
12 Schlenk Line (2)_Fume Hood 3Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
13 SILAR controllerPankajkumar Gound
7.1 LabWorking
14 Spin Coater_4 arm glove boxPankajkumar Gound
7.1 LabWorking
15 Thermogravimetric AnalyzerPankajkumar Gound
Saurabh Lodha7.1 LabWorking
16 Tube Furnace_Fume hood 5Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
17 Contact Angle System (Data Physics)Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
18 FTIR Spectrometer (Spectrum 65)Pankajkumar Gound
Anil Kottantharayil7.1 LabNot Working
19 Olympus Microscope_AMAT CLEAN LabPankajkumar Gound
Saurabh Lodha7.1 LabWorking
20 UV-Vis-Spectrometer - Lambda 25 (CLEAN Lab)Pankajkumar Gound
Anil Kottantharayil7.1 LabWorking
21 2-arm glove box_AMAT CLEAN LabPankajkumar Gound
Saurabh Lodha7.1 LabWorking
22 4-arm glove box_AMAT CLEAN LabPankajkumar Gound
Saurabh Lodha7.1 LabWorking
23 Chemical Mechanical PlanarisationUdayan Ganguly7.1 LabWorking
24 Schlenk Line (1)_Fume Hood 1Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
25 Owlstone Vapour Generator (OVG-4)Saurabh Lodha7.1 LabWorking
26 Ultrasonicator_Fume Hood 1Pankajkumar Gound
Saurabh Lodha7.1 LabWorking
27 UV-Ozone Cleaner_AMAT CLEAN LabPankajkumar Gound
Saurabh Lodha7.1 LabWorking
28 Wafer bonderDipankar Saha7.1 LabPartially Working
29 Wire BonderKulasekaran Muniappan
Suddhasatta Mahapatra7.1 LabWorking

Applied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)
LIC : Deepti Rukade, Pankaj Upadhyay
System NameSystem OwnerFaculty in-chargeLocationStatus
30 Temperature Dependent Spectral Response Measurement system - PL set upPankaj Upadhyay
Dipankar SahaApplied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)Working
31 Transient Absorption Pump Probe SpectrometerDipankar SahaApplied Quantum Mechanics Lab 1(NanoE bldg, 5th floor)Working

Applied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)
LIC : Deepti Rukade, Jaya Jha
System NameSystem OwnerFaculty in-chargeLocationStatus
32 Magnetoresistance SetupAmbika Shanker Shukla
Ashwin TulapurkarApplied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)Working
33 RF Cryogenic Device Characterization systemJaya Jha
Dipankar SahaApplied Quantum Mechanics Lab 2(NanoE bldg, 5th floor)Working

Applied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)
LIC : Deepti Rukade, Kulasekaran Muniappan
System NameSystem OwnerFaculty in-chargeLocationStatus
34 FPA (Focal Plane Array) Characterization set upKulasekaran Muniappan
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working
35 Hall Measurement SystemSubhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Not Working
36 Spectral Response-single pixel characterisationKulasekaran Muniappan
Subhananda ChakrabartiApplied Quantum Mechanics Lab 3(NanoE bldg, 5th floor)Working

Bio Sensors Lab (NanoE bldg, 7th floor)
LIC : Deepti Rukade, Madhuri Vinchurkar, Rajul Patkar
System NameSystem OwnerFaculty in-chargeLocationStatus
37 Eppendorf FemtoJet 4x MicroinjectorPankajkumar Gound
Soumyo MukherjiBio Sensors Lab (NanoE bldg, 7th floor)Working
38 PotentiostatSaurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Working
39 Contact Angle Instrument (GBX)Pankajkumar Gound
Saurabh LodhaBio Sensors Lab (NanoE bldg, 7th floor)Not Working
40 Fluorescence Microscope (Z1)Kasturi SahaBio Sensors Lab (NanoE bldg, 7th floor)Working
41 FTIR Pankajkumar Gound
Anil KottantharayilBio Sensors Lab (NanoE bldg, 7th floor)Not Working
42 UV-Vis-NIR Spectrometer - Lambda 750 Pankajkumar Gound
Anil KottantharayilBio Sensors Lab (NanoE bldg, 7th floor)Working
43 Laser Engraving System (LES)Pankajkumar Gound
Soumyo MukherjiBio Sensors Lab (NanoE bldg, 7th floor)Working

