List of Wafers/ Mask plates

MaterialSizeP/NOrientationResistivity (Ω-cm)Surface
1Si2N<100>0.01--0.1SSP
2Si2N<100>0.1--0.2SSP
3Si2N<100>0.01--0.02SSP
4Si2N<100>1--5SSP
5Si2N<100>4--7SSP
6Si2N<100>4--7DSP
7Si2N<110>4--7SSP
8Si2N<100>1--10SSP
9Si2N<100>40--100DSP
10Si2N<100><0.005SSP
11Si2N<100>10--30SSP
12Si2N<100>0.05--4DSP
13Si2N<100>0.01SSP
14Si2P<100>0.01--0.1SSP
15Si2P<100>0.1--0.2SSP
16Si2P<100>0.1--0.6SSP
17Si2P<100>0.01--0.02SSP
18Si2P<100>0.001--0.002SSP
19Si2P<100>0.001--0.004SSP
20Si2P<100>0.001--0.005SSP
21Si2P<100>0.0005--0.001SSP
22Si2P<100><0.005SSP
23Si2P<110>1--5DSP
24Si2P<100>1--10SSP
25Si2P<100>4--7DSP
26Si2P<100>4--7SSP
27Si2P<110>4--7DSP
28Si2P<100>10--30SSP
29Si2P<100>40--100DSP
30Si2P<111>0.1--0.6SSP
31Si2P<100>1--5SSP
32Si2P<100>>1000SSP
33Si2P<111>>1000SSP
34Si4P<100>0.02--0.04SSP
35Si4P<100>1--5SSP
36Si4P<100>4--7SSP
37Si4P<100>>1000SSP
38Si4P<100>1--10DSP
39Si4P<100>0.01--0.02SSP
40Si4P<100>0.1--0.2SSP
41Si4N<100>1--5SSP
42Si4N<100>1--10SSP
43Si8NONE<100>1--80SSP
44Si2N<100>0.1--0.02SSP
45Si2P<100>0.5--4DSP
46Si2P<100>0.0005--0.0001SSP
47Si2P<100>>100DSP
48Si2P<111>4--6SSP(DOPANT)
49Si4N<100>10000--99999SSP
50Si4P<100>10000--99999SSP
51Si2P<100>>30KDSP
52Si4N<111>>30KSSP
53Si4P<111>>30KSSP
54Si4P<100><0.01SSP
55Si2P<110>4--7SSP
56Si2N<110>>1000SSP
57Si4P<111>0.001--0.005SSP
58Si4N<100>0.001--0.005SSP
59Si2N<111>>1000SSP
60Si2N<100>>1000SSP
61Si4P<100>0.001--0.005SSP
62Si4N<111>0.001--0.005SSP
63Si4P<100>0.001--0.1SSP
64Si8P<100>1--80SSP
65Quartz4NONE<NONE>C-ShapedDSP
66Ge2N<100>1--10SSP
67Si4P<111>1--10SSP
68Si4P<111>10--20SSP
69Si3P<100>1--10SSP
70Si3P<111>1--10SSP
71Si2N<100>10--20SSP
72Mask Plate3Iron Oxide<NONE>NONENONE
73Mask Plate5Iron Oxide<NONE>NONENONE
74Si2N<100>40--100SSP
75Si2N<100><0.01SSP
76Si4N<100><0.005SSP
77Si2P<100>0.5--4SSP
78Glass4NONE<NONE>NONENONE
79Si4P<100><0.005SSP
80Si2N<100>0.001--0.005SSP
81Si4N<100>4--7SSP
82Si4P<100>4--7DSP
83Quartz2NONE<NONE>NONEDSP
84Si2N<100>0.001--0.002SSP
85SOI4P<100>>10000NONE
86Si Fz (100 µm)4Intrinsic/ Undoped<100>10000--20000SSP
87Si2N<111>0.001--0.01SSP

***Non-CEN Project specific wafers

MaterialSizeP/NOrientation (Ω-cm)ResistivitySurfacePI
1Ge2''P<100>1 - 10SSPS.Lodha
2Ge2''P<110>1 - 10SSPS.Lodha
3Ge2''P<111>1 - 10SSPS.Lodha
4Ge2''P<100>0.01 - 0.1SSPS.Lodha
5Ge2''P<111>0.02 - 0.1SSPS.Lodha
6Ge2''N<100>1 - 10SSPS.Lodha
7Ge2''N<100>0.01 - 0.1SSPS.Lodha
8Ge2''N<100>0.001 - 0.01SSPS.Lodha

Information about thickness of Wafers/Mask plates