## List of Wafers/ Mask plates

Material | Size | P/N | Orientation | Resistivity (Ω-cm) | Surface | |
---|---|---|---|---|---|---|

1 | Si | 2 Inch | N | <<100>> | 0.01--0.1 | SSP |

2 | Si | 2 Inch | N | <<100>> | 0.1--0.2 | SSP |

3 | Si | 2 Inch | N | <<100>> | 0.01--0.02 | SSP |

4 | Si | 2 Inch | N | <<100>> | 1--5 | SSP |

5 | Si | 2 Inch | N | <<100>> | 4--7 | SSP |

6 | Si | 2 Inch | N | <<100>> | 4--7 | DSP |

7 | Si | 2 Inch | N | <<110>> | 4--7 | SSP |

8 | Si | 2 Inch | N | <<100>> | 1--10 | SSP |

9 | Si | 2 Inch | N | <<100>> | 40--100 | DSP |

10 | Si | 2 Inch | N | <<100>> | <0.005 | SSP |

11 | Si | 2 Inch | N | <<100>> | 10--30 | SSP |

12 | Si | 2 Inch | N | <<100>> | 0.05--4 | DSP |

13 | Si | 2 Inch | N | <<100>> | 0.01 | SSP |

14 | Si | 2 Inch | P | <<100>> | 0.01--0.1 | SSP |

15 | Si | 2 Inch | P | <<100>> | 0.1--0.2 | SSP |

16 | Si | 2 Inch | P | <<100>> | 0.1--0.6 | SSP |

17 | Si | 2 Inch | P | <<100>> | 0.01--0.02 | SSP |

18 | Si | 2 Inch | P | <<100>> | 0.001--0.002 | SSP |

19 | Si | 2 Inch | P | <<100>> | 0.001--0.004 | SSP |

20 | Si | 2 Inch | P | <<100>> | 0.001--0.005 | SSP |

21 | Si | 2 Inch | P | <<100>> | 0.0005--0.001 | SSP |

22 | Si | 2 Inch | P | <<100>> | <0.005 | SSP |

23 | Si | 2 Inch | P | <<110>> | 1--5 | DSP |

24 | Si | 2 Inch | P | <<100>> | 1--10 | SSP |

25 | Si | 2 Inch | P | <<100>> | 4--7 | DSP |

26 | Si | 2 Inch | P | <<100>> | 4--7 | SSP |

27 | Si | 2 Inch | P | <<110>> | 4--7 | DSP |

28 | Si | 2 Inch | P | <<100>> | 10--30 | SSP |

29 | Si | 2 Inch | P | <<100>> | 40--100 | DSP |

30 | Si | 2 Inch | P | <<111>> | 0.1--0.6 | SSP |

31 | Si | 2 Inch | P | <<100>> | 1--5 | SSP |

32 | Si | 2 Inch | P | <<100>> | >1000 | SSP |

33 | Si | 2 Inch | P | <<111>> | >1000 | SSP |

34 | Si | 4 Inch | P | <<100>> | 0.02--0.04 | SSP |

35 | Si | 4 Inch | P | <<100>> | 1--5 | SSP |

36 | Si | 4 Inch | P | <<100>> | 4--7 | SSP |

37 | Si | 4 Inch | P | <<100>> | >1000 | SSP |

38 | Si | 4 Inch | P | <<100>> | 1--10 | DSP |

39 | Si | 4 Inch | P | <<100>> | 0.01--0.02 | SSP |

40 | Si | 4 Inch | P | <<100>> | 0.1--0.2 | SSP |

41 | Si | 4 Inch | N | <<100>> | 1--5 | SSP |

42 | Si | 4 Inch | N | <<100>> | 1--10 | SSP |

43 | Si | 8 Inch | NONE | <<100>> | 1--80 | SSP |

44 | Si | 2 Inch | N | <<100>> | 0.1--0.02 | SSP |

45 | Si | 2 Inch | P | <<100>> | 0.5--4 | DSP |

46 | Si | 2 Inch | P | <<100>> | 0.0005--0.0001 | SSP |

47 | Si | 2 Inch | P | <<100>> | >100 | DSP |

48 | Si | 2 Inch | P | <<111>> | 4--6 | SSP(DOPANT) |

49 | Si | 4 Inch | N | <<100>> | 10000--99999 | SSP |

50 | Si | 4 Inch | P | <<100>> | 10000--99999 | SSP |

51 | Si | 2 Inch | P | <<100>> | >30K | DSP |

52 | Si | 4 Inch | N | <<111>> | >30K | SSP |

53 | Si | 4 Inch | P | <<111>> | >30K | SSP |