Char Lab-2
LIC : Deepti Rukade, Nitin Patil
System NameSystem OwnerFaculty in-chargeLocationStatus
44 microPLSayantan Ghosh
Kartikey Thakar
Saurabh LodhaChar Lab-2Partially Working
45 PPMS - Integrated cryogen-free systemAmbika Shanker Shukla
Ashwin TulapurkarChar Lab-2Working

Device Characterization Lab(DC)(NanoE bldg, 3rd Floor)
LIC : Charu Saini, Deepti Rukade, Yaswanth Chebrolu
System NameSystem OwnerFaculty in-chargeLocationStatus
46 Aries(Temperature Dependent IV/CV)Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
47 Cryogenic probe stationHimani Jawa
Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
48 Cygnus(Organic Device Characterization)Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
49 Phoenix (Temperature Dependent IV/CV)Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
50 Polaris (Stress/Long Time Measurements)Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Not Working
51 Proxima (Fast IV Measurement/ B1500)Yaswanth Chebrolu
Anil KottantharayilDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
52 RIGEL (Keysight B1500)Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
53 Sirius (NBTI Setup)Udayan GangulyDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working
54 Vega (Room Temperature IV/ CV)Saurabh LodhaDevice Characterization Lab(DC)(NanoE bldg, 3rd Floor)Working

EC Lab
LIC : Deepti Rukade, Minita Surwade
System NameSystem OwnerFaculty in-chargeLocationStatus
55 Electroplating system - Au/Ni/CuMinita Surwade
Dipankar SahaEC LabWorking
56 PLD target making furnaceSubhananda ChakrabartiEC LabWorking
57 General Purpose Wet Bench (EC Lab)Minita Surwade
Anil KottantharayilEC LabWorking
58 Cross section TEM sample preparation unit - DimplerMinita Surwade
Anil KottantharayilEC LabWorking
59 Cross section TEM sample preparation unit - Disc CutterMinita Surwade
Anil KottantharayilEC LabWorking
60 Cross section TEM sample preparation unit - PIPSMinita Surwade
Anil KottantharayilEC LabWorking
61 Cross section TEM sample preparation unit - Ultrasonic CutterMinita Surwade
Anil KottantharayilEC LabWorking
62 EC Lab Hot air OvenMinita Surwade
Ashwin TulapurkarEC LabWorking
63 Logitech PM5 Precision Lapping and Polishing MachineKulasekaran Muniappan
Subhananda ChakrabartiEC LabWorking
64 Logitech WSB2 Wafer Substrate Bonding UnitKulasekaran Muniappan
Subhananda ChakrabartiEC LabWorking
65 Spinner 2 Inch (PDMS)Minita Surwade
Dipankar SahaEC LabWorking
66 Vapor generator for explosive detectionV Ramgopal RaoEC LabWorking

MBE Clean Room 1 (NanoE bldg, Gr floor)
LIC : Deepti Rukade, Jay Agawane, RITAM SARKAR
System NameSystem OwnerFaculty in-chargeLocationStatus
67 Molecular Beam Epitaxy III NitridesApurba LahaMBE Clean Room 1 (NanoE bldg, Gr floor)Working
68 Molecular Beam Epitaxy III-VDebi Prasad Panda
Subhananda ChakrabartiMBE Clean Room 1 (NanoE bldg, Gr floor)Working
69 Molecular Beam Epitaxy Si, Ge, SnSuddhasatta MahapatraMBE Clean Room 1 (NanoE bldg, Gr floor)Working

