Device NameLocationTemperatureHumidity
1ALD LLNano Lab22.50
18-01-2018 23:05:41
54.60
18-01-2018 23:05:42
2Chemistry RoomMicro1 lab23.20
18-01-2018 23:05:27
58.00
18-01-2018 23:05:28
3Etch CenturaAmat Lab18.40
18-01-2018 23:02:34
71.60
18-01-2018 23:02:35
4EVO SEM 18Micro1 Lab22.50
18-01-2018 23:05:31
62.40
18-01-2018 23:05:31
5HRXRDMICRO 123.80
18-01-2018 23:02:31
42.30
18-01-2018 23:02:32
6NCPRE Server E5:1CNCPRE S Room25.90
18-01-2018 23:04:45
43.80
18-01-2018 23:04:46
7RaithNano Litho L21.80
18-01-2018 23:04:10
57.50
18-01-2018 23:04:10
8SDSLEChar Lab 229.30
18-01-2018 23:02:05
44.80
18-01-2018 23:02:07
9Tube WasherChar Lab 227.30
18-01-2018 23:04:25
49.70
18-01-2018 23:04:26
10WorkbenchMicro 1 Lab23.20
18-01-2018 23:06:28
52.60
18-01-2018 23:06:29
11XPSMicro 2 Lab22.50
18-01-2018 23:02:32
58.90
18-01-2018 23:02:33