54 | Si | 4 Inch | P | <<100>> | <0.01 | SSP |

55 | Si | 2 Inch | P | <<110>> | 4--7 | SSP |

56 | Si | 2 Inch | N | <<110>> | >1000 | SSP |

57 | Si | 4 Inch | P | <<111>> | 0.001--0.005 | SSP |

58 | Si | 4 Inch | N | <<100>> | 0.001--0.005 | SSP |

59 | Si | 2 Inch | N | <<111>> | >1000 | SSP |

60 | Si | 2 Inch | N | <<100>> | >1000 | SSP |

61 | Si | 4 Inch | P | <<100>> | 0.001--0.005 | SSP |

62 | Si | 4 Inch | N | <<111>> | 0.001--0.005 | SSP |

63 | Si | 4 Inch | P | <<100>> | 0.001--0.1 | SSP |

64 | Si | 8 Inch | P | <<100>> | 1--80 | SSP |

65 | Quartz | 4 Inch | NONE | <NONE> | C-Shaped | DSP |

66 | Ge | 2 Inch | N | <<100>> | 1--10 | SSP |

67 | Si | 4 Inch | P | <<111>> | 1--10 | SSP |

68 | Si | 4 Inch | P | <<111>> | 10--20 | SSP |

69 | Si | 3 Inch | P | <<100>> | 1--10 | SSP |

70 | Si | 3 Inch | P | <<111>> | 1--10 | SSP |

71 | Si | 2 Inch | N | <<100>> | 10--20 | SSP |

72 | Mask Plate | 3 Inch | Iron Oxide | <NONE> | NONE | NONE |

73 | Mask Plate | 5 Inch | Iron Oxide | <NONE> | NONE | NONE |

74 | Si | 2 Inch | N | <<100>> | 40--100 | SSP |

75 | Si | 2 Inch | N | <<100>> | <0.01 | SSP |

76 | Si | 4 Inch | N | <<100>> | <0.005 | SSP |

77 | Si | 2 Inch | P | <<100>> | 0.5--4 | SSP |

78 | Glass | 4 Inch | NONE | <NONE> | NONE | NONE |

79 | Si | 4 Inch | P | <<100>> | <0.005 | SSP |

80 | Si | 2 Inch | N | <<100>> | 0.001--0.005 | SSP |

81 | Si | 4 Inch | N | <<100>> | 4--7 | SSP |

82 | Si | 4 Inch | P | <<100>> | 4--7 | DSP |

83 | Quartz | 2 Inch | NONE | <NONE> | NONE | DSP |

84 | Si | 2 Inch | N | <<100>> | 0.001--0.002 | SSP |

85 | Si | 2 Inch | P | <<100>> | >10000 | SSP |

86 | Si | 2 Inch | P | <<111>> | 0.0005--0.001 | SSP |

87 | SOI | 4 Inch | P | <<100>> | >10000 | NONE |

88 | Si Fz (100 µm) | 4 Inch | Intrinsic/ Undoped | <<100>> | 10000--20000 | SSP |

89 | Si | 2 Inch | N | <<111>> | 0.001--0.01 | SSP |

90 | Si | 2 Inch | N | <<100>> | >10000 | SSP |

## ***Non-CEN Project specific wafers

Material | Size | P/N | Orientation (Ω-cm) | Resistivity | Surface | PI | |
---|---|---|---|---|---|---|---|

1 | Ge | 2'' | P | <100> | 1 - 10 | SSP | S.Lodha |

2 | Ge | 2'' | P | <110> | 1 - 10 | SSP | S.Lodha |

3 | Ge | 2'' | P | <111> | 1 - 10 | SSP | S.Lodha |

4 | Ge | 2'' | P | <100> | 0.01 - 0.1 | SSP | S.Lodha |

5 | Ge | 2'' | P | <111> | 0.02 - 0.1 | SSP | S.Lodha |

6 | Ge | 2'' | N | <100> | 1 - 10 | SSP | S.Lodha |

7 | Ge | 2'' | N | <100> | 0.01 - 0.1 | SSP | S.Lodha |

8 | Ge | 2'' | N | <100> | 0.001 - 0.01 | SSP | S.Lodha |

## Information about thickness of Wafers/Mask plates

- Thickness of 2" Si wafers: 275 +/- 25 um
- Thickness of 4" Si wafers: 525 +/- 20 um
- Thickness of 4" Quartz wafers: -- 500 +/- 20 um
- Thickness of 3" mask plates: 3 x 3 x 0.060"
- Thickness of 5" mask plates: 5 x 5 x 0.060"