MBE Clean Room 2 (NanoE bldg, Gr floor)
LIC : Deepti Rukade, Jay Agawane, RITAM SARKAR
System NameSystem OwnerFaculty in-chargeLocationStatus
70 6 Target E Beam EvaporatorGoma Kumari KC
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
71 In Thermal EvaporatorGoma Kumari KC
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
72 DicerKulasekaran Muniappan
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working
73 Flip Chip BonderKulasekaran Muniappan
Subhananda ChakrabartiMBE Clean Room 2 (NanoE bldg, Gr floor)Working

MCL Lab
LIC : Aniruddha Khade
System NameSystem OwnerFaculty in-chargeLocationStatus
74 MFP-3D-AFMTarni Aggarwal
Navneet Bhardwaj
Dipankar SahaMCL LabWorking

Micro1 Lab
LIC : Deepti Rukade, Hemlata Tiwari, Minita Surwade
System NameSystem OwnerFaculty in-chargeLocationStatus
75 2 inch Annealing Furnace (Gen purpose Forming gas/ Ar annealing furnace) Pankajkumar Gound
Amita Rawat
Anil KottantharayilMicro1 LabWorking
76 2 inch Boron_Solid source Diffusion Furnace Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
77 2 inch CMOS specific FGA furnace Anil KottantharayilMicro1 LabWorking
78 2 inch Dry oxidation Furnace Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
79 2 inch N2 Annealing Furnace Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
80 2 inch Phosphorous_Solid source Diffusion Furnace Anil KottantharayilMicro1 LabPartially Working
81 2 inch Wet oxidation Furnace Pankajkumar Gound
Anil KottantharayilMicro1 LabWorking
82 4 target E-beam evaporatorMinita Surwade
Apurba LahaMicro1 LabPartially Working
83 Dielectric - sputter SystemAshwin TulapurkarMicro1 LabPartially Working
84 Gold Electroplating SystemBhanu B Upadhyay
Micro1 LabWorking
85 Thermal Evaporator - Al Minita Surwade
Anil KottantharayilMicro1 LabWorking
86 Thermal Evaporator-Cr/Au Anjum Ahmed
Minita Surwade
Saurabh LodhaMicro1 LabWorking
87 HRXRD Anjum Ahmed
Swagata Bhunia
Apurba LahaMicro1 LabWorking
88 SEM EVO 18Suddhasatta MahapatraMicro1 LabNot Working
89 Tube WasherMinita Surwade
Anil KottantharayilMicro1 LabWorking

Micro1 Yellow Room
LIC : Akshata Bhosle, Deepti Rukade, Mayur Pawar
System NameSystem OwnerFaculty in-chargeLocationStatus
90 Multi-pocket Electron-beam Evaporator (4 target - GaN)Yogendra Yadav
Dipankar SahaMicro1 Yellow RoomWorking
91 STSRIE Mayur Pawar
Suddhasatta MahapatraMicro1 Yellow RoomWorking
92 Karl Suss MJB4 Mask Aligner Hemant Kshirsagar
Akshata Bhosle
Apurba LahaMicro1 Yellow RoomWorking
93 Laser Writer Pankaj Upadhyay
Akshata Bhosle
Kasturi SahaMicro1 Yellow RoomNot Working
94 Spinner 2 inch (General Purpose) Hemant Kshirsagar
Akshata Bhosle
Saurabh LodhaMicro1 Yellow RoomWorking
95 Spinner 2 inch (SU8, PPR) Hemant Kshirsagar
Akshata Bhosle
Saurabh LodhaMicro1 Yellow RoomWorking
96 Barn-stead Lab-line OvenMayur Pawar
V Ramgopal RaoMicro1 Yellow RoomWorking
97 Probe SonicatorMayur Pawar
Saurabh LodhaMicro1 Yellow RoomWorking

