Device NameLocationTemperatureHumidity
1Chemistry RoomMicro1 Lab23.80
23-07-2018 12:51:23
69.20
23-07-2018 12:51:24
2DSANano Litho L28.00
23-07-2018 12:55:12
57.00
23-07-2018 12:55:12
3Etch CenturaAmat Lab30.00
23-07-2018 12:52:10
74.60
23-07-2018 12:52:11
4EVO SEM 18Micro1 Lab24.50
23-07-2018 12:53:03
52.10
23-07-2018 12:53:03
5HRXRDMicro1 Lab24.50
23-07-2018 12:54:13
67.30
23-07-2018 12:54:14
6NCPRE ServerRoom No. 30830.00
23-07-2018 12:55:47
75.10
23-07-2018 12:55:49
7SDSLEChar Lab 229.30
23-07-2018 12:55:49
55.60
23-07-2018 12:55:50
8WorkbenchMicro 1 Lab25.20
23-07-2018 12:52:50
77.50
23-07-2018 12:52:50