Micro2 Lab
LIC : Anjum Ahmed, Deepti Rukade, Poonam Katkar
System NameSystem OwnerFaculty in-chargeLocationStatus
98 Hot wire CVD(HWCVD)Anjum Ahmed
Anil KottantharayilMicro2 LabNot Working
99 Organic Evaporation SystemAnjum Ahmed
Dinesh KabraMicro2 LabWorking
100 4 probe Measurement (Automatic)Ambika Shanker Shukla
Anjum Ahmed
Saurabh LodhaMicro2 LabWorking
101 4 Probe Measurement (Manual)Anjum Ahmed
Saurabh LodhaMicro2 LabWorking
102 DektakXT Profilometer Anjum Ahmed
Saurabh LodhaMicro2 LabWorking
103 Filmetrics ReflectometerAnjum Ahmed
Udayan GangulyMicro2 LabWorking
104 Leica MicroscopeAnjum Ahmed
Micro2 LabWorking
105 Photoluminescence Measurement set up (PL Set up)Kulasekaran Muniappan
Subhananda ChakrabartiMicro2 LabPartially Working
106 X-ray Photoelectron Spectroscopy Anjum Ahmed
Jayeeta Biswas (Sen)
Saurabh LodhaMicro2 LabNot Working
107 Plasma Immersion Ion Implantation (PIII) Jayeeta Biswas (Sen)
Anjum Ahmed
Saurabh LodhaMicro2 LabNot Working

Nano Lab
LIC : Deepti Rukade, Hemant Kshirsagar, Pijush Chakraborty
System NameSystem OwnerFaculty in-chargeLocationStatus
108 ALD Jayeeta Biswas (Sen)
Saurabh LodhaNano LabWorking
109 ALD LL Jayeeta Biswas (Sen)
Saurabh LodhaNano LabWorking
110 Inductively coupled plasma CVD (ICPCVD) Pradeep Nyaupane
Hemant Kshirsagar
Dipankar SahaNano LabPartially Working
111 Rapid Thermal Processing(RTP) Pankaj Upadhyay
Pijush Chakraborty
Dipankar SahaNano LabWorking
112 Sputter (ATC 2200) Pijush Chakraborty
Paritosh Meihar
Udayan GangulyNano LabPartially Working
113 Sputter (Orion)Ambika Shanker Shukla
Pijush Chakraborty
Ashwin TulapurkarNano LabWorking
114 Ultech Furnace AnnealAnil KottantharayilNano LabNot Working
115 Olympus Microscope Dipankar SahaNano LabWorking
116 Sentech EllipsometerPijush Chakraborty
Anil KottantharayilNano LabWorking
117 Nano Wet Bench Pijush Chakraborty
Saurabh LodhaNano LabWorking

Nano Litho Lab
LIC : Akshata Bhosle, Deepti Rukade, Hemant Kshirsagar
System NameSystem OwnerFaculty in-chargeLocationStatus
118 Double Sided Aligner (DSA) Yogendra Yadav
Akshata Bhosle
Dipankar SahaNano Litho LabWorking
119 RaithEBL_Long Shalini Shrivastava
Navneet Bhardwaj
Suddhasatta MahapatraNano Litho LabWorking
120 RaithEBL_Short Kartikey Thakar
Shalini Shrivastava
Suddhasatta MahapatraNano Litho LabWorking
121 Spinner 4 inch (PMMA) Akshata Bhosle
Hemant Kshirsagar
Dipankar SahaNano Litho LabNot Working
122 Spinner 8 inch (General Purpose) Hemant Kshirsagar
Akshata Bhosle
Dipankar SahaNano Litho LabWorking
123 Spinner 8 inch (PPR) Hemant Kshirsagar
Akshata Bhosle
Dipankar SahaNano Litho LabWorking
124 Torrey Pines Scientific Hi-temp HotplateAkshata Bhosle
Nano Litho LabWorking
125 Torrey Pines Scientific Low-temp HotplateAkshata Bhosle
Nano Litho LabNot Working

Nanoelectronics Processing Lab (NanoE bldg, 1st floor)
LIC : Deepti Rukade, Mayur Pawar, Pijush Chakraborty
System NameSystem OwnerFaculty in-chargeLocationStatus
126 AJA 6 Target E beam Evaporator Pijush Chakraborty
Apurba LahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
127 Graphene specific Argon annealing systemAnil KottantharayilNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
128 Plasma Doping SystemUdayan GangulyNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
129 PLD IAshwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
130 PLD IIAmbika Shanker Shukla
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
131 PLD IIIApurba LahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
132 PLD IVPijush Chakraborty
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
133 Ambios XP-2 Profilometer Anjum Ahmed
Pijush Chakraborty
Suddhasatta MahapatraNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
134 Ar-ion MillingAmbika Shanker Shukla
Ashwin TulapurkarNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
135 ICPRIE (New) Bhanu B Upadhyay
Yogendra Yadav
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Not Working
136 ICPRIE (old) Bhanu B Upadhyay
Yogendra Yadav
Dipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
137 Plasma asher Anuj Kumar Singh
Minita Surwade
Suddhasatta MahapatraNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working
138 1.2 Lab wet benchDipankar SahaNanoelectronics Processing Lab (NanoE bldg, 1st floor)Working

NMPF Lab
LIC : Deepti Rukade, Hemant Kshirsagar
System NameSystem OwnerFaculty in-chargeLocationStatus
139 LPCVD Furnace_PolySi, Doped PolySi Anjum Ahmed
Hemant Kshirsagar
Anil KottantharayilNMPF LabNot Working
140 LPCVD Furnace_SixNy Anjum Ahmed
Hemant Kshirsagar
Anil KottantharayilNMPF LabNot Working
141 LPCVD Furnace_Thermal oxidation Anjum Ahmed
Hemant Kshirsagar
Anil KottantharayilNMPF LabNot Working
142 Multi target sputter – AJA International Hemant Kshirsagar
Anjum Ahmed
Ashwin TulapurkarNMPF LabWorking
143 Parylene CVD – SCS Anjum Ahmed
Hemant Kshirsagar
Saurabh LodhaNMPF LabNot Working
144 Rapid Thermal Annealing – Annealsys Hemant Kshirsagar
Anjum Ahmed
Saurabh LodhaNMPF LabWorking
145 Deep Reactive Ion Etching – Samco Hemant Kshirsagar
Anjum Ahmed
Saurabh LodhaNMPF LabNot Working
146 RIE-1C Plasma Etcher– Samco Hemant Kshirsagar
Anjum Ahmed
Suddhasatta MahapatraNMPF LabWorking
147 Double Side Mask Aligner – Suss Microtech Anjum Ahmed
Hemant Kshirsagar
Dipankar SahaNMPF LabNot Working
148 Spin Coater – Laurell Hemant Kshirsagar
Anjum Ahmed
Dipankar SahaNMPF LabWorking
149 Wet bench_2” RCA , Piranha Hemant Kshirsagar
Anjum Ahmed
Saurabh LodhaNMPF LabWorking
150 Wet bench_Metal etching Anjum Ahmed
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking
151 Wet bench_Solvents Anjum Ahmed
Hemant Kshirsagar
Saurabh LodhaNMPF LabWorking
152 Wafer Dicer – ADT Hemant Kshirsagar
Anjum Ahmed
Ashwin TulapurkarNMPF LabWorking
153 Wire Bonder – TPT Anjum Ahmed
Pankajkumar Gound
Saurabh LodhaNMPF LabWorking


FESEM Facility is now available for users. Click here for more details.

Status SymbolMeaning of Status Symbol
Not WorkingEquipment may not be used
Partially WorkingEquipment working with some minor problem****
Fully WorkingFully operational
Critical Tool


****
  • Equipment fully working but process not optimized
  • Some parts of equipment not working
          Ex:-Heater in Metal sputter not working
  • Some process working, other not
  • Equipment working in manual mode.
          Ex:-RAITH sample loading is manual sometimes

Definition of 'Controlled access' for Equipment in labs at IITBNF:
  • not open for training.
  • will be available for usage only through operators.
  • will be available for a fixed time period in a week as per the decision taken by the Faculty in charge of the tool.

This is to ensure that these critical equipment are used on a priority basis for processing jobs which are part of Project deliverables and then made available to other users.